3.225 15 Designer Wavelengths Variation of band-gap energy with composition x of In1-xGaxAs.. Tuller, 2001 Band-Gap Colors Mixed crystals of yellow cadmium sulfide CdS and black cadm
Trang 13.225 15
Designer Wavelengths
Variation of band-gap energy with composition x of In1-xGaxAs
© H.L Tuller, 2001
Band-Gap Colors
Mixed crystals of yellow cadmium sulfide CdS and black
cadmium selenide CdSe
Trang 23.225 17
Light Sources
• Photoluminescence
• Cathodoluminescence
• Electroluminescence
© H.L Tuller, 2001
♦ Energy
• onversion
• torage
• onservation
♦ Emissions
• Smoke stack
• Automotive
Challenges for New Millenium
Needed: dvances in sensors, actuators and energy conversion
C S C
a
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Automotive
Emissions
Factory
Emissions
Process Control
Aerospace
Performance
Electroceramics
Ceramics:
• Traditionally admired for their stability
• Mechanical
• Chemical
• Thermal
• Exhibit other key functional properties
• Electrical, Electrochemical, Electromechanical
• Optical
• Magnetic
Trang 43.225 21
Electroceramics Versatility
Atmosphere dependent conductivity (I
Kosacki and H.L Tuller, Sensors &
Actuators B 24-25, 370 (1995).)
High Strain (Pb0.98La0.02(Zr0.7Hf0.3)1-xTixO3 AFE
FE System (C Heremans and H.L Tuller, J Euro
Ceram Soc., 19, 1139 (1999).)
Semiconducting; Electrochemical; Piezoelectric; Electro-optic; Magnetic, …
Feedback Control System
System
Actuator
Sensor
Chemical Signal
Signal Electrical
Power
Chemical
Species
Micro-Processor Other Input
Trang 53.225 23
Sensors for Exhaust Gas Monitoring
Requirements
• clear dependence on pO2
• short response times < 100 ms
• 700<T<1000°C
• long term stability …
Sensor Materials
with Microprocessor System
Chemical
Environmental Stimulus
Requirements of Gas Sensor Materials
• High sensitivity
• High selectivity
• Reproducibility
• Fast response time
• Compatibility with Si microelectronics
• Long term stability
• Small size
• Low cost
Trang 63.225 25
3-Way Catalyst Conversion Efficiency
Potentiometric Gas Sensor
PO2(Ref)
PO2(Exhaust)
E Nernst Potential
Trang 73.225 27
Auto Exhaust Sensor
• Requirements
• Sensitivity
• Reproducibility
• Robust
• Low cost
•Miniaturization (e.g biological implants)
•Integration - logic, amplification, telemetry
•Portability - low power dissipation
•Rapid response
•Cost
Sensor Trends and Challenges
Neural recording/stimulation microprobe Probes 15µm thick 2-4mm long (Najafi and Hetke, IEEE
Trans Biomed Eng 37, 474 (1990).)
Trang 83.225 © H.L Tuller-2001 1
Measurement of Gas Sensor Performance
Si wafer ZnO film
H2
H2 H2 H2
Pt electrode SiO2 layer
Electrical Measurement
• Gas sensing materials:
1 Sputtered ZnO film (150 nm
(Massachusetts Institute of Technology)
2 Sputtered SnO2 film (60 nm)
(Fraunhofer Institute of Physical Measurement Techniques)
• Target gases:
H2, CO, NH3, NO2 , CH4
• Operating temperature:
320 - 460 ºC
Mechanisms in Semiconducting Gas Sensor
• Bulk:
O O = 2e ’ + V O + 1/2 O
2 (g)
n 2 [V O ] PO
2 1/2 = K R (T) ⇒ n = (2 K R (T)) 1/3 PO 2 -1/6
Bulk electronic conduction
modulate
Change in stoichiometry
Trang 93.225 © H.L Tuller-2001 3
Resistive Oxygen Sensors Based on SrTiO3
m
1
2
kT
E
pO
∝
σ
semiconducting oxide
Electrode
U I
2
O
p Exhaust
2-3
Acceptors: Al, Ni, Fe
Donors: Nb, Ta, Sb, Y, La , Ce, Pr, Nd, Pm, Sm, Gd
λ
log(pO2 / bar)
-5 -4 -3 -2 -1
0
1
donor acceptor
donor doped acceptor doped
Trang 103.225 © H.L Tuller-2001 5
Temperature Independence: High Acceptor Concentration in SrTiO3
10 -20 10 -15 10 -10 10 -5 10 0
0,1
1
750°C
800°C
900°C
850°C
950°C
pO2 / bar
m = 0,2
Sr(Ti0,65Fe0,35)O3
Response times
T / °C t90 / ms
900 6.5
800 26
750 83
700
[1] Menesklou et al, MRS fall meeting, Vol 604, p 305-10 (1999)
185
Oxygen Sensor in Thick Film Technology