Interesting differences were found on the sensor response between sensors based on 400 and 700 8C-annealed WO3, what motivated a structural study of these materials.. Crystalline shear p
Trang 1Crystalline structure, defects and gas sensor response to
I Jime´nez*, J Arbiol, G Dezanneau, A Cornet, J.R Morante
Departament d’Electro`nica, Enginyeria i Materials Electro`nics, Universitat de Barcelona, Barcelona 08028, Spain
Abstract
Structural and NO2and H2S gas-sensing properties of nanocrystalline WO3powders are analysed in this work Sensor response of thick-film gas sensors was studied in dry and humid air Interesting differences were found on the sensor response between sensors based on 400 and
700 8C-annealed WO3, what motivated a structural study of these materials Crystalline structure and defects were characterised by X-ray diffraction (XRD), Raman spectroscopy and transmission electron microscopy (TEM) Experimental results showed that both triclinic and monoclinic structures are present in the analysed materials, although their amount depends on the annealing treatment Crystalline shear planes, which are defects associated to oxygen deficient tungsten trioxide, were found in 400 8C-annealed WO3and their influence on XRD spectra was analysed by XRD simulations Moreover, XRD and Raman spectra were also acquired at normal metal oxide-based gas sensor working temperatures in order to relate both crystalline structure and sensor response
# 2003 Elsevier Science B.V All rights reserved
Keywords: WO 3 ; Gas sensor; Structural characterisation; NO 2 ; H 2 S
1 Introduction
Tungsten oxide is nowadays considered as one of the most
interesting materials in the field of gas sensors based on
metal oxides, as it is shown by the increasing number of
publications appeared in recent years Very good results in
the detection of NO2 and H2S by sensors based on this
material have been reported Most of them concern WO3
thin films obtained by physical routes such as sputtering
[1,2] or thermal evaporation [3,4] Besides, thick-films
technologies based on the use of nanopowders have been
also presented [5,6] Powder is mixed with an organic
vehicle to form a paste, which is usually deposited on a
substrate as a thick sensitive film, although compatibility
with micromachined gas sensors is also possible [7–10]
Since gas sensors based on metal oxides must usually work
at temperatures ranging from 200 to 400 8C, the sensing
material has to be previously stabilised at higher
tempera-tures This annealing step will strongly affect the structural
properties of the nanocrystalline material and thus its
gas-sensing properties too
Regarding WO3, the pyrolysis of ammonium
paratung-state has been one of the most used routes to obtain this
material as powder with nanometric grain size, being a
well-known technique in the field of gas sensors[11,12] In the same way, dehydration of tungstic acid has revealed as an interesting route to obtain WO3 with low impurities con-centration[13,14], although it is not so usual in the field of gas sensors Gas sensors based on WO3 obtained by this route showed a better sensor response to NO2than that of pyrolytic WO3-based gas sensors under the same test con-ditions, combined with a low response to CO and CH4[15] The aim of this work is to study the evolution of structural properties of WO3nanocrystalline powders as a function of annealing temperature in order to understand the sensor response to NO2and H2S of gas sensors based on differently annealed WO3 Thick-film gas sensors based on differently annealed WO3 nanopowders (400 and 700 8C) were pre-pared and their gas-sensing properties towards NO2and H2S
in dry and humid air were compared The differences found
in gas-sensing motivated a study of the crystalline properties and their evolution with annealing temperature The com-bination of characterisation techniques such as X-ray dif-fraction (XRD), Raman spectroscopy and transmission electron microscopy (TEM) allows to precise the structure
of the synthesised compounds and the nature of possible defects Furthermore, XRD and Raman spectra were also acquired at normal working sensor temperatures for the detection of our target gases (between room temperature and 300 8C) in order to better relate structural and gas-sensing properties
Sensors and Actuators B 93 (2003) 475–485
*
Corresponding author Tel.: þ34-934-021-146; fax: þ34-934-021-148.
E-mail address: ijimenez@el.ub.es (I Jime´nez).
