Iec 61019 2 2005

INTERNATIONAL STANDARD IEC 61019 2 Second edition 2005 05 Surface acoustic wave (SAW) resonators – Part 2 Guide to the use Reference number IEC 61019 2 2005(E) L IC E N SE D T O M E C O N L im ited R[.]

Basic structure

SAW resonators are composed of interdigital transducers (IDT) and grating reflectors situated on a piezoelectric substrate Typically, these reflectors are crafted from thin metal films like aluminum (Al) or gold (Au), although they can also be made with periodic grooves The die is securely bonded with an adhesive agent within a sealed enclosure.

IDT is connected to terminals via bonding wires, featuring two configurations of SAW resonators: the one-port and the two-port The one-port SAW resonator consists of a single IDT positioned between two reflectors, while the two-port variant includes two IDTs situated between the same reflectors The effective resonator cavity length, denoted as $ l_{\text{eff}} $, is illustrated in the accompanying figures.

Figure 1 – One-port SAW resonator configuration l eff

Figure 2 – Two-port SAW resonator configuration

Principle of operation

The resonance phenomenon for SAW resonators is achieved by confining the SAW vibration energy within grating reflectors The SAW, excited by an alternating electrical field between

IDT electrode fingers, propagates outside the IDT to be reflected by grating reflectors

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Grating reflectors transmit perturbations to surface acoustic waves (SAW) due to variations in electrical or mechanical impedance When SAW encounters these grating reflectors, the incident wave is progressively transformed into a reflected wave Despite the minimal perturbation from each reflective element, the periodic arrangement of numerous elements ensures that the SAW is reflected in phase, thereby enhancing coherent reflection.

Grating configurations can create an effective reflecting boundary, resulting in a standing wave between the reflectors and achieving high-quality resonance The displacement distribution of this standing wave in a one-port SAW resonator indicates that SAW energy is maximized at the center of the IDT and diminishes towards the edges of the grating reflectors The resonance frequency, denoted as $ f_r $, is approximately given by the formula $ f_r \approx \frac{v_s}{2d} = \frac{v_s}{\lambda_0} $, where $ v_s $ represents the SAW propagation velocity, $ d $ is the distance between electrode centers, and $ \lambda_0 $ is the SAW wavelength at the stop band center frequency.

Figure 3 – Standing wave pattern and SAW energy distribution

Reflector characteristics

The reflector for SAW resonators features a grating reflector made up of a periodically arranged array of reflective elements As illustrated in Figure 4, the potential array elements include metal strips or dielectric ridges, grooves, and ion-implanted or metal-diffused strips.

An aluminum strip on ST-cut quartz, with a thickness of 1% of the wavelength (\$h/\lambda_0\$) and a width equal to half the spatial period (\$w = \frac{d}{2} = \frac{\lambda_0}{4}\$), exhibits a small reflection coefficient (\$\epsilon\$) of approximately 0.5% Similarly, a groove with a 1% depth has an almost identical reflection coefficient This periodic perturbation effectively reflects surface acoustic wave (SAW) energy when its wavelength is twice the periodicity.

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4a – Metal strips or dielectric ridges

4c – Ion-implanted or metal diffused strips

A grating reflector with a limited number of array elements exhibits a frequency range known as the stop band, characterized by nearly total reflection The fractional stop bandwidth relative to the center frequency is given by the formula \$\frac{2\epsilon}{\pi}\$, where \$\epsilon\$ represents the reflection coefficient of a single element Figure 5 illustrates the frequency dependence of the total reflectivity \$|\Gamma|\$ for this type of grating reflector.

N R of array elements Theoretically, the reflectivity maximum value is derived as:

The maximum reflectivity, denoted as |Γ| max, is given by the equation \$|Γ|_{max} = \tanh(N R \times ε\$ at the center frequency \$f_0\$ of the stop band Increased reflectivity enhances the Q value of the SAW resonator by reducing the leakage of stored SAW energy within the cavity formed by two grating reflectors.

Ref lec tion c oef fic ien t | Γ |

Figure 5 – Reflectivity response for grating reflection

To achieve higher reflectivity in SAW resonators, it is essential to increase the product of the number of reflector elements (N R) and the reflectivity coefficient (ε) The simplest method to enhance reflectivity is by increasing the number of reflector elements However, this approach necessitates a larger SAW chip size, leading to more expensive resonators Typically, a value of N R × ε = 4 is sufficient for practical applications in SAW resonators.

