This stan ard covers the ESD control program req irements neces ary for setin up a program to han le ESDS, b sed on the historical exp rien e of b th mi tary an commercial organization..
Trang 1Partie 5-1: Protection des dispositifs électroniques contre les phénomènes
Trang 2THIS PUBLICATION IS COPYRIGHT PROT CTED
Copyright © 2 16 IEC, Ge e a, Switzerla d
Al rig ts reserv d Unles oth rwise sp cifie , n p rt of this p blc tio ma b re ro u e or uti ze in a y form
or b a y me ns,ele tro ic or me h nic l in lu in p oto o yin a d microfim, with ut p rmis io in writin from
eith r IEC or IEC's memb r Natio al Commite in th c u try of th re u ster If y u h v a y q estio s a o t IEC
c p rig t or h v a e q iry a o t o tainin a ditio al rig tsto this p blc tio , ple se c nta t th a dres b low or
y ur lo al IEC memb r Natio al Commite for furth r informatio
Droits d re ro u tio réserv s Sa f in ic tio c ntraire, a c n p rtie d c te p blc tio n p ut être re ro uite
ni uti sé so s q elq e forme q e c soit et p r a c n pro é é, éle tro iq e o mé a iq e, y c mpris la p oto o ie
et les microfims, sa s la c rd é rit d l EC o d Comité n tio al d l EC d p ys d d ma d ur Si v usa ez d s
q estio s sur le c p rig t d l EC o si v us d sirez o te ir d s droits su pléme taires sur c te p blc tio , uti sez
les c ord n é s ci-a rès o c nta tez le Comité n tio al d l EC d v tre p ysd résid n e
Th Intern tio al Ele trote h ic l Commis io (IEC) is th le din glo al org nizatio th t pre ares a d p blsh s
Intern tio al Sta d rds for al ele tric l ele tro ic a d relate te h olo ies
Ab ut IEC publ c tio s
Th te h ic l c nte t of IEC p blc tio s is k pt u d r c nsta t re iew b th IEC Ple se ma e sure th t y u h v th
latest e itio , a c rig n a or a ame dme t mig t h v b e p blsh d
IEC Catalog e - webstore.ie c / catalog e
Th sta d-alo e a plc tio for c nsultin th e tire
biblo ra hic l infor matio o IEC Inter natio al Sta d rds,
Te h ic l Sp cific tio s, Te h ic l Re orts a d oth r
d c me ts Av ia le for PC, Ma OS, An r oid Ta lets a d
iPa
IEC publc tio s s arc - w w.ie c /se rc pub
Th a v n e se rc e a les to fin IEC p blc tio s b a
v riety of crite a (r efer en e n mb r, te t, te h ic l
c mmite ,…) It also giv s informatio o pr oje ts, re la e
a d w ith r awn p blc tio s
Sta u to d te o al n w IEC p blc tio s Just Pu lsh d
d tais al n w p blc tio s rele se Av ia le o ln a d
also o c a mo th b emai
Ele to edia - ww w.ele to edia.org
Th w or l 's le din o ln dictio ary of ele tro ic a d
ele tr i al terms c ntainin 2 0 0 ter ms a d d finitio s in
En lsh a d Fre c , w ith e uiv le t terms in 15 a ditio al
la g a es Also k now n as th Inter natio al Ele tr ote h ic l
Vo a ulary (IEV) o ln
6 0 0 ele trote h ic l ter min lo y e tr i s in En lsh a d
Fre c e tr acte from th Terms a d Definitio s cla se of
IEC p blc tio s is u d sin e 2 0 Some e tr i s h v b e
c le te fr om e rler p blc tio s of IEC TC 3 , 7 , 8 a d
CIS R
IEC Cu tomer Serv ic Cente - webstore.ie c / cs
If y u w ish to giv us y our fe d a k o this p blc tio or
n e furth r as ista c ,ple se c nta t th Customer Ser vic
Ce tr e: csc@ie c
A pro os de lIEC
L Commis io Ele trote h iq e Intern tio ale (IEC) est la première org nisatio mo diale q i éla ore et p ble d s
Normes intern tio ales p ur to t c q i a trait à léle tricité, à léle tro iq e et a x te h olo ies a p re té s
A pro os de publc tio s IEC
L c nte u te h iq e d s p blc tio s IEC est c nstamme t re u Ve i ez v us as urer q e v us p s é ez lé itio la
plus ré e te, u c rig n um o ame d me t p ut a oir été p blé
Catalog e IEC - webstore.ie c / catalog e
Ap lc tio a to ome p ur c nsulter to s les r enseig eme ts
biblo ra hiq es sur les Normes intern tio ales,
Sp cific tio s te h iq es, Ra p r ts te h iq es et a tr es
d c me ts d l EC Disp nible p ur PC, Ma OS, ta letes
An roid et iPa
Re h rc e de publc tio s IEC - w w.ie c / se rc pub
L r ec er ch a a c e p rmet d tr ou er d s p blc tio s IEC
e uti sa t difér ents c tères (n mér o d référe c , te te,
c mité d’étu es,…) Ele d n e a s i d s infor matio s sur les
pr ojets et les p blc tio s rempla é s o r etir ées
Restez infor mé sur les n u eles p blc tio s IEC Just
Pu lsh d d tai e les n u eles p blc t io s p r ues
Disp nible e lg e et a s i u e fois p r mois p r emai
Ele to edia - ww w.ele to edia.org
L pr emier dictio n ir e e lg e d ter mes éle tro iq es et
éle tr i u s I c ntie t 2 0 0 termes et d finitio s e a glais
