microengineering mems and interfacing a practical guide

... away as retain samples by a cosmetics manufacturer willbecome a fIre hazard Medical and research laboratories have much the same storagerequirements as industrial laboratories All need adequatespace ... easy to reach? Are areas forhandling hazardous materials properly segregated? Are areas ofpotential hazards away from important traffic lanes? When all these questions are answered to the planner's ... 12Compressed Gases 93Trang 14Examples of Laboratory Handiwork 136Trang 16A laboratory may come in any size or shape It may be a room inan industrial plant, a wing of a hospital, or a whole building on acollege...

Ngày tải lên: 31/05/2014, 01:37

... Engineering and Science, Haym Benaroya and Seon Han 194 Damage Mechanics, George Z Voyiadjis and Peter I Kattan 195 Standard Handbook of Chains: Chains for Power Transmission and Material Handling, ... Gears and Their Vibration: A Basic Approach to Understanding Gear Noise, J Derek Smith 18 Chains for Power Transmission and Material Handling: Design and Applications Handbook, American Chain Association ... Microengineering, MEMS, and Interfacing: A Practical Guide, Danny Banks Trang 9DK3182_title 1/19/06 8:35 AM Page 1 Microengineering, MEMS, and Interfacing A Practical Guide Danny Banks Monisys Ltd Birmingham,...

Ngày tải lên: 10/08/2014, 05:20

... Trang 220 Microengineering, MEMS, and Interfacing: A Practical Guide1.2.1.4.3 Optical Proximity Effects Optical proximity effects are another aspect of photolithography that are felt most acutely ... previously imaged layer Alternative resist technologies are also available The PCB industry employs dry-film solid resists than can be used as structural materials in some MEMS applications, and a recent ... 02464, USA. Shipley: Rohm and Haas Electronic Materials, 455 Forest Street, Marlborough, MA 01752, USA electronicmaterials.rohmhaas.com Clariant Corp AZ Electronic Materials, 70 Meister Avenue,...

Ngày tải lên: 10/08/2014, 05:20

... © 2006 Taylor & Francis Group, LLC Trang 850 Microengineering, MEMS, and Interfacing: A Practical GuideThe ions of the plasma are accelerated towards the target, where they knock atoms from ... MEMS applications These DK3182_C002.fm Page 42 Friday, January 13, 2006 10:58 AM Copyright © 2006 Taylor & Francis Group, LLC Trang 444 Microengineering, MEMS, and Interfacing: A Practical Guidewhich ... 44 Friday, January 13, 2006 10:58 AM Copyright © 2006 Taylor & Francis Group, LLC Trang 546 Microengineering, MEMS, and Interfacing: A Practical Guide• Equipment may be contaminated if used...

Ngày tải lên: 10/08/2014, 05:20

... isopropyl alcohol (IPA) and then acetone, and then dry it This is not a particularly reliable approach, however, and acetone leaves a residue on the wafer (Soaking in acetone is normally used ... that the individual chips have been laid out aligned to an appropriate cleavage plane A diamond-tipped scribe is then drawn over the surface of the wafer to create a scratch, and flexing the wafer ... Group, LLC Trang 464 Microengineering, MEMS, and Interfacing: A Practical Guide2.7.1.3 RIE Pattern Transfer RIE can be quite aggressive on the mask material used Some practitioners have, however,...

Ngày tải lên: 10/08/2014, 05:20

... Trang 382 Microengineering, MEMS, and Interfacing: A Practical Guidealthough there are limitations — aspect ratios and the angle of channel walls are somewhat limited, as is the resolution achievable ... Topas (a) Acc.V Titerplatten (b) DK3182_C003.fm Page 85 Monday, January 16, 2006 12:44 PM Trang 686 Microengineering, MEMS, and Interfacing: A Practical GuidePDMS can be cast or spun over a master ... chemical attack As a result, microstructures can be produced in SU-8 with a relatively low initial capital investment Owing to its popularity, there are several data sheets and application notes available...

Ngày tải lên: 10/08/2014, 05:20

... or overlap will appear as a single contiguous area on the mask Diagonal bars can be approximated by an array of overlapping squares or rect-angles Tools for placing arrays of design features (either ... have disadvantages when dealing with wafers that incorporate micromechanical structures The saw and scribe induce mechanical vibration that can damage components, and the laser induces thermal ... DK3182_C004.fm Page 103 Friday, January 13, 2006 10:59 AM Copyright © 2006 Taylor & Francis Group, LLC Trang 5104 Microengineering, MEMS, and Interfacing: A Practical Guide metal electrodes at the...