0925-4005/03/$ – see front matter # 2003 Elsevier Science B.V All rights reserved.
doi:10.1016/S0925-4005(03)00198-9
Trang 22 Experimental
WO3 nanocrystalline powders were obtained by a soft
chemistry route based on tungstic acid Tungstic acid was
dissolved in a 50:50 volumic mixture of methanol and water
with a tungsten over water molar ratio of 25 This solution
was heated at 80 8C for 24 h under stirring in air and dried by
further heating at 110 8C in air, leading to tungsten oxide
hydrate This material was annealed in a furnace between
400 and 700 8C for 5 h under a flow of synthetic air to obtain
nanocrystalline WO3
Gas sensors were obtained by screen-printing of a paste
based on WO3over alumina substrates, which had already
printed platinum electrodes on the front side and a platinum
heater on the backside to control the operating temperature
These gas sensor devices were placed in a stainless steel test
chamber (200 ml) where a controlled atmosphere was
pro-vided by means of mass flow controllers connected to a
computer The sensor response was acquired for different
concentrations of H2S and NO2in synthetic dry and humid
air at a flow of 200 ml min1 Humidity was controlled by
mixing the appropriate quantities of dry air with
water-bubbling air, monitoring the relative humidity with a
com-mercial capacitive humidity sensor Gas sensor response was
calculated as the resistance ratio Rgas/Rair for both gases
Operating temperature of the sensor devices was varied
between 200 and 300 8C Sensor response at lower
tempera-tures was not studied in order to avoid too high sensor
resistance, which may lead to not reliable sensor response
measurements
XRD patterns of the nanopowders were obtained with a
Siemens D-500 X-ray diffractometer using Cu Ka radiation,
with operating voltage of 40 kV and current of 30 mA
Raman scattering measurements were obtained in
back-scattering geometry with a Jobin-Yvon T64000
spectro-meter coupled to an Olympus metallographic microscope
Excitation was provided by an argon-ion laser operating at a wavelength of 488.0 nm with a low incident power to avoid thermal effects Raman shifts were corrected by using silicon reference spectra after each measurement Trans-mission electron microscopy was carried out on a Phillips
300 keV with 0.19 nm point resolution For TEM observa-tions, WO3 nanopowders were ultrasonically dispersed
in ethanol and deposited on amorphous holey carbon membranes
3 Results and discussion 3.1 Gas sensor response
Fig 1a shows sensor response to 1 ppm of NO2 and
20 ppm of H2S in synthetic dry air of gas sensors based
on 400 and 700 8C-annealed WO3as a function of sensor working temperature In the range of working temperatures studied, from 200 to 300 8C, sensor response increased when temperature decreased for both gases A similar behaviour has already been described for NO2and H2S detection by
WO3[3,6], although their sensing mechanisms are comple-tely different The detection of NO2is usually based on the formation of absorbed surface-trap states NO2 ads, whereas
H2S molecules react with surface oxygen In our case, it was found that WO3 annealed at 700 8C had a higher sensor response to both gases than 400 8C-annealed WO3in this operation temperature range
Sensor response to NO2and H2S in wet air was analysed
at fixed operation temperatures (200 8C for H2S and 225 8C for NO2detection) These temperatures were selected so as
to achieve a compromise between sensor response and recovery time, which decrease when operating temperature increases in the case of NO2detection Fig 1bshows the
Fig 1 (a) Sensor response to H 2 S and NO 2 of gas sensors based on 400 and 700 8C-annealed WO 3 as functions of working temperature, (b) Sensor response
to H S (200 8C) and NO (225 8C) of gas sensors based on 400 and 700 8C-annealed WO as functions of relative humidity.
