Volume 05 - Surface Engineering Part 11 pdf

on Solid Surfaces Thin Film Processes, Handbook of Thin Film Technology, Deposition Technologies for Thin Films and Coatings, Thin Film Technology, Handbook of Ion Beam Processes, Handbo

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fixturing tooling fixturing tooling

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Society of Vacuum Coaters 33rd Ann Tech Conf Proc.,

Coatings on Glass, Procedures in Experimental Physics,

Trans 9th AVS Symposium,

Society of Vacuum Coaters 33rd Ann Tech Conf.,

Society of Vacuum Coaters 34th Ann Tech Conf.,

J Vac Sci Technol A,

Handbook of Thin Film Technology,

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•

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Condensation and Evaporation of Solids,

Thin Solid Films,

Society of Vacuum Coaters 34th Ann Tech Conf Proc.,

Trans 7th Ann AVS Symp.,

Thin Solid Films,

J Vac Sci Technol.,

MRS Bull.,

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Thin Film Processes,

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Table 1 Elemental sputtering yields for 500 eV ions

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He Ne Ar Kr Xe

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energetic neutrals

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Physics of Thin Films, Advances in Electronics and Electron Physics,

Proc 9th Int Vacuum Congress and 5th Int Conf on Solid Surfaces

Thin Film Processes, Handbook of Thin Film Technology,

Deposition Technologies for Thin Films and Coatings,

Thin Film Technology,

Handbook of Ion Beam Processes, Handbook of Plasma Processing Technology,

J Vac Sci Technol., Thin Film Processes,

working gas

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poisoning of the target

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x

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Thin Solid Films,

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Surf Coat Technol., Metalloberfläche,

Surf Coat Technol.,

Thin Solid Films,

Proc 29th Ann Tech Conf.

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•

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Thin Film Processes, Handbook of Thin Film Technology,

Deposition Technologies for Thin Films and Coatings,

Thin Film Technology,

Handbook of Ion Beam Processes, Handbook of Plasma Processing Technology, Deposition Technologies for Thin Films and Coatings,

Glow Discharge Process,

Thin Film Processes,

Thin Solid Films,

Thin Solid Films, Physical Vapor Deposition,

Thin Solid Films,

Handbook of Plasma Processing Technology,

Handbook of Plasma Processing, Glow Discharge Processes,

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Carbon, Thin Solid Films,

Vacuum,

J Vac Sci Technol A, Handbook of Plasma Processing Technology, Thin Film Processes,

Beam Modification of Materials, Ion Beam Assisted Film Growth,

Vacuum,

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Vacuum,

Vacuum, Surf Coat Technol., Surf Coat Technol.,

Appl Phys Lett.,

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Thin Solid Films,

Thin Solid Films, Thin Solid Films,

Int Congress and Exposition

Thin Solid Films, Thin Solid Films,

Surf Eng.,

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Surf Eng.,

Werkstoffe und Korrosion (Materials and Corrosion),

Vacuum,

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plasma-based ion plating

based ion plating

vacuum-reactive ion plating

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ion plating sputter ion plating reactive ion plating chemical ion plating alternating ion plating arc ion plating

J Vac Sci Technol., Handbook of Plasma Processing Technology: Fundamentals, Etching, Deposition and Surface Interactions,

Deposition Processes for Films and Coatings, Ion Plating Technology Developments and Applications,

Vacuum,

Phys Rev., Electrochem Technol.,

J Electrochem Soc.,

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•

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Ion Bombardment Modification of Surfaces Fundamentals and Applications,

Deposition Technologies for Films and Coatings,

Plasma Etching: An Introduction,

J Vac Sci Technol B,

Adhesion Measurement of Thin Films, Thick Films, and Bulk Coatings,

Thin Solid Films,

Surf Sci.,

Surf Eng.,

Ind Heat.,

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Thin Solid Films,

J Vac Sci Technol A, Trans Soc Auto Eng.,

Appl Surf Sci.,

Handbook of Plasma Processing Technology: Fundamentals, Etching, Deposition and Surface Interactions,

J Vac Sci Technol B,

Solid State Technol.,

J Appl Phys.,

Thin Solid Films, Microelectron Manuf Test., Thin Solid Films,

J Appl Phys.,

Ion Plating and Implantation: Applications to Materials,

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Thin Solid Films,

J Vac Sci Technol., Adhesion in Solids,

Appl Surf Sci.,

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plasma arc.