et e fr an ais, ainsi q e les ter mes é uiv le ts d ns 15
la g es a ditio n les Eg leme t a p lé Vo a ulaire
Ele tr ote h iq e Inter natio al (IEV) e lg e
Glos aire IEC - std.ie c / glos ary
6 0 0 e tré s termin lo iq es éle tr ote h iq es, e a glais
et e fr an ais, e tr aites d s articles Ter mes et Définitio s d s
p blc tio s IEC p r ues d p is 2 0 Plus c rtain s e tr ées
a té e res e traites d s p blc tio s d s CE 3 , 7 , 8 et
CIS R d l EC
Serv ic Clents - webstore.ie c / cs
Si v us d sir ez n us d n er d s c mme tair es sur c te
p blc tio o si v us a ez d s q estio s c nta tez-n us:
Trang 3Partie 5-1: Protection des dispositifs électroniques contre les phénomènes
Warnin ! Mak e s re th t y ou o tain d this publc tion from a a thorize distributor
Ate tion! Ve i ez v ou a s rer qu v ou av ez o te u c te publc tion via u distribute r a ré
Trang 4CONTENTS
FOREWORD 3
INTRODUCTION 5
1 Sco e 7
2 Normative referen es 7
3 Terms an definition 8
4 Person el safety 9
5 ESD control program 10 5.1 General 10 5.1.1 ESD control program req irements 10 5.1.2 ESD co rdinator 10 5.1.3 Tai orin 10 5.2 ESD control program administrative req irements 10 5.2.1 ESD control program plan 10 5.2.2 Trainin plan 10 5.2.3 Prod ct q al fication 11 5.2.4 Compl an e verification plan 1
5.3 ESD control program plan tec nical req irements 11 5.3.1 General 1
5.3.2 Grou din /eq ip tential b n in s stems 12 5.3.3 Person el grou din 14 5.3.4 ESD protected are s (EPA) 15 5.3.5 Pack gin 17 5.3.6 Markin 17 An ex A (normative) Test method 19 Bibl ogra h 2
Fig re 1 – Sc ematic of an EPA with a grou d referen e 13
Fig re 2 – Sc ematic of an eq ip tential b n in s stem 14
Fig re A.1 – Fo twe r fu ctional testin (example) 19
Ta le 1 – Grou din /b n in req irements 14
Ta le 2 – Person el grou din req irements 15
Ta le 3 – EPA req irements 17
Trang 5INTERNATIONAL ELECTROTECHNICAL COMMISSION
1) Th Intern tio al Ele trote h ic l Commis io (IEC) is a worldwid org nizatio for sta d rdizatio c mprisin
al n tio al ele trote h ic l c mmite s (IEC Natio al Commite s) Th o je t of IEC is to promote
intern tio al c -o eratio o al q estio s c n ernin sta d rdizatio in th ele tric l a d ele tro ic fields To
this e d a d in a ditio to oth r a tivities, IEC p blsh s Intern tio al Sta d rds, Te h ic l Sp cific tio s,
Te h ic l Re orts, Pu lcly Av ia le Sp cific tio s (PAS) a d Guid s (h re fer refere to as “IEC
Pu lc tio (s)”) Th ir pre aratio is e truste to te h ic l c mmite s; a y IEC Natio al Commite intereste
in th su je t d alt with ma p rticip te in this pre aratory work Intern tio al g v rnme tal a d n
n-g v rnme tal org nizatio s laisin with th IEC also p rticip te in this pre aratio IEC c la orates closely
with th Intern tio al Org nizatio for Sta d rdizatio (ISO) in a c rd n e with c n itio s d termin d b
a re me t b twe n th two org nizatio s
2) Th formal d cisio s or a re me ts of IEC o te h ic l maters e pres , as n arly as p s ible, a intern tio al
c nse sus of o inio o th rele a t su je ts sin e e c te h ic l c mmite h s re rese tatio from al
intereste IEC Natio al Commite s
3) IEC Pu lc tio s h v th form of re omme d tio s for intern tio al use a d are a c pte b IEC Natio al
Commite s in th t se se Whie al re so a le eforts are ma e to e sure th t th te h ic l c nte t of IEC
Pu lc tio s is a c rate, IEC c n ot b h ld resp nsible for th wa in whic th y are use or for a y
misinterpretatio b a y e d user
4) In ord r to promote intern tio al u iformity, IEC Natio al Commite s u d rta e to a ply IEC Pu lc tio s
tra sp re tly to th ma imum e te t p s ible in th ir n tio al a d re io al p blc tio s An div rg n e
b twe n a y IEC Pu lc tio a d th c r esp n in n tio al or re io al p blc tio sh l b cle rly in ic te in
th later
5) IEC itself d es n t pro id a y atestatio of c nformity In e e d nt c rtific tio b dies pro id c nformity
as es me t servic s a d, in some are s, a c s to IEC marks of c nformity IEC is n t resp nsible for a y
servic s c rie o t b in e e d nt c rtific tio b dies
6) Al users sh uld e sure th t th y h v th latest e itio of this p blc tio
7) No la i ty sh l ata h to IEC or its dire tors, emplo e s, serv nts or a e ts in lu in in ivid al e p rts a d
memb rs of its te h ic l c mmite s a d IEC Natio al Commite s for a y p rso al injury, pro erty d ma e or
oth r d ma e of a y n ture wh tso v r, wh th r dire t or in ire t, or for c sts (in lu in le al fe s) a d