Trang 3dependence of the sensor response to NO2 and H2S on
humidity for 400 and 700 8C-annealed WO3, whereas
Fig 2a and b show a comparison of the dynamic sensor
responses to these gases in dry and humidified air (50% of
relative humidity) This sensor response was evaluated
taking sensor resistance in dry or humidified synthetic air
as the reference Response and recovery times, for both
gases, have a low dependence on humidity, as sensor
response to NO2 On the other hand, sensor response to
H2S is highly dependent on humidity, especially for 700
8C-annealed WO3 In fact, only sensor resistance in H2S
atmo-sphere is highly dependent on humidity, as it will be shown
later According to sensor response and humidity
depen-dency, 400 8C-annealed WO3 was chosen for further H2S
detection studies, whereas 700 8C-annealed WO3was cho-sen for NO2 detection Sensor responses of this materials
to different concentrations of H2S (1–10 ppm) and NO2 (0.2–2 ppm) under different humidified ambiences are shown inFig 3, which still clearly shows a greater influence
of humidity on H2S detection than on NO2detection Finally, in order to study this great influence of humidity
on H2S sensor response, pulses of humidity (1 h) were introduced in atmospheres of synthetic air and H2S (2 ppm) in synthetic air, keeping the concentration of this gas constant.Fig 4shows the results for the gas sensor based
on 400 8C-annealed WO3 This experimental procedure, the study of the dynamical response of metal oxide gas sensors
to pulses of humidity in atmospheres containing a target gas,
Fig 2 Dynamic sensor response of WO 3 -based gas sensors to (a) 1ppm of NO 2 in dry and 50% relative humidity air, (b) 5 ppm of H 2 S in dry and 50% relative humidity air.
Fig 3 Sensor response to different concentrations of NO (400 8C-annealed WO ) and H S (700 8C-annealed).
I Jime´nez et al / Sensors and Actuators B 93 (2003) 475–485 477
Trang 4has revealed as a very useful method to investigate the
interaction of not only water, but also that of the target
gas with the sensing material[16] When humidified air was
introduced in a background of synthetic air, resistance
decreased very fast and afterwards increased slowly,
reach-ing a final value very close to the resistance value in dry
synthetic air Similar dynamic responses have been already
described for SnO2, In2O3and ZnO[17], although the reason
is not completely understood yet The decrease in sensor
resistance was attributed to the dissociatively reaction of
water with lattice oxygen, which leads to the formation of
oxygen vacancies and so to a resistance decrease The
following slow resistance increase could be due to the
recombination of the OH ions with the lattice oxygen
vacancies previously formed As it is shown in our case,
humidity has a low effect on base resistance in synthetic air
in the case of these WO3-based gas sensors However, it is
interesting to notice that this behaviour is completely
dif-ferent when the background is H2S in air In this case, there
is no fast decay of resistance but an important increase when
humidity is introduced, which shows that water is probably
competing with H2S molecules and preventing some oxygen
ions from reacting with H2S When dry air is reintroduced
again, previous sensor resistance value is recovered,
although response time is slower, probably due to a slow
desorption of adsorbed water Similar dynamic results were
found for 700 8C-annealed WO3, although a greater
influ-ence of humidity on resistance in the presinflu-ence of H2S was
found Therefore, this may show not only that water is
competing with H2S, but also that there are more than
one reactive oxygen species participating on the detection
of this gas, since 400 and 700 8C-annealed WO3are
differ-ently affected Therefore, the reactive site blocked by water
would be much more abundant in 700 8C-annealed than in
400 8C-annealed WO3 3.2 Structural characterisation Annealed powder was identified by XRD as nanocrystal-line WO3 Crystalline WO3presents a pseudo-cubic struc-ture with a slight distortion of the cubic ReO3-type lattice, where W atoms occupy the centre of oxygen octahedra linked by their corners At room temperature, monoclinic and triclinic are the most common structures [18] Mono-clinic is described in the P21/n space with cell parameters