J

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Vac Sci Technol.,

Thin Solid Films,

J Appl Phys.,

Phys Rev.,

Vacuum, Vacuum,

Thin Solid Films,

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J Vac Sci Technol., Solid State Technol.,

Met Finish.,

IEEE Trans Plas Sci.,

8th Conf Tube Technology,

MRS Bull.,

J Mater Res.,

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J Vac Sci Technol A, Thin Solid Films,

Nucl Instrum Method Phys Res B,

Plat Surf Finish.,

J Electrochem Technol.,

Thin Solid Films,

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Thin Solid Films,

Coatings on Glass,

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J Vac Sci Technol A, Gun World,

J Nucl Mater.,

Ion Plating and Implantation,

Coatings on Glass,

Thin Solid Films,

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E R E

R

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E

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S.

•

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Int Mater Rev.,

Mater Sci Rep., Crit Rev in Surf Chem.,

J Appl Phys., Mater Sci Eng A,

Mater Sci Eng A, Nucl Instrum Methods Phys Res B,

J Mater Sci.,

Progress in Optics,

Physics of Thin Films,

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μ o o

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R, R

Table 1 Three modes of film formation for ion-beam-assisted deposition (IBAD)

Mode 1: IBAD

Mode 2: IBAD (Compound synthesis)

Mode 3: Reactive IBAD

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Int Mater Rev.,

J Appl Phys., Mater Sci Eng A,

Nucl Instrum Methods Phys Res B,

Appl Phys Lett.,

J Appl Phys., Phys Rev B, Proc SPIE,

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Thin Solid Films, Proc SPIE,

Proc SPIE,

Appl Opt., Appl Opt.,

Appl Opt.,

Appl Surf Sci.,

J Appl Phys., Appl Opt.,

Proc SPIE,

Thin Solid Films, Proc SPIE, Appl Opt., Appl Opt.,

Proc SPIE,

Appl Opt.,

Appl Opt., Thin Solid Films,

Thin Solid Films, Appl Opt.,

Nucl Instrum Methods Phys Rev B,

Nucl Instrum Methods Phys Res B, Nucl Instrum Methods Phys Res.,

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Proc Mater Res Soc Symp.,

Nucl Instrum Methods Phys Res B, Proc Mater Res Soc Symp.,

Jpn J Appl Phys.,

Nucl Instrum Meth Phys Res B,

J Mater Res., Nucl Instrum Methods Phys Res B,

Surf Coat Technol., Nucl Instrum Methods Phys Res B,

Mater Sci Eng A,

J Appl Phys., Nucl Instrum Methods Phys Res B,

Nucl Instrum Methods Phys Res B, Nucl Instrum Methods Phys Res B,

J Appl Phys.,

Proc Mater Res Soc Symp., Nucl Instrum Methods Phys Res B,

Mater Sci Eng A,

Surf Coat Technol., Appl Phys Lett.,

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Thin Solid Films,

Appl Opt.,

MRS Bull.,

J Appl Phys., Jpn J Appl Phys., Surf Coat Technol., Nucl Instrum Methods Phys Res B,

Proc Mater Res Soc Symp., Surf Coat Technol.,

Vacuum,

Nucl Instrum Methods Phys Rev B, Nucl Instrum Methods Phys Res B,

Nucl Instrum Methods Phys Res B, Proc Mater Res Soc Symp.,

Appl Opt.,

Phys Rev B, Thin Solid Films,

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T

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Int Mater Rev., Mater Sci Rep., Crit Rev in Surf Chem.,

Mater Sci Eng A,

J Appl Phys., Nucl Instrum Methods Phys Res B,

Vacuum, Nucl Instrum Methods Phys Rev B, Proc Mater Res Soc Symp.,

Phys Rev B,

Proc Mater Res Soc Symp., Nucl Instrum Methods Phys Res B,

Table 4 Advantages and limitations of ion-beam-assisted deposition

Advantages, achievable benefits

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o

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Int Mater Rev.,

Mater Sci Eng A,

Mater Sci Eng A, Nucl Instrum Methods Phys Res B,

J Appl Phys.,

Surf Coat Technol., Proc Mater Res Soc Symp.,

Appl Opt.,

Mater Sci Eng.,

J Mater Res.,

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Handbook of Plasma Processing Technology Fundamentals, Etching, Deposition, and Surface Interactions,

IEEE Trans Plasma Sci.,

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Bulg J Phys.