e p nses arisin o t of th p blc tio , use of, or rela c u o , this IEC Pu lc tio or a y oth r IEC
Pu lc tio s
8) Ate tio is drawn to th Normativ refere c s cite in this p blc tio Use of th refere c d p blc tio s is
in isp nsa le for th c re t a plc tio of this p blc tio
9) Ate tio is drawn to th p s ibi ty th t some of th eleme ts of this IEC Pu lc tio ma b th su je t of
p te t rig ts IEC sh l n t b h ld resp nsible for id ntifyin a y or al su h p te t rig ts
International Stan ard IEC 613 0-5-1 has b en pre ared by IEC tec nical commite 101:
Electrostatic
This secon edition can els an re laces the first edition publ s ed in 2 0 This edition
con titutes a tec nical revision
This edition in lu es the fol owin sig ificant tec nical c an es with resp ct to the previou
edition:
a) Tec nical req irements were c an ed to al g IEC 613 0-5-1 with other in u try ESD
stan ard ;
b) Referen e doc ments were updated to reflect newly rele sed IEC stan ard ;
c) A section on prod ct q al fication was ad ed;
d) Ta le 4 was deleted an detai ed p ck gin req irements were defer ed to
Trang 6e) Clau e A.1 was removed an is now in lu ed in IEC 613 0-4-6.
The text of this stan ard is b sed on the fol owin doc ments:
Ful information on the votin for the a proval of this stan ard can b fou d in the re ort on
votin in icated in the a ove ta le
This publcation has b en drafed in ac ordan e with the ISO/IEC Directives, Part 2
A l st of al p rts in the IEC 613 0 series, publ s ed u der the general title Electrostatc , can
b fou d on the IEC we site
The commit e has decided that the contents of this publ cation wi remain u c an ed u ti
the sta i ty date in icated on the IEC we site u der "htp:/we store.iec.c " in the data
related to the sp cific publ cation At this date, the publ cation wi b
• reconfirmed,
• with rawn,
• re laced by a revised edition, or
• amen ed
Trang 7This p rt of IEC 613 0 covers the req irements neces ary to desig , esta l s , implement
an maintain an electrostatic dis harge (ESD) control program for activities that: man facture,
proces , as emble, in tal , p ck ge, la el, service, test, in p ct, tran p rt or otherwise
han le electrical or electronic p rts, as embles an eq ipment s s e tible to damage by
electrostatic dis harges gre ter than or eq al to 10 V h man b d model (HBM), 2 0 V
c arged device model (CDM) an 3 V on isolated con u tors Isolated con u tors were
historicaly re resented by mac ine model (MM) The 3 V l mit is related to the level
ac ieva le u in ionizers sp cified in this stan ard The MM test is no lon er req ired for
q al fication of devices, only the HBM an CDM tests are The MM test is retained in this
stan ard for proces control of isolated con u tors only
An contact an ph sical se aration of materials or flow of sol d , l q id , or p rticle-laden
gases can generate electrostatic c arges Common sources of ESD in lu e c arged:
p rson el, con u tors, common p lymeric materials, an proces in eq ipment ESD
damage can oc ur when:
• a c arged p rson or o ject comes into contact with an ESD sen itive device (ESDS);
• an ESDS comes into direct contact with a hig ly con u tive s rface whi e exp sed to an
electrostatic field;
• a c arged ESDS comes into contact with another con u tive s rface whic is at a diferent
electrical p tential This s rface may or may not b grou ded
Examples of ESDS are microcirc its, dis rete semicon u tors, thick an thin fi m resistors,
h brid devices, printed circ it b ard an piezo lectric cry tals It is p s ible to determine
device an item s s e tibi ty by exp sin the device to simulated ESD events The ESD
with tan voltage determined by sen itivity tests u in simulated ESD events do s not
neces ari y re resent the a i ty of the device to with tan ESD from re l sources at that
voltage level However, the levels of sen itivity are u ed to esta l s a b sel ne of
s s e tibi ty data for comp rison of devices with eq ivalent p rt n mb rs from diferent
man facturers Thre dif erent models have b en u ed for q al fication of electronic
comp nents – h man b d model (HBM), mac ine model (MM), an c arged device model
(CDM) In c r ent practice devices are q al fied only u in HBM an CDM s s e tibi ty tests
This stan ard covers the ESD control program req irements neces ary for setin up a
program to han le ESDS, b sed on the historical exp rien e of b th mi tary an commercial