a¼ 0:7301 nm, b ¼ 0:7539 nm, c ¼ 0:7689 nm and b ¼ 90:89 The triclinic structure is described in the P-1 space group with cell parameters a¼ 0:7310 nm, b ¼ 0:7524 nm,
c¼ 0:7686 nm, a ¼ 88:85, b¼ 90:91, g¼ 90:935.Fig 5
presents XRD patterns from 2y¼ 20 to 408 of WO3samples annealed at different temperatures (400, 500, 600 and
700 8C) This figure also includes theoretical diffraction diagrams of the triclinic and monoclinic compounds These diagrams have been calculated using the program FULL-PROF[19], taking the cell parameters and atomic positions
of[18]and an artificial crystallite size of 50 nm Due to the slight distortion of the lattice, the main reflection (1 0 0) of the ideal cubic cell splits in three in the range 20–308[20]; (1 0 0), (0 1 0) and (0 0 1) pseudo-cubic reflections Although these reflections are referred as (2 0 0), (0 2 0) and (0 0 2) if the monoclinic or triclinic unit cells are con-sidered, indexations will be referred herein to the pseudo-cubic representation with cell parameter a 0:38 nm It is clear fromFig 5these three main reflections can not be used
to determine if the crystalline structure is triclinic or mono-clinic, since their position and relative intensity is very Fig 4 Sensor resistance variation (400 8C-annealed WO 3 ) to pulses of humidity (30, 50 and 80% relative humidity) in a background of synthetic air and H 2 S (2 ppm) in synthetic air.
Trang 5similar for both structures when dealing with nanometric
grain sizes However, it is interesting to notice the evolution
of the full width at half maximum (FWHM) and maximum
intensity with annealing temperature of these three main
peaks, shown inFig 6 Whereas relative intensities of the
three main reflections should be almost identical,
experi-mental spectra show that diffraction peak corresponding to
(0 0 1) reflection (at 23.128) is broader and not so well
defined as the other two for low annealing temperatures
This is reflected by the evolution of FWHM of (0 0 1)
reflection in Fig 6, as it only approaches the values of
the other two peaks after a 700 8C annealing A similar
behaviour is presented by the maximum peak intensity as a function of annealing temperature Since these character-istics should be similar for these three reflections, either in the case of monoclinic or triclinic hypothesis, the nature of this difference should be attributed to the presence of some bulk defects that would mainly affect the (0 0 1) reflection peak This fact will be further discussed according to TEM, selected area electron diffraction (SAED) observations and XRD simulations
Regarding crystalline structure identification by XRD, the distribution of diffraction peak intensities in the range 32–
358 has been used in literature to distinguish between Fig 5 XRD spectra of obtained WO 3 (annealed at indicated temperature) Triclinic and monoclinic simulated spectra are also shown.
Fig 6 Evolution of FWHM and intensity of the three main XRD reflections with annealing temperature.
I Jime´nez et al / Sensors and Actuators B 93 (2003) 475–485 479
Trang 6triclinic and monoclinic structures [21], as simulations of
triclinic and monoclinic structures suggest inFig 5 In our
case, intensities agree better with the hypothesis of a
mono-clinic structure Nevertheless, due to the small mean
crystal-lite size, between 30 and 70 nm[15], reflections are badly
resolved and the possibility of a mixture of both monoclinic
and triclinic phases should be considered, as Raman
inves-tigations will show As regards TEM invesinves-tigations, diffuse
ring patterns obtained by selected area electron diffraction
(SAED) (not shown) were not sufficient to determine the
amount of triclinic/monoclinic crystalline structure of the
samples either
On the other hand, a detailed analysis performed by
high-resolution electron microscopy (HRTEM) showed some
wide fringes next to the borders of some of the 400
8C-annealed WO3 nanoparticles, as it is marked with black
arrows in Fig 7 Detailed SAED pattern showed large
reflections corresponding to typical WO3and short
reflec-tions that have been assigned to Magneli phases (SAED
pattern inset inFig 7) These phases correspond to oxygen
deficient tungsten trioxide with formulas WnO3n2 [22]
Since these wide fringes were superposed to the WO3atomic
planes, a detailed digital image analysis was carried out in
order to separate these phases and study them Firstly, a