Ngày tải lên: 10/08/2014, 05:20

... Xvia Xmetal Substrate (A1) Via (V1) Metal (M1) Xvia Xmetal Substrate (A1) Via (V1) Metal (M1) (b) (a) Trang 3124 Microengineering, MEMS, and Interfacing: A Practical Guide 4.6.4 STEP AND REPEAT ... instance, an accelerom-eter designed to inflate an air bag in the event of a car crash may not only incorporate a micromachined acceleration sensor but also electronics to condition the signal and ... they can be manufactured more cheaply because less assembly is required Various microsensors and microactuators are discussed in Chapter 5 and Chapter 6 DK3182_S002.fm Page 127 Monday, January...

Ngày tải lên: 10/08/2014, 05:20

... 11:17 AM Trang 2162 Microengineering, MEMS, and Interfacing: A Practical Guideaqueous solution of hydrogen chloride, giving rise to an aqueous solution of potassium chloride and water (a liquid) ... disposable devices • Massively parallel systems are possible • On-chip processing of data Of course, these are not necessarily advantages A high surface-area-to-volume ratio can be advantageous ... complementary strands are then rebuilt FIGURE 7.14 Nucleic acid chain (DNA). DNA Strand Direction Single DNA strands have two ends, the 3 end and the 5 end; the terminology arises from the standard...

Ngày tải lên: 10/08/2014, 05:20

... DK3182_C008.fm Page 202 Friday, January 13, 2006 11:00 AM Copyright © 2006 Taylor & Francis Group, LLC Trang 2204 Microengineering, MEMS, and Interfacing: A Practical Guide8.2.2 P LANAR W AVEGUIDES ... DK3182_C008.fm Page 206 Friday, January 13, 2006 11:00 AM Copyright © 2006 Taylor & Francis Group, LLC Trang 4208 Microengineering, MEMS, and Interfacing: A Practical Guidedimensions that are multiples ... Microengineering, MEMS, and Interfacing: A Practical GuideWith plastic packages, a similar attach-to-base/bond-wires/seal-with-lid pro-cess may be used After wire bonding, however, it is also possible...

Ngày tải lên: 10/08/2014, 05:20

... Microengineering, MEMS, and Interfacing: A Practical Guidethe polarity of the pulse places it back again This approach has been used to write slogans with atoms and may prove useful for data storage, but ... Adhesive tape applied to the sample and pulled away reveals a clean, atomically flat surface 10.4 NANOELECTROMECHANICAL SYSTEMS As suggested in the introduction, micro- and nanotechnologies are converging ... AM Trang 2224 Microengineering, MEMS, and Interfacing: A Practical Guide Phase-shift masks are usually produced by CAD systems equipped with appropriate software to analyze the mask design It...

Ngày tải lên: 10/08/2014, 05:20

... source, one with a 0-A current rating DK3182_C011.fm Page 243 Friday, January 13, 2006 11:01 AM Trang 2244 Microengineering, MEMS, and Interfacing: A Practical Guidecontrolled voltage and current ... I1+I2=0 V AB−V SOURCE =0 DK3182_C011.fm Page 246 Friday, January 13, 2006 11:01 AM Trang 5248 Microengineering, MEMS, and Interfacing: A Practical Guideconnections to allow certain (internal) parameters ... 10254 Microengineering, MEMS, and Interfacing: A Practical Guideminimize offsets, and still others have provision for an external potentiometer (variable resistor) to be attached so that the...

Ngày tải lên: 10/08/2014, 05:20

... this signal do not appear in the pass band Copyright © 2006 Taylor & Francis Group, LLC Trang 8274 Microengineering, MEMS, and Interfacing: A Practical GuideThey have the following characteristics: ... signals that are similar in shape to a sinusoidal wave will not have significant components at very high fre-quencies, whereas a rapidly changing signal such as a square wave will have significant ... differential measurement is preferable to an absolute measurement Copyright © 2006 Taylor & Francis Group, LLC Trang 2264 Microengineering, MEMS, and Interfacing: A Practical GuideThe basic single-op-amp...