For obtaining greater reflectivity, increasing the reflection from one element is also effective

To achieve optimal performance, it is essential to use thicker strips or deeper grooves, as the parameter ε is directly proportional to the thickness or the depth $ h/\lambda_0 $ Thicker strips or deeper grooves allow for a reduced number of elements $ N_R $ while maintaining the same reflection coefficient, resulting in a wider stop bandwidth However, increasing $ h/\lambda_0 $ can lead to disadvantages, such as heightened mode conversion loss from surface acoustic waves (SAW) to bulk waves, potentially degrading the quality factor Additionally, the deviation of the stopband center frequency from $ v_s/(2d) $ increases, since the center frequency is influenced by the square of $ h/\lambda_0 $, which may complicate mass production.

Utilizing the reflection at the edge of a substrate material that supports shear waves can effectively replace a grating reflector, leading to a significant reduction in size relative to the array element dimensions.

SAW resonator characteristics

A one-port SAW resonator has the transmission characteristics shown in Figure 6

Figure 6 – Typical frequency characteristics for a one-port SAW resonator, inserted into a transmission line in series

The equivalent circuit in Figure 7 represents this one-port SAW resonator resonance

Comparing SAW resonators made from different piezoelectric materials, the figure of merit

The equation $ M = \frac{Q}{r} $ derived from the equivalent circuit is applicable in comparing resonators For instance, surface acoustic wave (SAW) resonators on quartz substrates exhibit a high quality factor (Q) and a large capacitance ratio (r), whereas X-cut LiTaO$_3$ resonators display smaller values for both Despite these differences, both types of resonators possess similar figure of merit values, indicating that evaluating only Q or the capacitance ratio r is inadequate for comprehensive comparison.

The equivalent circuit in Figure 7 can be replaced by a reactance with a series resistance:

R e (f) + jX e (f), where X e and R e are an equivalent series reactance and an equivalent series resistance, respectively The frequency dependencies for these values are shown in

Figure 8, where the value X e /R e reaches the maximum at the arithmetic mean of resonance and anti-resonance frequencies of zero susceptance

= π is the motional (series) resonance frequency;

Q = 2 π f s × L 1 /R 1 is the quality factor; r = C 0 /C 1 is the capacitance ratio;

M = Q/r is the figure of merit;

L 1 , C 1 , R 1 are the motional inductance, motional capacitance and motional resistance respectively;

Figure 7 – Equivalent circuit for a one-port resonator

Resonance frequency of zero susceptance (f r )

Anti-resonance frequency of zero susceptance (f a )

Figure 8 – Frequency response for series equivalent resistance ( R e ), reactance ( X e ) and X e / R e

The maximum value can be derived from the equivalent circuit as:

In order to achieve oscillation more easily, resonators should show high Q reactance

Consequently, the figure of merit is adequate to compare SAW resonators

Resonator impedance is inversely related to the design of the aperture A resonator with an excessively narrow aperture can lead to increased stray capacitance, which raises the impedance (r) and reduces the quality factor (Q) due to diffraction loss Conversely, a resonator with an overly wide aperture exhibits a lower Q, primarily due to electrode resistance Additionally, two-port SAW resonators are also affected by these design considerations.

Two-port resonator transmission characteristics are shown in Figure 9

Figure 9 – Insertion attenuation and spurious response characteristics for a two-port resonator

The equivalent circuit of a two-port SAW resonator near its center frequency includes a motional arm with series components: motional inductance (L₁), capacitance (C₁), and resistance (R₁) Additionally, it features two parallel capacitances (C_IN and C_OUT) at the input and output ports, along with an ideal transformer The turns ratio φ of the transformer is determined by the input and output transducer structures, where φ equals one for identical structures, indicating a 0° phase shift, and negative one for a 180° phase shift In cases where the input and output impedances differ, the |φ| value deviates from unity.