representative squared area fromFig 7was selected (Fig 8a)
and a FFT image of this squared region was obtained
(Fig 8b) Afterwards, spots corresponding to the WO3
planes and to the Magneli Phase on the FFT were selected
and filtered by using a mask filter, in order to obtain their
representation in separate images, as shown inFig 8c and d
From these images, it can be concluded that the wide planes
observed correspond to shear planes, in good agreement
with those {1 0 3} crystallographic shear (CS) defects
observed by Sloan et al [23], where {1 0 3}R refer to the family of equivalent directions expressed in the ideal ReO3 cubic cell Visible between the CS planes, 0.38 nm lattice fringes corresponding to the (0 1 0) WO3planes were found
In tungsten trioxide, it is possible to shear the structure in such a way that oxygen vacancies are eliminated and some tungsten atoms remain more closely spaced, so pairs of W5þ atoms are found in order to compensate the charge left by the oxygen deficiency These phases, called Magneli phases, correspond to oxygen deficient tungsten trioxide All of them present a crystalline structure based on WO3 zones (corner sharing WO6 octahedra) linked by units of edge sharing octahedra in the CS phases[23] These bulk defects influence the electrical transport properties: carrier concen-tration increases, as each missing oxygen atom contributes two carriers, and carrier mobility decreases[24] This kind
of defect was not found by HRTEM in samples annealed at temperatures over 400 8C
Although these substoichiometric regions seemed to be very localised, as diffraction patterns generally observed were those of typical stoichiometric WO3, it is reasonable to think that some shear planes could be also present inside the bulk material These planes may affect the intensities of XRD reflections and this effect has been studied by XRD simulations with the software Diffax [25] Two kinds of layers were defined: the first one corresponds to an unfaulted
WO3derived structure (cell no 1), whereas the other one (cell no 2) corresponds to the planar defect Both cells are represented inFig 9a, where vectors defining the unit cell 1,
2 and cubic unit cell are also shown In this representation,
W atoms occupy the centre of oxygen octahedra For the sake of simplicity, the atomic positions have been first described in a cubic representation, the unit cells being Fig 7 HRTEM micrograph from a 400 8C-annealed WO 3 nanoparticle The inset corresponds to the SAED pattern of this nanoparticle Wide fringes have been marked with black arrows The squared region has been digitally analyzed in Fig 4
Trang 7artificially distorted at the end (orthorhombic unit cells) to
reflect the distortion of WO3structure The cells parameters
used for the pseudo-cubic unit cell were a0¼ 0:365 nm,
b0¼ 0:377 nm, c0¼ 0:384 nm and the shear plane direction
was [0 1 3], according to HRTEM investigations
Simula-tions have been performed supposing a random stacking of
layer 1 and layer 2 with a given probability associated to
each layer OnFig 9b, simulations for different probabilities
of shear planes are shown It can be seen that for a zero
percent probability for layer 2, i.e a stacking of unfaulted
WO3layers, the distribution of intensities for the three main diffraction peaks remain similar to that observed for mono-clinic or trimono-clinic structures, confirming the validity of the approximation done on atomic positions When the prob-ability of layer 2 presence increase, the intensities of calcu-lated (0 0 1) reflection diminishes while its width increases
A similar tendency is observed for the (0 1 0) reflection but
to a lower extent These results agree with the evolution of
Fig 8 (a) Magnified detail of the squared region in Fig 7 , (b) FFT of image 4.a, (c) 0.38 nm WO 3 lattice fringes corresponding to the {1 0 0} R planes obtained after selecting the large reflections in 4.b, (d) {1 0 3} R crystallographic shear (CS) defects from Magneli phases obtained after selecting the short reflections in 4.b.
Fig 9 (a) Representation of the layers used for XRD simulation: the first one corresponds to an unfaulted WO 3 derived structure (cell no 1), whereas the other one (cell no 2) corresponds to the planar defect, (b) XRD simulations considering different probabilities of shear planes.
