Handbook of Micro and Nano Tribology Episode 2 Part 9 pot

The scientific industrial applications include quality control in the semiconductor industry and related research, molecular biology and chemistry, medical studies, materials science, an

“Frontmatter”

Handbook of Micro/Nanotribology

Ed Bharat Bhushan

Boca Raton: CRC Press LLC, 1999

Acquiring Editor: Cindy Carelli

Project Editor: Andrea Demby

Marketing Manager: Jane Stark

Cover design: Dawn Boyd

Manufacturing: Lisa Spreckelson

Library of Congress Cataloging-in-Publication Data

Handbook of micro/nanotribology / edited by Bharat Bhushan 2nd ed.

p cm.

Includes bibliographical references and index.

ISBN 0-8493-8402-8 (alk paper)

1 Tribology Handbooks, manuals, etc I Bhushan, Bharat, 1949- TJ1075.H245 1999

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Printed in the United States of America 1 2 3 4 5 6 7 8 9 0

The invention of the scanning tunneling microscope has led to an explosion of

a family that is now called scanning probe microscopes (SPMs) The most popular instrument in this family is the atomic force microscope (AFM) According to some estimates, sales of SPMs in 1993 were about 100 million U.S dollars (about 2,000 units installed to date) worldwide The biggest portion

of this results from AFM sales, although the first ideas and preliminary results were introduced to the scientific community only a few years ago (1986) The whole field of SPM is not very old (the first operation of STM was in 1981) and still is in a rapidly evolving state The scientific industrial applications include quality control in the semiconductor industry and related research, molecular biology and chemistry, medical studies, materials science, and the field of information storage systems

Soon after the invention of the AFM it was discovered that part of the information in the images resulted from friction and that the instrument could be used as a tool for tribology In general, SPMs are now used intensively in this field Researchers can image single lubricant molecules and their agglom-eration and measure surface topography, adhesion, friction, wear, lubricant film thickness, and mechan-ical properties all on a micrometer to nanometer scale

With the advent of more powerful computers, atomic-scale simulations have been conducted of tribological phenomena Simulations have been able to predict the observed phenomena Development

of the field of micro/nanotribology has attracted numerous physicists and chemists This is a field I personally know very little about I am, however, very excited that SPMs have had such an immense impact on the field of tribology

I congratulate Professor Bharat Bhushan in helping to develop this field of micro/nanotribology The

Handbook of Micro/Nanotribology is very timely and I expect that it will be well received by the interna-tional scientific community With best wishes

Prof Dr Gerd Binnig

IBM Research Division Munich, Germany Nobel Laureate Physics, 1986

Preface Second Edition, 1999

The first edition of the Handbook of Micro/Nanotribology was published in the Spring of 1995 Soon after its publication, the first-of-a-kind monograph became a reference book for the novice, as well as experts,

in the emerging field of micro/nanotribology Since the field is evolving very rapidly, we felt that the monograph needed a second edition

The second edition is totally revised The scope of the first edition has been expanded In the first part, Basic Studies, two new chapters on AFM Instrumentation and Tips and Surface Forces and Adhesion have been added In the second part, Applications, four new chapters on Design and Construction of Magnetic Storage Devices, Microdynamic Devices and Systems, Mechanical Properties of Materials in Microstructure Technology, and Micro/Nanotribology and Micro/Nanomechanics of MEMS Devices have been added The content of each original chapter has been revised and broadened In many cases, new authors were invited to contribute chapters on topics covered in the first edition Of the 16 chapters

in the book — 11 in Basic Studies and five in Applications — 11 are written by new contributors, whereas five chapters have been thoroughly revised by the original authors

The organization of the Handbook is straightforward It is divided into two parts: Part I covers the basic studies and Part II encompasses design, construction, and applications to magnetic storage devices and MEMS The introduction chapter starts out with a definition and the evolution of micro/nanotri-bology, description of various measurement techniques, and description of various industrial applications where the study of tribology, on a nanoscale, is critical After this chapter, the subject matter is presented

as follows: an overview of AFM instrumentation and tips; current understanding of surface physics and description of methods used to physically and chemically characterize solid surfaces; roughness charac-terization and static contact models using fractal analysis; surface forces and adhesion; introduction of sliding at the interface and study of friction on an atomic scale; study of scratching and wear as a result

of sliding, applications to nanofabrication/nanomachining, as well as nano/picoindentation; study of lubricants used to minimize friction and wear; surface forces and microrheology of thin liquid films; measurement of nanomechanical properties of surfaces and thin films; and atomic-scale simulations of interfacial phenomena