organization The fu damental ESD control prin iples that form the b sis of this stan ard are
as fol ows
• Avoid a dis harge from an c arged, con u tive o ject (p rson el an esp cial y
automated han l n eq ipment into the ESDS This can b ac ompls ed by b n in or
electrical y con ectin al con u tors in the en ironment, in lu in p rson el, to a known
grou d or contrived grou d (as on b ard s ip or on aircraf This atac ment cre tes an
eq ip tential b lan e b twe n al con u tin o jects an p rson el Electrostatic
protection can b maintained at a p tential dif erent from a “zero” voltage grou d p tential
as lon as al con u tive o jects in the s stem are at the same p tential
• Avoid a dis harge from an c arged ESD sen itive device Chargin can res lt from direct
contact an se aration or it can b in u ed by an electric field Neces ary in ulators in
the en ironment can ot lose their electrostatic c arge by at ac ment to grou d Ionization
s stems provide neutralzation of c arges on these neces ary in ulators (circ it b ard
materials an some device p ck ges are examples of neces ary in ulators) The ESD
hazard cre ted by electrostatic c arges on the neces ary in ulators in the work place is
as es ed to en ure that a pro riate action are implemented, ac ordin to the risk
• On e outside of an electrostatic dis harge protected are (hereinafer refer ed to as an
EPA) it is general y not p s ible to control the a ove items, therefore, ESD protective
p ck gin may b req ired ESD protection can b ac ieved by en losin ESD sen itive
prod cts in static protective materials, althou h the typ of material de en s on the
Trang 8adeq ate protection Outside an EPA, static dis harge s ieldin materials are
recommen ed Whi st al of these materials are not dis u sed in this stan ard, it is
imp rtant to recog ize the dif eren es in their a pl cation For more information se
IEC 613 0-5-3
Eac comp n has diferent proces es, an so wi req ire a diferent blen of ESD
prevention me s res for an o timum ESD control program Me s res s ould b selected,
b sed on tec nical neces ity an careful y doc mented in an ESD control program plan, so
that al con erned can b s re of the program req irements
Trainin is an es ential p rt of an ESD control program in order to en ure that the p rson el
in olved u derstan the eq ipment an proced res they are to u e in order to b in
compl an e with the ESD control program plan Trainin is also es ential in raisin awarenes
an u derstan in of ESD is ues Without trainin , p rson el are ofen a major source of
ESD risk With trainin , they b come an efective first l ne of defen e again t ESD damage
Reg lar compl an e verification c ecks an tests are es ential to en ure that eq ipment
remain efective an that the ESD control program is cor ectly implemented in compl an e
with the ESD control program plan
Trang 9ELECTROSTATICS –
Part 5-1: Protection of electronic devices from
electrostatic phenomena – General requirements
This p rt of IEC 613 0 a pl es to activities that: man facture, proces , as emble, in tal ,
p ck ge, la el, service, test, in p ct, tran p rt or otherwise han le electrical or electronic
p rts, as embl es an eq ipment with with tan voltages gre ter than or eq al to 10 V HBM,
2 0 V CDM an 3 V for isolated con u tors ESDS with lower with tan voltages may
req ire ad itional control elements or adju ted l mits Proces es desig ed to han le items
that have lower ESD with tan voltage(s) can sti claim compl an e to this stan ard
This stan ard provides the req irements for an ESD control program IEC TR 613 0-5-2 [9]
1
provides g idan e on the implementation of this stan ard
This stan ard do s not a ply to electrical y initiated explosive devices, flamma le l q id ,
gases an p wders
The purp se of this stan ard is to provide the administrative an tec nical req irements for
esta l s in , implementin an maintainin an ESD control program (hereinaf er refer ed to
as the “program”)
NOT Isolate c n u tors were historic ly re rese te b MM
The folowin doc ments, in whole or in p rt, are normatively referen ed in this doc ment an
are in isp n a le for its a pl cation For dated referen es, only the edition cited a pl es For
u dated referen es, the latest edition of the referen ed doc ment (in lu in an
amen ments) a pl es
IEC 613 0-2-3, Electrostatc – Part 2-3: Meth ds ofte st for determinin th resista ce a d
resistviy of sold p la ar materials used to a oid ele ctrostatc ch rge ac u mulato