I Jime´nez et al / Sensors and Actuators B 93 (2003) 475–485 481
Trang 8experimental XRD diffraction patterns of samples annealed
between 400 and 700 8C (Fig 5), confirming that the TEM
observed CS planes could be responsible for the anomalous
XRD pattern of the (0 0 1) reflection after a 400
8C-anneal-ing Therefore, this anomalous reflection behaviour can be
used as an indirect proof of the presence of bulk oxygen
deficiencies Higher annealing temperatures would reduce
the presence of these defects, according to experimental a
simulated XRD patterns and TEM observations
Regarding Raman spectroscopy, it is able to give a clearer
evidence of the monoclinic or triclinic nature of the WO3
phase, since the lowest frequency phonon modes are
dif-ferent for both structures Cazzanelli et al.[21]reported that
monoclinic structure presents a peak at 34 cm1, while
triclinic presents a peak at 43 cm1.Fig 10shows that only
the peak corresponding to triclinic phase was present in
powders annealed at 4008 When annealing temperature is
increased, the peak at 34 cm1appears and both peaks seem
to coexist in the range of annealing temperatures studied
Similar results concerning the evidence of
triclinic-mono-clinic coexistence in WO3 by Raman have also been
reported by Souza-Filho et al [26] Therefore, powders
annealed at 400 8C have mainly a triclinic phase and both
monoclinic and triclinic phases coexist at higher annealing
temperatures
Finally, XRD and Raman spectra of 400 and 700
8C-annealed powders were also acquired under controlled
temperature (from room temperature to 300 8C for both
techniques) and ambient conditions (synthetic dry air only
for Raman spectra) The aim of this study was to determine if
the previously shown structural differences could also be
present at normal sensor operating temperatures
Concern-ing XRD (not shown), displacements lower than 0.18 respect
room temperature were found and they were attributed to thermal effects However, apart from these displacements,
no appreciable changes on spectra were found Therefore, taking into account the previous results, this would mean that CS defects are also present at normal sensor working temperatures in 400 8C-annealed WO3 Regarding Raman spectra, no trace of the 34 cm1 monoclinic vibration was found on the 400 8C-annealed sample in the range of temperatures studied (Fig 11a) This fact is remarkable, since transition temperature between triclinic and monocli-nic temperature is set around 20 8C [18] In the case of
700 8C-annealed WO3 (Fig 11b), 34 cm1 monoclinic vibration became broader and collapsed over 100 8C with the peak at 43 cm1, typical of triclinic structure Therefore, this would lead to think that 400 8C-annealed WO3is able to maintain its triclinic structure at least up to 100 8C Over this temperature, unfortunately, it is not possible to determine the predominant crystalline structure since 700 8C-annealed
WO3showed only a single broad peak over 100 8C Similar situations have been already described for WO3, such as a tetragonal metastable phase at room temperature[27], while
it is considered to appear over 1000 8K
Basically, Raman spectroscopy showed that both triclinic and monoclinic structures are present in WO3 nanocrystal-line powder obtained from tungstic acid Their abundance depends on annealing temperature and seems to be stable at least up to 100 8C TEM showed the presence of CS planes, associated to oxygen deficiencies, in 400 8C-annealed WO3, whereas they were not observed in materials annealed at higher temperatures XRD simulations based on the pre-sence of this defect showed that it might be responsible for the anomalous XRD pattern of the 0 0 1 reflection, confirm-ing its disappearance with annealconfirm-ing over 400 8C However,
Fig 10 Low-frequency Raman spectra of obtained WO (annealed at indicated temperature).