Part II includes material in the following order: design and construction of magnetic storage devices; microdynamic devices and systems; micro/nanotribology and micro/nano mechanics of magnetic storage devices; mechanical properties of materials in microstructure technology; and micro/nanotribology and micro/nanomechanics of MEMS devices

The Handbook is intended for graduate students of tribology and researchers who are active or intend

to become so in this field This book should serve as an excellent text for a graduate course in micro/nan-otribology For a reduced scope of the course, Chapters 2, 3, and 10 (Part I) and Chapters 12 and 13 (Part II) can be eliminated For a more concise course, Chapter 4 may also be eliminated

I would like to thank the authors for their excellent contributions in a timely manner My secretary, Kathleen Tucker, patiently typed six of the chapters contributed by me to this book Last, but not least,

I wish to thank my wife, Sudha, my son, Ankur, and my daughter, Noopur, who have been very forbearing during the preparation of this book

Bharat Bhushan

Powell, Ohio

Preface First Edition, 1995

Tribology is the science and technology of two interacting surfaces in relative motion and of related subjects and practices The popular equivalent is friction, wear, and lubrication The advent of new techniques to measure surface topography, adhesion, friction, wear, lubricant-film thickness, and mechanical properties all on a micro to nanometer scale, to image lubricant molecules and availability

of supercomputers to conduct atomic-scale simulations has led to development of a new field referred

to as Microtribology, Nanotribology, Molecular Tribology, or Atomic-Scale Tribology This field is con-cerned with experimental and theoretical investigations of processes ranging from atomic and molecular scales to microscale, occurring during adhesion, friction, wear, and thin-film lubrication at sliding surfaces These studies are needed to develop fundamental understanding of interfacial phenomena on

a small scale and to study interfacial phenomena in micro- and nano structures used in magnetic storage systems, microelectromechanical systems (MEMS) and other industrial applications The components used in micro- and nano structures are very light (on the order of few micrograms) and operate under very light loads (on the order of few micrograms to few milligrams) As a result, friction and wear (nanoscopic wear) of lightly loaded micro/nano components are highly dependent on the surface inter-actions (few atomic layers) These structures are generally lubricated with molecularly thin films Micro-and nanotribological techniques are ideal to study friction Micro-and wear processes of micro/nano structures These studies are also valuable in the fundamental understanding of interfacial phenomena in macro-structures to provide a bridge between science and engineering Friction and wear on micro- and nanoscales have been found to be generally smaller compared to that at macroscales Therefore, micro-nanotribological studies may identify regimes for ultra-low friction and zero wear

The field of tribology is truly interdisciplinary Until recently, it has been dominated by mechanical and chemical engineers who have conducted macro tests to predict friction and wear lives in machine components and devised new lubricants to minimize friction and wear Development of the field of micro/nanotribology has attracted many more physicists and chemists who have significantly contributed

to the fundamental understanding of friction and wear processes on an atomic scale Thus, tribology is now studied by both engineers and scientists The micro/nanotribology field is growing rapidly and it has become fashionable to call oneself a “tribologist” Since 1991, international conferences and courses have been organized on this new field of micro/nanotribology

We felt a need to develop a handbook of micro/nano tribology This first-of-a-kind monograph presents the state-of-the-art of the micro/nanotribology field by the leading international researchers In each chapter we start with macroconcepts leading to microconcepts We assume that the reader is not expert in the field of microtribology, but has some knowledge of macrotribology It covers characterization

of solid surfaces, various measurement techniques and their applications, and theoretical modeling of interfaces