IEC 613 0-4-1, Electrostatc – Part 4-1: Sta dard te st meth ds for sp ecific a p licato s –
Electrical resista ce of flo r co e rin s a d instaled flo rs
IEC 613 0-4-3, Ele ctrostatc – Part 4-3: Sta dard test meth ds for sp ecific a p licato s –
IEC 613 0-4-5, Ele ctrostatc – Part 4-5: Sta dard test meth ds for sp e cific ap p licato s –
Meth ds for ch racterizin th electrostatc p rotecto of fo twe ra dflo rin in com b in to
wih a p e rso
IEC 613 0-4-6, Electrostatc – Part 4-6: Sta dard test meth ds for sp ecific a p licato s –
Wrist strap s
_ _ _ _ _ _ _
Trang 10IEC 613 0-4-7, Electrostatc – Part 4-7: Sta dard te st meth ds for sp ecific a p licato s –
Io izato
IEC 613 0-4-9, Electrostatc – Part 4-9: Sta dard te st meth ds for sp ecific a p licato s –
G arme ts
IEC 613 0-5-3, Ele ctrostatc – Part 5-3: Protecto of electro ic de vices from electrostatc
p he ome a – Prop ertes a d re uireme ts clas ificato for p ack gin inte ded for
electrostatc dis h rge se si v de ices
3 Terms and definitions
For the purp ses of this doc ment, the fol owin terms an definition a ply
NOT For th p rp ses of this d c me t “e rth” a d “gro n ” h v th same me nin
3.1
c arge d vic model
CDM
ESD stres model that a proximates the dis harge event that oc urs when a c arged
comp nent is q ickly dis harged to another o ject at a dif erent electrostatic p tential
Note 1 to e try: Ch rg d d vic mo elis d scrib d in A SI/E D /JEDEC JS-0 2-2 14 [1]
Note 2 to e try: This n te o ly a ples to th Fre c la g a e
3.2
common ground point
grou ded device or location where the con u tors of two or more ESD control items are
3.3
common conn ction point
device or location where the con u tors of two or more ESD control items are con ected in
order to brin the ESD protective items to the same electrical p tential throu h eq ip tential
b n in
3.4
e uip te tial bon
electrical con ection of con u tive p rts (or items u ed to control ESD) so that they are at
s bstantial y the same voltage u der normal an fault con ition
3.5
ele trostatic dis h rge
ESD
ra id tran fer of c arge b twe n b dies that are at diferent electrostatic p tentials
Note 1 to e try: This n te o ly a ples to th Fre c la g a e
3.6
ESD control items
materials or prod cts desig ed to prevent the generation of static c arge an /or dis ip te
static c arges that have b en generated so as to prevent damage to ESD sen itive devices
Trang 11Note 1 to e try: This n te o ly a ples to th Fre c la g a e.
3.8
ESD s n itiv de ic
ESDS
sen itive device, integrated circ it or as embly that may b damaged by electrostatic field or
electrostatic dis harge
3.9
ESD withsta d volta e
hig est voltage level that do s not cau e device fai ure
Note 1 to e try: Th d vic p s es al teste lower v lta es
ESD stres model that a proximates the dis harge from the fin ertip of a typical h man b in
onto a pin of a device with another pin grou ded
Note 1 to e try: Huma b d mo el is d scrib d in IEC 6 7 9-2 [2]
Note 2 to e try: Thisn te o ly a ples to th Fre c la g a e
3.12
ma hin model
MM
ESD stres model that a proximates the dis harge to a device pin d e to contact of
eq ipment or to ls s c as those fou d in the man facturin l ne
Note 1 to e try: Ma hin mo el isd scrib d in IEC 6 7 9-2 [3]
Note 2 to e try: Thisn te o ly a ples to th Fre c la g a e
terminal u ed to con ect p rts to e rth for safety re son
4 Personnel safety
The proced res an eq ipment des rib d in this stan ard may exp se p rson el to
hazardou electrical con ition Users of this stan ard are resp n ible for selectin
eq ipment that compl es with a pl ca le laws, reg latory codes an b th external an internal
p l c Users are cautioned that this stan ard can ot re lace or s p rsede an req irements
for p rson el safety
Electrical hazard red ction practices s al b exercised an pro er grou din in tru tion for
eq ipment s al b folowed
Trang 125 ESD control program
5.1.1 ESD control program re uireme ts
The ESD control program s al in lu e al the administrative an tec nical req irements of
this stan ard The ESD control program s al doc ment the lowest ESD with tan voltage(s)
that can b han led The organization s al esta l s , doc ment, implement, maintain an
verify the compl an e of the program in ac ordan e with the req irements of this stan ard
5.1.2 ESD coordinator
A p rson s al b as ig ed by the organization with the resp n ibi ty for implementin the
