DSpace at VNU: Sensing microgripper with pid control systems

Sensing microgripper with pid control systems Phan Hữu Phú Trường Đại học Công nghệ Ngành: Kỹ thuật điện tử; Mã số: 60 52 70 Người hướng dẫn: TS.. Therefore, the development of micro-to

Sensing microgripper with pid control systems

Phan Hữu Phú

Trường Đại học Công nghệ Ngành: Kỹ thuật điện tử; Mã số: 60 52 70 Người hướng dẫn: TS Chử Đức Trình

Năm bảo vệ: 2012

Abstract: Recently, MEMS and NANO are considered very importance technologies in

21th century that play a key role for the development of modern electronic devices It was only in the early 90s of previous century that significant work in the field of micro-electro-mechanical systems (MEMS) began At present, there is still a lack of tools for manipulation of microstructures that are not directly accessible by the existing machines

or robots that handle macro objects Therefore, the development of micro-tools for handling and manipulating particles or small components (sized in the micrometer range) with the applications envisioned in microassembly, microrobotics, single cell manipulation and positioning, cell separation, minimally invasive and living cell surgery continues to be a great technological challenge The sensing microgripper is capable of providing large jaw displacement and output sensing voltage is presented in [4] This device is able to monitor the jaw displacement and the resulting applied force The device

is made on SOI silicon wafers with a fabrication process compatible with CMOS technology However, to commercialization this device, some additions research and development need to be continued such as reducing the operation temperature for living cell applications, improvement of accuracy in modeling, and its control system This thesis will be focused in designing, and simulation a control system for the sensing microgripper based on a standard Bi-CMOS process The target is built up a fully close-loop control manipulation system which is integrated on chip with the sensing microgripper

Keywords: Hệ thống vi cơ điện; Hệ thống điều khiển; Microgrippe cảm biến; Kỹ thuật

điện tử

Content

TABLE OF CONTENTS

DECLARATION 1

ACKNOWLEDGEMENTS 4

ABSTRACT 5

LIST OF ABBREVIATIONS 6

CHAPTER 1 INTRODUCTION 7

1.1MANIPULATION IN MICRO-WORLD 7

1.2MICRO-GRIPER FOR MICRO-MANIPULATION 7

1.2.1 Electrostatic microgripper 7

1.2.2 Piezoelectric microgripper 8

1.2.3 Electrothermal microgripper 8

1.2.4 Polymeric electrothermal microgripper 10

1.3MICRO-MANIPULATION WITH A FEEDBACK SYSTEM 11

1.3.1 Force sensor 11

1.3.2 Sensing microgripper 14

CHAPTER 2 SENSING MICROGRIPPER 17

2.1INTRODUCTION 17

2.2FORCE-SENSING CANTILEVER 17

2.3SILICON-POLYMER ELECTROTHERMAL MICROGRIPPER 18

2.4SENSING MICROGRIPPER 20

2.5THE SENSING MICROGRIPPER CHARACTERISTICS 22

2.5.1 Electrothermal actuator characteristics 22

2.5.2 Sensing cantilever beam characteristics 25

2.5.3 Response frequency of the sensing microgripper 27

CHAPTER 3 BUILDING PID CONTROL FUNCTION 29

3.1FEEDBACK LOOP CONTROL 29

3.2BUILDING A PID TRANSFER FUNCTION FOR THE SENSING MICROGRIPPER SYSTEM 30

3.2.1 Transfer function of sensing microgripper 30

3.2.2 Transfer function of driver circuit 30

3.2.3 Open-loop control 31

3.2.4 Proportional control 32

3.2.5 Proportional – Integral control 32

3.2.6 Proportional – Derivative control 33

3.2.7 Proportional – Derivative – Integral control 34

CHAPTER 4 ELECTRICAL DESIGN 35

4.1INTRODUCTION 35

4.2PROCESS SELECTION AND SIMULATION 35

4.2.1 Process selection 35

4.2.2 Device modeling 36

4.2.3 Silicon-level simulation 36

4.2.4 Analog-only simulation 38

4.2.5 Mixed Analog/Digital simulation 38

4.3SYSTEM BLOCK DIAGRAM 39

4.4CELLS DESIGN 40

4.4.1 Voltage reference generator 40

4.4.2 Internal regulator 45

4.4.2.1 The regulator: 45

4.4.2.2 The high temperature detector: 46

4.4.2.3 The UVLO 47

4.4.2.4 Bias current generator 47

4.4.3 Digital to Analog converter (DAC) 52

4.4.4 Buffer 56

4.4.5 PID Controller 56

4.4.6 Other cells 60

4.5FULLY SCHEMATIC OF SYSTEM AND SIMULATION RESULTS 62

4.5.1 Schematic 62

4.5.2 Simulation results 62

CHAPTER 5 PHYSICAL DESIGN 65

5.1INTRODUCTION OF LAYOUT 65

5.1.1 Matching concepts 65

5.1.2 MOS transistor layout 66

5.1.3 Resistor layout 68

5.1.4 Capacitor layout 69

5.1.5 Layout rules 70

5.2SYSTEM FLOOR PLAN 71

5.3SYSTEM LAYOUT 72

5.3.1 Sensing microgripper 72

5.3.2 Electrical circuits 72

CHAPTER 6 CONCLUSION & FUTURE WORKS 74

6.1CONCLUSION 74

6.2FUTURE WORKS 74

6.2.1 Finishing the system layout 74

6.2.2 Process establishment 74

6.2.3 Layout verification 75

6.2.4 Sample fabrication 75

6.2.5 Characterization 75

BIBLIOGRAPHY 76

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