L 1 motional inductance C IN input capacitance

C 1 motional capacitance C OUT output capacitance

Figure 10 – Equivalent circuit for a two-port resonator

Two-port resonators lack a clear figure of merit compared to one-port resonators Devices that oscillate easily exhibit low loss within the specific circuit and require a phase transition of either 0° or 180° To achieve low loss, it is crucial to maintain a small motional resistance $ R_1 $ Generally, a resonator with lower impedance, characterized by larger capacitances $ C_{IN} $ and $ C_{OUT} $, tends to have reduced loss.

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Equivalent circuit parameters for a one-port SAW resonator can be represented as follows, when SAW reflection at IDT fingers is neglected:

= is the IDT radiation resistance at f 0 ; f 0 = v s /(2d);

In this article, we discuss key parameters related to surface acoustic wave (SAW) devices, including the IDT finger pair number (N), aperture width (w), and the SAW coupling coefficient (k s 2) We also examine the relative permittivity of the piezoelectric substrate (εr) and the permittivity of vacuum (ε 0) The reflection coefficient of a reflector (Γ) and the SAW wavelength at the center frequency (λ 0) are critical for device performance Additionally, we define the effective resonator cavity length (l eff), which is approximately equal to the sum of the separation of grating reflectors (S) and half the SAW wavelength divided by the relative permittivity (l eff ≈ S + λ 0 /(2ε)).

For two-port SAW resonators, C 0 shall be replaced by C IN or C OUT respectively Other equations are the same as the above equations.

Spurious modes

SAW resonators have many kinds of spurious modes One is higher-order SAW resonance modes, called longitudinal and transverse modes Other types of SAW modes, such as leaky

SAW, SSBW, Love waves, may be excited by the IDT Another mode is bulk wave modes

Figures 6 and 9 show the typical spurious characteristics for one-port and two-port resonators, respectively These spurious modes can be reduced by applying several techniques to the resonators

In oscillator circuits, spurious modes typically do not pose significant issues However, if spurious responses occur close to the main mode or exhibit considerable amplitude, they may lead to oscillation problems at those specific spurious frequencies.

Spurious responses can lead to unusual frequency-temperature, resistance-temperature, and frequency pulling characteristics, which may adversely affect voltage-controlled oscillator (VCO) applications Even minor perturbations of this nature can have significant negative impacts While it is challenging to eliminate these spurious responses from resonators, they typically do not cause major issues since their spurious resonance resistance is generally higher than that of the main mode Manufacturers implement design strategies in their standard products to minimize these effects, especially when paired with effective oscillator design.

In applications with spurious responses, it is crucial to recognize the potential for the oscillator to initiate at these spurious frequencies Within the frequency range surrounding the main response, specific ratios can be defined: for a one-port resonator, the ratio of resistance motional resonance main to resistance motional resonance spurious, and for a two-port resonator, the ratio of level response main to level response spurious.

For two-port resonators, only spurious resonances which fulfil the phase condition of the oscillator feedback loop have to be considered.

Substrate materials and their characteristics

Various kinds of piezoelectric substrates are available for use in SAW resonators

Piezoelectric substrates for SAW resonators are selected, in consideration of the following items:

3) temperature coefficient of frequency (TCF);

The first five items are constants primarily related to materials, while items six and seven pertain to conditions influenced by both the materials used and the techniques employed in substrate fabrication Various types of substrates have been developed and successfully implemented in practical applications.

An optimal design aims for a high coupling coefficient and a zero temperature coefficient, but achieving this is currently unattainable, necessitating a design trade-off Selecting an appropriate substrate based on specific requirements is essential The following sections outline the relationships between material constants and resonator characteristics, starting with propagation velocity.

The propagation velocity $ v_s $ (m/s) significantly influences the frequency range of a system The resonance frequency $ f_r $ (MHz) can be approximated by the formula $ f_r = \frac{v_s}{2d} $, where $ d $ (àm) represents the spatial period of the grating For a given resonance frequency, lower velocities necessitate a shorter finger period, leading to a reduced chip size Conversely, higher velocities are preferable for high-frequency resonators to enhance performance.