req irements of this stan ard in lu in esta ls in , doc mentin , maintainin an verifyin
the compl an e of the program
5.1.3 Tai oring
This stan ard, or p rtion of it, may not a ply to al a pl cation Tai orin is ac ompl s ed by
evaluatin the a pl ca i ty of e c req irement for the sp cific a plcation Up n completion
of the evaluation, req irements may b ad ed, modified or deleted Tai orin decision ,
in lu in rationale an tec nical ju tification, s al b doc mented
5.2 ESD control program a ministrativ re uireme ts
5.2.1 ESD control program pla
The organization s al pre are an ESD control program plan that ad res es e c of the
req irements of the program Those req irements are:
The plan is the prin ip l doc ment for implementin an verifyin the program The goal is a
ful y implemented an integrated program that conforms to internal q al ty s stem
req irements The plan s al a ply to al a plca le facets of the organization’s work
5.2.2 Trainin pla
The trainin plan s al define al p rson el that are req ired to have ESD awarenes an
prevention trainin At a minimum, initial an rec r ent ESD awarenes an prevention
trainin s al b provided to al p rson el who han le or otherwise come into contact with an
ESDS Initial trainin s al b provided b fore p rson el han le ESD sen itive devices The
typ an freq en y of ESD trainin for p rson el s al b defined in the trainin plan The
trainin plan s al in lu e a req irement for maintainin employe trainin record an s al
doc ment where the record are stored Trainin method an the u e of sp cific tec niq es
are at the organization’s dis retion The trainin plan s al in lu e method u ed by the
Trang 135.2.3 Produ t q al fic tion
The organization s al q al fy al ESD control items that are selected for u e as p rt of the
ESD control program Ta les 2 an 3 l st the req ired prod ct q alfication test method ,
as ociated l mits for e c ESD control item an other req irements as stated in this stan ard
Ac e ta le eviden e of prod ct q al fication in lu es:
a) Prod ct data s e ts publ s ed by the man facturer of the ESD control item:
1) The data s e t s al referen e the req ired IEC test method for that item
2) The data s e t l mits s al , at a minimum, comply with the l mits for that ESD control
item
b) Test re orts from an in e en ent la oratory: the test re ort s al referen e the a pl ca le
IEC test method an the l mits s al comply with the l mits for that item as sp cified in this
stan ard
c) Test re orts generated internal y by the organization for its own u e: the test re ort s al
referen e the a pl ca le IEC test method an the lmits s al comply with the l mits for that
item
d) For ESD control items that were in tal ed by the organization b fore the ado tion of this
stan ard, on-goin compl an e verification record can b u ed as eviden e of prod ct
q al fication
For ESD control items that are not l sted in Ta les 2 an 3, but are con idered to b a p rt of
the ESD control program, the organization u in s c items s al q alfy these prod cts prior
to u e The test method u ed for prod ct q al fication an the u er defined ac e tan e l mits
for e c item s al b doc mented in the ESD control program plan
NOT IEC TR 613 0-5-2 c ntains g id n e for items n t lste in Ta les 2 a d 3 of this d c me t
5.2.4 Compl a c v rific tion pla
A compl an e verification plan s al b esta ls ed to en ure the organization’s fulfi ment of
the req irements of the plan Proces monitorin (me s rements) s al b con u ted in
ac ordan e with a compl an e verification plan that identifies the tec nical req irements to b
verified, the me s rement l mits an the freq en y at whic those verification s al oc ur
The compl an e verification plan s al doc ment the test method u ed for proces monitorin
an me s rements If the organization u es dif erent test method to re lace those of this
stan ard, the organization s al b a le to s ow that the res lts ac ieved cor elate with the
referen ed stan ard Where test method are devised for testin items not covered in this
stan ard, these s al b adeq ately doc mented in lu in cor esp n in test l mits
Compl an e verification record s al b esta ls ed an maintained to provide eviden e of
conformity to the tec nical req irements
The test eq ipment selected s al b ca able of ma in the me s rements defined in the
compl an e verification plan
Con ideration s ould b ta en regardin the lowest relative h midity levels exp rien ed by
the organization; some of the me s rements s ould b made u der these con ition