Trang 9no change of the 400 8C-annealed WO3XRD pattern was
observed when XRD measuring temperature was changed
between room temperature and 300 8C As a result, this
defect may be present at usual working sensor temperatures
3.3 Discussion
In addition to an obvious difference of mean grain size
and crystalline quality between materials annealed at 400
and 700 8C[15], previously reported structural differences
have to be taken into account to explain differences on
sensor response Some influences of structural properties on
sensor response to NO2and H2S have been already discussed
in literature For instance, it has been reported that high annealing temperature leads to better NO2sensor response, despite grain size increase, in screen-printed gas sensors based on SnO2nanopowders[28] This was attributed to the improvement of the crystalline quality and the faceting of nanograins, which improved NO2adsorption Additionally, sensor response of WO3 to H2S has been reported to be highly dependent on crystalline structure, with especially good results in the case of tetragonal structure[23], although there is no reference about influence of triclinic or mono-clinic structure influence, to the best of our knowledge
Fig 11 (a) evolution of the low-frequency Raman spectra of 400 8C-annealed WO 3 with measurement temperature, (b) evolution of the low-frequency Raman spectra of 700 8C-annealed WO 3 with measurement temperature.
I Jime´nez et al / Sensors and Actuators B 93 (2003) 475–485 483
Trang 10Finally, influence of crystalline shear planes and bulk
oxy-gen deficiencies on electrical conduction (carrier
concentra-tion and mobility) has also been reported[23] In our case, as
these defects disappear when annealing temperature
increases over 400 8C, oxygen deficiencies may drift to
the surface of the grain and become reactive sites for the
adsorption of NO2and oxygen molecules[29,30], the latter
being consumed by H2S, and this may thus improve sensor
response It is well known that the formation of chemical
bonds between gaseous species and metal oxides depends on
the presence of unsaturated bonds on the surface of the
material, so the amount of chemisorbed species increases
with surface defect concentration[31] As revealed by the
introduction of humidity pulses in the presence of H2S, it is
clear that water is competing with H2S on the grain surface
and some sites are blocked for H2S reaction Since gas
sensors based on 700 8C-annealed is much more affected,
this may lead to think these sites are more abundant in
700 8C-annealed WO3, provided there is more than one
reactive site Nevertheless, more spectroscopic in situ
mea-surements are in progress in order to confirm these
hypoth-eses, which may explain reported differences on sensor
response
4 Conclusions
Crystalline structure, defects and gas sensor response to
NO2and H2S of nanocrystalline WO3were analysed in this
work Annealing temperature was varied between 400 and
700 8C Gas sensors based on 700 8C-annealed tungsten
trioxide showed a better response to NO2and H2S in dry
air than the ones based on 400 8C-annealed WO3 Influence
of humidity on the detection of these gases was also
ana-lysed Gas sensors based on 700 8C-annealed tungsten
tri-oxide exhibited a lower influence of humidity on NO2
response, whereas gas sensors based on 400 8C-annealed
WO3showed a lower influence of humidity on H2S
detec-tion Regarding structural characterisation, two crystalline
structures (triclinic and monoclinic) in WO3nanocrystalline
powders obtained from tungstic acid were identified by
Raman spectroscopy The abundance of these structures
was dependent on annealing temperature Crystalline shear
planes defects, related to oxygen deficiencies, were present
in 400 8C-annealed WO3, as revealed by TEM
investiga-tions Comparison between XRD simulations and
experi-mental data showed that the amount of these defects in bulk
is decreasing when annealing temperature increases from
400 to 700 8C This fact may mean that oxygen deficiencies
are displaced to the outermost part of the grain, increasing
thus reactive sites These structural characteristics were also
studied at normal sensor working temperatures by Raman
and XRD It was found that triclinic structure was stable, at
least, up to 100 in 400 8C-annealed WO3 Besides,
crystal-line shear plane defects were present at operating
tempera-tures under 300 8C, according to XRD results
References [1] G Sberveglieri, L Depero, S Groppelli, P Nelli, WO 3 sputtered thin films for NO x monitoring, Sens Actuators, B 26–27 (1995) 89–92.
[2] S Moulzolf, S Ding, R Lad, Stoichiometry and microstructure effects on tungsten oxide chemiresistive films, Sens Actuators, B 77 (2001) 375–382.