IDT fabrication easier Propagation velocity for a practical substrate is usually in the

The SAW coupling coefficient $ k_s^2 $ represents the transformation ratio between electric energy and mechanical (SAW) energy, playing a crucial role in determining the capacitance ratio $ r $ A higher coupling coefficient in the substrate facilitates the design of a low capacitance ratio SAW resonator The minimum achievable capacitance ratio can be approximated by the formula: \[r_{\text{min}} \approx \frac{\pi^2}{8k_s^2}\]

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The frequency-temperature characteristics of piezoelectric materials are primarily influenced by the type of material and the orientation of the crystals For instance, rotated Y-cut quartz and Li$_2$B$_4$O$_7$ exhibit parabolic frequency-temperature behavior, while other piezoelectric materials tend to display nearly linear characteristics This is illustrated in Figure 11, which presents the frequency-temperature characteristics for various common substrate materials.

Figure 11 – Frequency-temperature characteristics for various common materials and their angles of cut

Typically the frequency-temperature dependence is: f

∆f is the fractional frequency change;

T is the operating temperature; a is the first order temperature coefficient; b is the second order temperature coefficient

Typical temperature coefficient values are listed in Table 1 d) Relative permittivity

The piezoelectric material permittivity is a second-order symmetric tensor The static capacitance for the IDT, C 0 , directly depends on the substrate permittivity

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The quality factor (Q) of a SAW resonator is influenced by several types of losses, including material propagation loss due to viscous damping and air loading, surface propagation loss from imperfect surface finishes, bulk mode conversion loss, diffraction, and leakage losses from the sides of reflectors Additionally, ohmic and frictional losses in the electrodes also contribute to the overall Q value.

The material propagation loss determines the maximum Q limit, which is called material quality factor Q m f) Typical single-crystal materials

The properties of single-crystal substrates are influenced by the cutting angle and the direction of surface acoustic wave (SAW) propagation due to crystal anisotropy These single crystals offer significant benefits, including enhanced reproducibility, reliability, and reduced propagation loss.

However, it is still difficult to obtain a material which satisfies both large coupling coefficient and small temperature coefficient, simultaneously

Typical crystals and their angles of cut recommended for SAW resonators are listed in

Table 1 with their material constants

Table 1 – Properties of single-crystal substrate materials

Temperature coefficient Material Angle of cut

Available characteristics

The upper-limit frequency of SAW resonators is influenced by the fine pattern fabrication pitch, denoted as \$d\$ (in micrometers), with the frequency calculated as \$\frac{v_s}{2d}\$ (in MHz), where \$v_s\$ represents the SAW velocity (in m/s) Conversely, the lower-limit frequency is constrained by the size of the chip, which is limited by the available substrate wafer size and package dimensions Additionally, the cost of the resonator further restricts the permissible chip size Typically, SAW resonators operate within a frequency range of approximately [insert frequency range].

60 MHz to several GHz However, this limitation is never strict b) Quality factor

The maximum achievable quality factor for an ideally designed and processed surface acoustic wave (SAW) resonator is limited to $ Q_m $, which is approximately given by the formula $ Q_m = \frac{10^7}{f} $ in megahertz for typical substrate materials While SAW resonators can reach this quality factor at various frequencies, mass-produced SAW resonators made from ST-cut quartz generally demonstrate a quality factor of around $ Q = 15,000 $.

～ 20 000 at 100 MHz and Q = 10 000 at 600 MHz

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The temperature-frequency characteristics of resonance frequency in SAW resonators are significantly influenced by the substrate material Additionally, mechanical stress from factors like adhesive agents, interdigitated transducers (IDTs), and grating reflectors has a minor impact on the temperature dependency of the substrate.

The temperature-frequency characteristics of quartz and Li$_2$B$_4$O$_7$ resonators exhibit a parabolic dependency, with the peak of the curve known as the turn-over temperature This temperature can be adjusted by selecting the appropriate cut angle of the substrate, typically ranging from -20 °C to 75 °C, and is maintained within ±10 °C of a specified value.

SAW resonators with other materials provide a linear temperature-frequency relation

The temperature coefficient is also affected by the adhesive agent, IDT and grating reflectors, but is negligible compared with the material itself d) Long-term stability

Characteristic changes caused by ageing or long-term stability for SAW resonators are shown in resonance frequency changes and in quality factor degradation These changes are influenced by

– contamination on the resonator chip surface;

– mechanical stress, for example by differences in thermal expansion between the resonator substrate and the package;

The causes of issues in SAW resonator devices often originate from the device itself, particularly during the manufacturing process Common examples include the bare-chip manufacturing, chip-bonding with adhesive agents, and package sealing processes.