The organization of the handbook is straightforward The book is divided into two parts Part I covers the basic studies and Part II covers applications to magnetic storage devices and MEMS Part I includes

ten chapters The introduction chapter starts out with a definition and evolution of micro/nanotribology, description of various measurement techniques, and description of various industrial applications where the study of tribology, on a nanoscale, is critical Following the introduction chapter, subject matter is presented in the following order: description of methods used to physically and chemically characterize solid surfaces, roughness characterization and static contact models using fractal analysis, introduction

of sliding at the interface and study of friction, study of wear as a result of sliding, study of lubricants used to minimize friction and wear, imaging of lubricant molecules, surface forces and microrheology

of thin liquid films, measurement of micromechanical properties of surfaces and thin films, and atomic-scale simulations of interfacial phenomena Part II includes three chapters Subject matter is presented

in the following order: micro/nanotribology and micro/nano mechanics of magnetic storage devices and MEMS, role of particulate contaminants in tribology and applications to magnetic storage devices and MEMS, and modeling of hydrodynamic lubrication with molecularly thin gas films and applications to MEMS

The handbook is intended for graduate students of tribology and research workers who are active or intend to become active in this field This book should serve as an excellent text for a graduate course

in micro/nanotribology For a reduced scope of the course, Chapters 2 and 9 from Part I and Chapters 11

to 13 from Part II can be eliminated For a further reduction, Chapter 3 from Part I can also be eliminated

I would like to thank the authors for their excellent contributions in a timely manner And I wish to thank my wife, Sudha, my son, Ankur, and my daughter, Noopur, who have been very forbearing during the preparation of this book

Bharat Bhushan

Powell, Ohio

The Editor

Bharat Bhushan, Ph.D., a pioneer in tribology and the mechanics of magnetic storage devices, is an internationally recognized expert in the general fields of conventional tribology and micro/nanotribology and one of the most prolific authors He is presently an Ohio Eminent Scholar and The Howard D Win-bigler Professor in the Department of Mechanical Engineering and the Director

of Computer Microtribology and Contamination Laboratory at The Ohio State University, Columbus

He received a Masters in mechanical engineering from the Massachusetts Institute of Technology, a Masters in mechanics and a Ph.D in mechanical engineering from the University of Colorado at Boulder, an MBA from Rens-selaer Polytechnic Institute at Troy, NY, a Doctor Technicae from the University

of Trondheim, Norway, and a Habilitate Doctor of Technical Sciences from the Warsaw University of Technology in Poland He is a registered professional engineer (mechanical)

He has authored five technical books, 22 handbook chapters, more than 350 technical papers in refereed journals, more than 60 technical reports, edited more than 24 books, and holds seven U.S patents He

is founding editor-in-chief of the World Scientific Advances in Information Storage Systems Series, The CRC Press Mechanics and Materials Science Series, and the Journal of Information Storage and Processing Systems He has given more than 175 invited presentations on five continents, including several keynote addresses at major international conferences He is an accomplished organizer He organized the first symposium on Tribology and Mechanics of Magnetic Storage Systems in 1984 and the first international symposium on Advances in Information Storage Systems in 1990 He continues to organize and chair the AISS symposia annually He founded an ASME Information Storage and Processing Systems Division and is the founding chair His biography has been listed in over two dozen Who’s Who books, including

Who’s Who in the World He has received more than a dozen awards for his contributions to science and technology from professional societies, industry, and U.S government agencies He is a foreign member

of the Byelorussian Academy of Engineering and Technology, the Russian Engineering Academy and the Ukrainian Academy of Transportation, a senior member of IEEE, and a member of STLE, NSPE, Sigma

Xi, and Tau Beta Pi

Dr Bhushan has worked for the Department of Mechanical Engineering at the Massachusetts Institute

of Technology, Cambridge, MA; Automotive Specialists, Denver, CO; the R & D Division of Mechanical Technology, Inc., Latham, NY; the Technology Services Division of SKF Industries, Inc., King of Prussia, PA; the General Products Division Laboratory of IBM Corporation, Tucson, AZ; the Almaden Research Center of IBM Corporation, San Jose, CA; and the Department of Mechanical Engineering at the University of California, Berkeley

He is married and has two children His hobbies include music, photography, hiking, and traveling