[3] C Cantalini, H.T Sun, M Faccio, M Pelino, S Santucci, L Lozzi,
M Passacantando, NO 2 sensitivity of WO 3 thin film obtained by high vacuum thermal evaporation, Sens Actuators, B 31 (1996) 81–87 [4] D Lee, J Lim, S Lee, J Huh, D Lee, Fabrication and characterization of micro-gas sensor for nitrogen oxides gas detection, Sens Actuators, B 64 (2000) 31–36.
[5] H Lin, C Hsu, H Yang, P Lee, C Yang, Nanocrystalline WO 3 -based H 2 S sensors, Sens Actuators, B 22 (1994) 63–68.
[6] J Solis, S Saukko, L Kish, C Granqvist, V Lantto, Semiconductor gas sensors based on nanostructured tungsten oxide, Thin Solid Films
391 (2001) 255–260.
[7] D Vincenzi, A Butturi, V Guidi, M Carotta, G Martinelli, V Guarnieri, S Brida, B Margesin, F Giaocemozzi, M Zen, D Giusti,
G Soncini, A Vaisiliev, A Pisliakov, Gas-sensing device imple-mented on a micromachined membrane: a combination of thick-film and very large scale integrated technologies, J Vac Sci Technol., B
18 (2000) 2441–2445.
[8] I Simon, N Barsan, M Bauer, U Weimar, Micormachined metal oxide gas sensors: opportunities to improve sensor performance, Sens Actuators, B 73 (2001) 1–26.
[9] J Cerda, A Cirera, A Vila, A Cornet, J.R Morante, Deposition on micromachined silicon substrates of gas sensitive layers obtained by
a wet chemical route: a CO/CH 4 high performance sensor, Thin Solid Films 391 (2001) 265–269.
[10] I Jime´nez, A Cirera, A Cornet, J.R Morante, Pulverisation method for active layer coating on microsystems, Sens and Actuators, B 84 (2002) 78–82.
[11] M Akiyama, J Tamaki, N Miura, N Yamazoe, Tungsten oxide-based semiconductor sensor highly sensitive to NO and NO 2 , Chem Lett (1991) 1611–1614.
[12] J Tamaki, Z Zhang, K Fujimori, M Akiyama, T Harada, N Miura,
N Yamazoe, Grain-size effects in tungsten oxide-based sensor for nitrogen oxides, J Electrochem Soc 141 (1994) 2207–2210 [13] J.H Kim, K.L Kim, A study of preparation of tungsten nitride catalysts with high surface area, Appl Catal A 181 (1999) 103–111 [14] C Bala´zsi, M Farkas-Jahnke, I Kotsis, L Petra´s, J Pfeifer, The observation of cubic tungsten trioxide at high-temperature dehydra-tion of tungstic acid hydrate, Solid State Ionics 141-142 (2001) 411–416.
[15] I Jime´nez, J Arbiol, A Cornet, J.R Morante, Structural and gas-sensing properties of WO 3 nanocrystalline powders obtained by a sol-gel method from tungstic acid, IEEE Sens J 2 (4) (2002) 329– 335.
[16] R Ionescu, A Vancu, C Moise, A Tomescu, Role of water vapour
in the interaction of SnO 2 gas sensors with CO and CH 4 , Sens Actuators, B 61 (1999) 39–42.
[17] T Kuse, S Takahashi, transitional behavior of tin oxide semicon-ductor under a step-like humidity change, Sens Actuators, B 67 (2000) 36–42.
[18] P Woodward, A Sleight, T Vogt, Structure refinement of triclinic tungsten trioxide, J Phys Chem Solids 56 (1995) 1035– 1315.
[19] J Rodriguez-Carvajal, FULLPROF: a program for Rietveld refine-ment and pattern matching analysis, Abstracts of the Satellite Meeting on Powder Diffraction of the XV Congress of the IUCr, Toulouse, France, 1990, p 127.
[20] L.E Depero, S Groppelli, I Natali-Sora, L Sangaletti, G Sberveglieri, E Tondello, Structural studies of tungsten-titanium oxide thin films, Solid State Chem 121 (1996) 379–387.