In the third scenario, characteristic changes arise under over-excited conditions, influenced by the design of the oscillator circuit High drive levels can damage the electrodes in the SAW resonator, reducing its lifespan As detailed in section 5.5 e), maintaining careful control over the drive level can ensure long-term stability of several parts per million per year or better.

Excessive mechanical stress can lead to electrode deterioration, resulting in voids and hillocks, which in turn cause shifts in resonance frequency and a decline in quality factor To ensure the longevity of a resonator in various applications, it is essential to maintain the drive level below several milliwatts.

To enhance the high-power withstanding durability of aluminium electrodes, a small amount of copper or titanium is added Additionally, epitaxially-grown aluminium electrodes on quartz are utilized to effectively manage the grain boundary in deposited aluminium thin films The effectiveness of these methods is influenced by factors such as frequency, ambient temperature, electrode composition, and device design, which also play a crucial role in the short-term stability of SAW oscillators.

Short-term stability of an oscillator refers to its spectrum purity, which is characterized by metrics such as single side-band (SSB) noise, residual FM noise, and the carrier to noise ratio (C/N) of the oscillation signal.

The performance of SAW resonators is influenced by their quality factor and the power level managed within the oscillation loop Typically, SAW oscillators offer superior short-term stability compared to LC oscillators and dielectric resonator oscillators.

Table 2 displays the typical properties of one-port SAW resonators across various materials, while the quality factor for two-port resonators is nearly identical to that of one-port resonators.

Table 2 – Typical properties of available one-port SAW resonators up to about 600 MHz

Substrate materials ST-cut quartz X-112° Y

Oscillator circuits and oscillation condition

Oscillators using SAW resonators provide stable oscillation in VHF and UHF frequency ranges without frequency multiplexing, and have good spectrum purity (i.e short-term stability)

One-port SAW resonators are very similar to crystal resonators, from the electrical viewpoint, in spite of differences in mechanical vibration modes and frequency ranges used

Consequently, oscillators are constructed with the same type of crystal oscillator circuits

On the other hand, two-port SAW resonators are electrically treated as narrow bandwidth filters Oscillators are constructed with feedback amplifiers

Figure 12a illustrates a standard one-port SAW resonator oscillator operating in the 100 MHz frequency range This can be simplified to the representation in Figure 12b, focusing solely on the r.f signal The oscillation takes place within the frequency range where the resonator exhibits inductive characteristics.

To analyze the oscillation condition, the oscillator circuit is represented by an equivalent circuit that includes both a resonator element and an active element, as illustrated in the accompanying figure.

The resonator on the left can be transformed into a lumped element equivalent circuit, consisting of a series connection of a reactance \$X_e(f)\$ and a resistance \$R_e(f)\$ Additionally, the active element side can be substituted with a negative resistance \$R_L\$ along with a load capacitive reactance.

Oscillation occurs at the frequency f OSC where the following equations are satisfied:

IEC 708/05 IEC 709/05 b) – RF circuit of the oscillator c) – Equivalent circuit

Figure 12 – 100 MHz one-port SAW resonator oscillator

The oscillation frequency can be approximately determined by the following equation:

OSC r C C f C f where f r is the resonance frequency; r is the capacitance ratio (C 0 /C 1 ) of the resonator;

This means that the oscillation frequency can be changed slightly by varying the load reactance

A typical two-port SAW resonator oscillator operating in the 600 MHz frequency range is illustrated in Figure 13a This configuration can be simplified, as depicted in Figure 13b, where an active element functions as a feedback amplifier The design of the feedback amplifier must meet specific conditions to ensure optimal performance.

IA ≤ G E (dB) φ + φ E = 2nπ (radian) where n is an integer

The oscillation condition is governed by two key equations: the amplitude conditional equation, which states that the amplifier gain $ G_E $ must surpass the insertion attenuation (IA) of the SAW resonator, and the phase conditional equation, which requires the loop phase shift across the amplifier $ \phi_E $ and the SAW resonator $ \phi $ to be an integral multiple of $ 2\pi $ at the oscillation frequency Consequently, oscillation does not occur precisely at the SAW resonator's resonance frequency; rather, it is primarily determined by the phase condition, which is affected by the feedback amplifier's phase shift.