Ngày tải lên: 10/08/2014, 05:20

... January 16, 2006 12:45 PM Copyright © 2006 Taylor & Francis Group, LLC Trang 2284 Microengineering, MEMS, and Interfacing: A Practical Guide the signal is high is referred to as the mark and ... how varying the mark–space ratio could be used to create an average signal level that varies in a sinusoidal manner The number of samples required to accurately reproduce a particular signal is ... resistors, and it is a lot easier to match ratios than absolute values when fabricating devices on ICs The R-2R ladder DAC is so called because the resistors are arranged in a ladder-like manner It...

Ngày tải lên: 10/08/2014, 05:20

... by Australia’s leading financial institutions, such as banks, credit unions and life assurance companies An RSA earns interest, and the management and administration fees to manage your money are ... publication Trang 10About the authorJim Prince is a fellow of CPA Australia and a tax specialist He is a former lecturer and tutor inincome tax law at LaTrobe University and teaches a number of wealth- ... test Loans and financial assistance to members Acquiring assets from related parties Business real property Trang 4Australian Taxation Office publicationsAustralian Taxation Office interpretative...

Ngày tải lên: 03/01/2020, 10:06

... Trang 2Power Generation Financial Modelling & Analysis: A Practical Guide Trang 4Power Generation Financial Modelling & Analysis: A Practical Guide David Whittaker E U R O ... capital allowance computations, the corporation tax liability and the corporation tax paid logic Trang 37Power Generation Financial Modelling & Analysis: A Practical Guide24 Annual cash flow ... in power plant economics or financial analysis Trang 23Power Generation Financial Modelling & Analysis: A Practical Guide10 Installed capacity Installed capacity represents the maximum power...

Ngày tải lên: 08/01/2020, 09:43

... The basic state-space averaged model 7.4.3 Discussion of the state-space averaging result 7.4.4 Example: State-space averaging of a nonideal buck-boost converter 7.5 Circuit averaging and averaged ... A2 .2 EE core data A2 .3 EC core data A2 .4 ETD core data A2 .5 PQ core data A2 .6 American wire gauge data Appendix Averaged switch modeling of a CCM SEPIC Index http://ece-www.colorado.edu/~pwrelect/book/contents/TOC.html ... resonant converters Publisher and vitals New York: Chapman and Hall, May 1997 Hardback ISBN 0-412-08541-0 TK7881.15.E75 1997 7"x10", 791 pages, 929 line illustrations Note: Chapman and Hall has...

Ngày tải lên: 13/12/2013, 01:15

... on available space in a particular machine assembly A scale layout drawing is often useful to arrive at an initial shape and size Weight is important depending on application For example, an aircraft ... Static load- Does not change in magnitude and direction and normally increases gradually to a steady value ii) Dynamic load- a) changes in magnitude- for e.g traffic of varying weight passing a bridge ... there are moving parts, friction and wear are inevitable High friction leads to increased loss of energy Wear of machine parts leads to loss of material and premature failure Cost and aesthetics are...

Ngày tải lên: 17/12/2013, 11:15

... developed at the contact P σbr = between a pillar and ground (figure- 2.1.2. 4a) is , at the contact A surface between a pin and a member with a circular hole (figure- 2.1.2.4b) is σ = P and at the faces ... Kharagpur A. 5: Consider a beam with a rectangular cross-section (figure-2.1.7.4) Consider now a longitudinal cut through the beam at a distance of y1 from the neutral axis isolating an area ABCD ... twist are the same for both the solid and hollow shafts, we may write from torsion formula τAl J Al = τSt JSt and τAl G Al = τSt G St where τ, J and G are shear stress, polar moment of inertia and...

Ngày tải lên: 17/12/2013, 11:15

... joints These joints are capable of handling relatively large angular misalignment and they are widely used in agricultural machinery, machine tools and automobiles .A typical universal joint is shown ... design and dimensions 5.1.2.2 Flexible coupling As discussed earlier these couplings can accommodate some misalignment and impact A large variety of flexible couplings are available commercially and ... shafts of standard lengths say 6-8m by couplings Coupling may be rigid or they may provide flexibility and compensate for misalignment They may also reduce shock loading and vibration A wide variety...

Ngày tải lên: 23/01/2014, 04:20