5.3 ESD control program pla te h ic l re uireme ts
The folowin s bclau es des rib the es ential tec nical req irements u ed in the
develo ment of an ESD control program
The req ired l mits are b sed on the test method or stan ard l sted in Ta le 1, Ta le 2 an
Ta le 3 The compl an e verification plan s al doc ment the method u ed to verify the
Trang 14method an cor esp n in l mits u ed by the organization that difer from the test method
or referen es in Ta les 1 to 3 s al b doc mented with a tec nical ju tification that s p orts
their u e
Some of the tec nical elements l sted in Ta les 1 to 3 do not have a defined lower resistan e
l mit However, a minimum resistan e value may b req ired for safety re son
Se relevant national req irements an /or IEC 6 3 4[4] series, IEC TS 6 4 9-1[5]
IEC TS 6 4 9-2[6] IEC 61010-1[7] an IEC 61 4 [8]
5.3.2 Grounding/e uipote tial b nding s stems
In order to elminate ESD damage, it is neces ary to el minate dif eren es in p tential
b twe n ESDS an other con u tors that ESDS mig t come into contact with s c as
p rson el, automated han l n eq ipment, fixtures an mo i e eq ipment Al items that come
into contact with ESDS an are ca a le of con u tin electricity s al b con ected to grou d
or electricaly b n ed in order to el minate diferen es in p tential This can b ac ieved in
thre diferent way :
• Grou din u in protective e rth
The first an prefer ed ESD grou d is protective e rth if avai a le In this case, the ESD
control elements an grou ded p rson el are con ected to protective e rth (se
Fig re 1)
• Grou din u in fu ctional grou d
The secon ac e ta le ESD grou d is ac ieved throu h the u e of a fu ctional grou d
This con u tor can b a grou d rod, sta e or a se arate wirin s stem that is b n ed to
the AC grou d at the main service p nel (se Fig re 1); in order to el minate diferen es in
p tential b twe n protective e rth an the fu ctional grou d s stem, the two s stems
s al b electrical y b n ed together where p s ible
• Eq ip tential b n in
In the event that a grou d faci ty is not avai a le, ESD protection can b ac ieved by
con ectin al of the ESD control items together at a common con ection p int (se
Fig re 2) The maximum resistan e b twe n an protective item an the common
con ection p int s al comply with the lmits esta l s ed for the protective items as p r
Ta les 2 an 3
Whic ever grou din /b n in s stem is selected, it s al b refer ed to as “grou d” in the
remain er of this stan ard
Trang 156 Prote tiv e rth or fu ctio al gro n ( u ctio al gro n , if use , sh l b b n e to prote tiv e rth)
Figure 1 – Sc ematic of a EPA with a ground refere c
CAUTION: Users are ad ised to con ult local an national electrical codes an reg lation
b fore ma in an con ection to faci ty electrical wirin s stems
Trang 16Figure 2 – Sc ematic of a e uipote tial bonding s stem
Table 1 – Groundin /bondin re uireme ts
Te hnic l requirement Groun ing metho Te t metho /stan ard Required l mits)
Gro n in /b n in system Prote tiv e rth Natio al ele tric l system
Al p rson el s al b grou ded or eq ip tential y b n ed ac ordin to the req irements
b low when han l n ESDS When p rson el are se ted at ESD protective workstation , they
s al b con ected to grou d via a wrist stra s stem
For stan in o eration , p rson el can b grou ded via a wrist stra s stem or by a
fo twe r- lo rin s stem When a fo twe r- lo rin s stem is u ed, p rson el s al we r ESD
Trang 17• the total resistan e of the s stem ( rom the p rson, throu h the fo twe r an flo rin to
grou d) s al b les than 1,0 × 10
9
Ω;
• the maximum b d voltage generation s al b les than 10 V
Table 2 – Person el grou din re uireme ts
For situ tio swh re a E D g rme t is use as p rt of th wrist stra gro n in p th, th total system
resista c in lu in th p rso , g rme t a d gro n in c rd sh uld b les th n 3,5 × 10
gp refers to resista c to gro n a le p int
from th resista c v lu s th t were me sure for pro u t q alfic tio for th fo twe r a d th flo r to
c mply with th < 10 V b d v lta e g n ratio a d use th se resista c s for c mpla c v rific tio
5.3.4.1 Ha dl n ESDS a d a c s to EPA
Han ln of ESDS without ESD protective coverin or p ck gin s al b p rformed in an
EPA The b u daries of the EPA s al b cle rly identified as EPA bou daries (e.g, Caution
sig s in icatin the existen e of the EPA can b p sted an con pic ou to p rson el prior to
entry to the EPA.)