Figure 13 – 600 MHz two-port SAW resonator oscillator

Two-port SAW resonators can be engineered to achieve either a 0° or 180° phase shift by strategically positioning the IDT and adjusting the lead connections.

Practical remarks for oscillator applications

The oscillation frequency of SAW resonators varies from the exact resonance frequency and the center frequency, influenced by factors such as load capacitance and feedback amplifier phase shift It is essential to consider these frequency dependencies when selecting resonators for a specific oscillator circuit design.

It is essential to verify if an application can accommodate changes in the degree of resonator characteristics, as outlined in section 5.5 d) To ensure compliance, manufacturers must consistently conduct quality conformance tests, particularly accelerated or continuous aging tests, and provide the relevant data.

High power excitation can negatively impact the characteristics of SAW resonators and alter their resonance frequency, leading to reduced long-term stability To prevent this, oscillator circuits must be designed to avoid exceeding the maximum drive level of the resonator Additionally, it is advisable to conduct long-term aging tests within the actual oscillator circuit when designing a new SAW oscillator.

Accelerated aging tests, which impose significantly harsher conditions than typical operating environments in terms of excitation and temperature, are conducted to assess the power dissipation capability.

7 Checklist of SAW resonator parameters for drawing up specifications

The checklist in Table 3 serves as a valuable resource for manufacturers to finalize specifications for a specific SAW resonator type, detailing essential parameters and environmental characteristics It aids in the ordering process and should be considered when drafting specifications, enabling prospective users to better assess the resonator's suitability for their intended applications Additionally, the list helps users define necessary operating conditions and performance characteristics when specifying a new SAW resonator for a particular use.

When a standard item meets the necessary requirements, it is adequate to outline the relevant specifications However, if existing detailed specifications do not fully satisfy the requirements, it is essential to reference these specifications along with a list of any known discrepancies.

In exceptional situations where the discrepancies are significant, it is advisable to create new specifications rather than relying on existing detail specifications These new specifications should follow a format similar to that of the standard detail specifications.

It is essential to focus only on the critical parameters relevant to each application, as specifying all parameters can lead to unnecessary costs Imposing strict tolerances on non-critical parameters may also contribute to increased expenses.

In Table 3, references are made to the relevant clauses and subclauses of IEC 61019-1

These references appear in column 2 In column 3, "one-port" and "two-port" mean "one-port

SAW resonator only" and "two-port SAW resonator only", respectively

Parameters and characteristics Clause and subclause of IEC

Absolute maximum level of drive

Frequency of maximum admittance 61019-1, 4.2.10.2.1 One-port

Motional resonance frequency 61019-1, 4.2.10.2.2 One-port

Anti-resonance frequency 61019-1, 4.2.10.3 One-port

Load resonance frequency 61019-1, 4.2.10.13 One-port

Spurious resonance 61019-1, Figure 4 One-port

Motional resonance frequency for two-port resonator 61019-1, 4.2.11.4 Two-port

Minimum insertion attenuation for two-port resonator 61019-1, 4.2.11.8 Two-port

Spurious resonance rejection 61019-1, 4.2.11.10 Two-port

Unloaded quality factor 61019-1, 4.2.11.5 Two-port

Loaded quality factor 61019-1, 4.2.11.6 Two-port

Operating phase shift 61019-1, 4.2.11.11 Two-port

Parameters and characteristics Clause and subclause of IEC Comments

Rapid temperature change (thermal shock in air) 61019-1, 8.7.4, 8.7.5

Damp heat, cyclic, first cycle 61019-1, 8.7.13

Damp heat, cyclic, remaining cycles 61019-1, 8.7.13

Damp heat (long term exposure) 61019-1, 8.7.16

It should be clearly stated in the detail specification whether the SAW resonator is required to operate while under conditions of shock, vibration or acceleration

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(6) not applicable timeliness quality of writing technical contents logic of arrangement of contents tables, charts, graphs, figures other

Q8 I read/use the: (tick one)

English text only R both English and French texts R

Q9 Please share any comment on any aspect of the IEC that you would like us to know:

Tiêu đề	Surface Acoustic Wave (SAW) Resonators – Guide to the Use
Trường học	International Electrotechnical Commission
Chuyên ngành	Electrotechnology
Thể loại	Standard
Năm xuất bản	2005
Thành phố	Geneva

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