•

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distributed discharge arc

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μ

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Handbook of Plasma Processing Technology Fundamentals, Etching, Deposition, and Surface Interactions,

Plasma Phys and Contrl Fus.,

Thin Solid Films, Sov Phys.-Tech Phys.,

High Temp.,

Sov Tech Phys Lett.,

Instrum Exp Tech., Instrum Exp Tech.,

Vak.-Tech.,

Instrum Exp Tech.,

Vacuum,

Thin Solid Films,

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J Vac Soc Tech.,

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Ion Implantation, Surface Alloying by Ion, Electron, and Laser Beams, Proceedings of the Fourth International Conference on Ion Beam Modification of Materials,

Ion Implantation and Ion Beam Processing of Materials,

Surface Alloying by Ion, Electron, and Laser Beams,

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R

∆R

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∆R N N

A p

p

N atoms cm

R cm π

=

∆

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S S S

S S

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S S

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μ μ

Ion Implantation,

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Nucl Instrum and Methods in Phys Res.,

Rev Sci Instruments, Technology Today,

J Applied Phys.,

J Vac Sci and Technol B,

Surface and Coatings Technology,

Table 2

Surface properties

modified

Substrates studied

Ions species used

Comments, references

≥

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≥

Proceedings of the Fourth International Conference on Ion Beam Modification of Materials,

Ion Implantation and Ion Beam Processing of Materials,

Surface Alloying by Ion, Electron, and Laser Beams,

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Annual Review of Material Science, Ion Implantation and Ion Beam Processing of Materials,

J Amer Ceram Soc., Surface Alloying by Ion, Electron, and Laser Beams,

Nucl Instr Methods,

Mater Sci and Eng A,

Nucl Instrum and Methods in Phys Res., Journal of Physics E: Scientific Instruments,

Rev Sci Instruments,

Surface and Coatings Technology,

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Heat Treating, ASM Handbook;

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General Electric Rev.,

High Temp.-High Press.,

Mech Eng., Trans Amer Electrochem Soc.,

Metal Treatment and Drop Forging, Anti-Corros Methods Mater.,

Thin Solid Films, Mater Sci Tech.,

Arch Eisenhüttenwes.,

Thin Solid Films, Oxid Met., Electrodeposition and Surface Treatment, Metallurgical and Ceramic Coatings,

High Temperature Protective Coatings,

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X X

i

D i P i P i i∆ i

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a a

∆P i

X X

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Metallurgical and Ceramic Coatings,

J Electrochem Soc., Thin Solid Films,

Thin Solid Films, Chemical Vapor Deposition,

High Temperature Coatings,

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Trans Met Soc AIME,

J Iron Steel Inst., Surface Engineering,

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Thin Solid Films,

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Oxid Met., Electrodeposition and Surface Treatment, Metallurgical and Ceramic Coatings,

Oxid Met., Trans Met Soc AIME, Met Trans A,

Electrochem Tech.,

Trans ASME,

Coatings for High Temperature Applications,

et al.,

J Met.,

Met Trans A,

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Table 2 Examples of pack mixes/sources and processing parameters for various coatings on nickel and cobalt superalloys

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μ

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Trans ASME, Mater Eval.,

et al., Proceedings of Steam and Combustion Turbine Blading Workshop,

Mater Sci Eng., Mater Sci Tech.,

Superalloys 1988, et al.,

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Mater Sci Tech.,

Oxid Met., Mater Sci Tech.,

NATO Advanced Workshop on Coatings for Heat Engines,

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Table 3 Partial list of commercial applications of pack cementation aluminizing

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X X X X

•

X

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•

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MRS Bull.,

Mat Res Soc Proc., Laser Ablation: Mechanisms and Applications,

Z Phys B, Appl Optics, Effects of High Power Radiation,

Thin Solid Films,

J Solid State Comm.,

J Chem Phys.,

J Vac Sci Tech.,

J Vac Soc Technol.,

Appl Phys Lett., Pulsed Laser Deposition of Thin Films,

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v v mv kT

Effects of High Power Radiation,

Processing of Advanced Materials,

CRC Crit Rev Solid State Mat Sci.,

J Appl Phys.,

Appl Phys Lett.,

Proc SPIE,

J Appl Phys., The Physics of Fluids,

Laser Ablation: Mechanisms and Applications,

Physica C,

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Phys Rev Lett.,

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μ μ

Table 2 Excimer laser wavelengths

o

μ

μ o

≤

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• Laser wavelength: μ

• Laser spot size:

• Laser pulse energy:

• Laser pulse width:

• Laser fluence:

• Laser repetition rate:

• Substrate temperature:

• Ambient pressure:

J Vac Sci Tech.,

Appl Phys Lett.,

J Appl Phys.,

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θ θ

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Appl Surf Sci.,

SPIE Proceedings, Appl Phys Lett.,

Nuclear Inst and Methods in Physics Research, Pulsed Laser Deposition of Thin Films,

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o μ

o

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Photochemical Processing of Electronic Materials,

Phys Rev Lett.,

MRS Bull., High T c Superconducting Films,

Appl Phys Lett.,

Appl Phys Lett., Appl Phys Lett.,

Tiêu đề	Volume 05 - Surface Engineering Part 11 pdf
Trường học	Surface Engineering Research Institute, Vietnam Academy of Science and Technology http://www.vasts.vn
Chuyên ngành	Surface Engineering
Thể loại	Document

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