NOT An E A c n, for e ample, c nsist of a b idin , a e tire ro m or a sin le workstatio
Ac es to the EPA s al b lmited to p rson el who have completed a pro riate ESD
trainin Untrained in ivid als s al b es orted by trained p rson el whi e in an EPA
5.3.4.2 Ins lators
Al non-es ential in ulators an items (plastic an p p r), s c as cof e c ps, fo d
wra p rs an p rsonal items s al b removed from the workstation or an o eration where
Trang 18The ESD thre t as ociated with proces es ential in ulators or electrostatic field sources
s al b evaluated to en ure that:
• the electrostatic field at the p sition where the ESDS are han led s al not ex e d
If the me s red electrostatic field or s rface p tential ex e d the stated l mits, ionization or
other c arge mitigatin tec niq es s al b u ed
Some of the me s rements s ould b ta en at the lowest exp cted relative h midity
exp rien ed by the faci ty
NOT 1 Th se me sureme ts are ma e b se o th fre u n y d fin din th c mpla c v rific tio pla
NOT 2 An E Dthre t is c nsid re a metal to metal c nta t whie th E DSis in th prese c of th field
NOT 3 Th a c rate me sureme t of ele trostatic fields re uires th t th p rso ma in th me sureme t is
fami ar with th o eratio of th me surin e uipme t Most h n h ld meters re uire th t th re din b ta e at
a fix d dista c from th o je t Th y also n rmaly sp cify th t th o je t h s a minimum dime sio of fix d size
in ord r to o tain a a c rate re din
5.3.4.3 Isolate condu tors
When esta l s in an ESD control plan, if a con u tor that comes into contact with an ESDS
item can ot b grou ded or eq ip tential y b n ed together, then the proces s al en ure
that the dif eren e in p tential b twe n the con u tor an the contact of the ESDS item is
les than 3 V
This can b ac ompl s ed by me s rin the ESDS item an the con u tor by u in : a non
-contact electrostatic voltmeter or a hig imp dan e contact electrostatic voltmeter
NOT Th 3 V lmit is relate toth le ela hie a le usin io izers sp cifie inthis sta d rd
5.3.4.4 ESD control items
An EPA s al b esta l s ed wherever ESD sen itive prod cts are han led without ESD
protective coverin or p ck gin However, there are man diferent way to esta l s an
ESD control program Ta le 3 l sts some o tional ESD control items whic can b u ed to
control static electricity For those ESD control items that are selected for u e in the ESD
control program, the req ired ran e for that item b comes man atory
If the l mits in Ta le 3 are ex e ded, the ESD control program s al in lu e a taiorin
statement as req ired by 5.1.3
Trang 19Table 3 – EPA re uireme ts
Ω
R
p-p
< 1 × 109
Ωf
IEC 613 0-2-3 R
g
< 1 × 109
Ω IEC613 0-4-1 R
g
< 1 × 109
Ω
a
For pro u t q alfic tio , th e viro me tal c n itio s for testin sh uld b (12 ± 3) % R a d 2 °C ± 2 °C
Wh n n t sp cifie in th refere c d IEC sta d rd, th minimum e viro me tal c n itio in time for pro u t
q alfic tio sh uld b 4 h urs
b
Th test meth ds in th c mpla c v rific tio c lumnrefer to th b sic test pro e ureo ly It is n t
e p cte th t th test meth d wi b folowe in its e tirety
c
Symb ls use in this ta le: R
p-p refers to p int to p int resista c R
grefers to resista c to gro n a d R
ESD protective p ck gin an p ck ge markin s al b in ac ordan e with c stomer
contracts, purc ase orders, drawin or other doc mentation When the contract, purc ase
order, drawin or other doc mentation do s not define ESD protective p ck gin , the
organization s al define ESD protective p ck gin req irements for ESDS within the plan
b sed on IEC 613 0-5-3 Pack gin , when req ired, s al b defined for al material
movement within EPAs, b twe n EPAs, b twe n jo sites, field service o eration an to the
c stomer
5.3.6 Marking
ESDS, s stem or p ck gin markin s al b in ac ordan e with c stomer contracts,
Trang 20drawin or other doc mentation do s not define ESDS, s stem or p ck gin markin , the
organization, in develo in the ESD control program plan, s al con ider the ne d for
markin If it is determined that markin is req ired, it s al b doc mented as p rt of the
plan
Trang 21Annex A
(normative)
Test methods
The o erator s al stan with one fo t on the con u tive fo twe r electrode The han contact
plate s al b pres ed to verify that the p rson/o twe r s stem resistan e is within
ac e ta le p rameters (se Fig re A.1) The test s al b re e ted for the other fo t The test
a p ratu can b an integrated, commercial y avai a le tester or other in trumentation that is
ca a le of me s rin resistan e from 5,0 × 10
Trang 22Bibl ography
[1] ANSI/ESDA/JEDEC JS-0 2-2 14, ESDA/JED EC J int Sta dard for Electrostatc
Device Se si viy Testn – Ch rg d Device Model (CD M) – De vice Le e l
[2] IEC 6 7 9-2 , Semico ductor de ice s – Mech nical a d clmatc te st meth ds –
Part 2 : Electrostatc dis h rge (ESD) se si viy testn – Hu ma b ody model (HBM)
[3] IEC 6 7 9-2 , Semico ductor de ice s – Me ch nical a d clmatc te st meth ds –
Part 27:Electrostatc dis h rge (ESD ) se si viy testn – Machin model (MM)
[4] IEC 6 3 4 (al p rts), Low-v la e electrical instalato s
[5] IEC TS 6 4 9-1, Efects ofcurre nt o hu ma b eings a d lv stock – Part 1: G en ral
asp ects
[6] IEC TS 6 4 9-2, Efects of curre nt o hu ma b e in s a d lv stock – Part 2: Sp ecial
asp e cts
[7] IEC 61010-1, Safety re uirem ents for electrical e u ipme t for me sureme t, co trol
a d lab oratory use – Part 1: G e neral re qu ireme ts
[8] IEC 61 4 , Protecto against electric sh ck – Commo asp cts for instalato a d
e u ipme t
[9] IEC TR 613 0-5-2, Electrostatc – Part 5-2: Protecto of electro ic de ices from
ele ctrostatc p e nome na – Use r guide