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publications APPENDIX 5 PROFESSOR ALLAN MATTHEWS PUBLICATIONS LIST Refereed Journal and Refereed Proc Papers 1 A Matthews and D G Teer, “Ion plated titanium nitride coatings for dies and moulds” Proc[.]

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APPENDIX 5

PROFESSOR ALLAN MATTHEWS PUBLICATIONS LIST

Refereed Journal and Refereed Proc Papers

1 A Matthews and D G Teer, “Ion plated titanium nitride coatings for dies and moulds” Proc

of the International Conference on Ion Plating and Allied Techniques, London, June 1979.Published by CEP Consultants Ltd., Edinburgh, 1979

2 A Matthews and D G Teer, “Evaluation of coating wear resistance for bulk metal forming”.Proc of the International Conference on Metallurgical Coatings, San Diego, USA, 1980.Thin Solid Films, 72, 315 (1980)

3 A Matthews and D G Teer, “Deposition of Ti-N compounds by thermionically assisted triodereactive ion plating” Proc of the International Conference on Metallurgical Coatings, SanDiego, USA, 1980 Thin Solid Films, 72, 541 (1980)

4 H A Sundquist, A Matthews and D G Teer, “Ion plated aluminium bronze coatings for sheetmetal forming dies” Proc of the International Conference on Metallurgical Coatings, SanDiego, USA, 1980 Thin Solid Films, 73, 309 (1980)

5 A Matthews, “Plasma assisted vacuum coatings” Tribologiset Pinnoitteet SeminarProceedings, Helsinki University of Technology, (1980) ISBN 951-752-0271

6 J Halling, A Matthews and D G Teer, “Surface coatings for cutting and forming tools” Proc

of the Conference on Tribology in Metal Working, London 1980 Published by theInstitution of Mechanical Engineers and the Metals Society, (Publication C173), London,(1980)

7 J Halling, D G Teer and A Matthews, “Wear resistant coatings deposited by ion plating”.Proc of the Eurotrib 81 Conference, Warsaw, Poland, (1981) Published by the InternationalTribology Council

8 A Matthews, “Surface coating technology” Principles of Tribology, published by theFinnish Engineering Society, INSKO, Helsinki, (1981) ISBN 951-793-514-5

9 A Matthews, D G Teer and J Halling, “Reactive ion plating of ceramic coatings for wearreduction in metal forming” Proc of the International Congress on Metals Engineering,Aston, 1981 Published in Trans Inst Met Fin, 59, 123, (1981)

10 A Matthews and D G Teer, “Characteristics of a thermionically assisted triode ion platingsystem” Proc of the International Conference on Ion and Plasma Assisted Techniques,Amsterdam, 1981 Thin Solid Films, 80, 41, (1981)

11 A Matthews, “A predictive model for specimen heating in ion plating” Vacuum TAIP, 32,

311, (1982)

12 A Matthews, “Production of tribological ceramic coatings” Tribologia, 1, 30, (1982)

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13 A Matthews, “Avoidance of excessive substrate temperatures during plasma assistedprocesses” Proc of the Conference on Ion Assisted Techniques and Applications, Warwick,(1982) The Metals Society, London.

14 A Matthews and H A Sundquist, "Titanium nitride coatings boost productivity".Engineering, 223, 43, (1983)

15 A Matthews and H A Sundquist, “Tribological studies of Ti-N films formed by reactive ionplating” Proc of the International Ion Engineering Congress, ISIAT 83, Kyoto, Japan,(1983) IEE (Japan)

16 A Matthews and K G Swift, “Intelligent knowledge based systems for tribological coatingselection” Proc of the International Conference on Metallurgical Coatings, AmericanVacuum Society, San Diego, USA, 1983 Published in Thin Solid Films, 109, 365, (1983)

17 K G Swift and A Matthews, “A computer consultation system for coating selection”.Product Finishing, 36, 19, (1983)

18 A Matthews, “The properties and applications of hard ceramic coatings” Proc of theConference on Surface Treatment Technology (1984) The Institute of Metal Finishing,Birmingham

19 A Matthews, “The value of deposition processes for industrial tools” Proc of the Materials

in Engineering Conference, Leeds, (1984) The Institute of Metallurgists, London

20 A Matthews and D T Gethin, “Heating effects in ionisation assisted processes” Proc of theInternational Conference on Metallurgical Coatings, American Vacuum Society, San Diego,USA, April 1984 Thin Solid Films, 117, 261, (1984)

21 A Matthews and K G Swift, “Expert systems and coating selection” The Surfacing Journal,

25 A Matthews, “Developments in ionisation assisted processes” Proc of the InternationalConference on Metallurgical Coatings, Los Angeles, USA, 1985 Published in the Journal ofVacuum Science and Technology, A3, 2354, (1985)

26 A Matthews, “Plasma assisted coating processes - the background” UKAEA/NCT Reportfor the Department of Trade and Industry, (1984)

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27 A Matthews, “Plasma assisted coating processes - scientific and technical studies”.UKAEA/NCT Report for the Department of Trade and Industry, (1984).

28 A Matthews, “Plasma assisted coating processes - critical issues and future trends”.UKAEA/NCT Report for the Department of Trade and Industry, (1985)

29 A Matthews, J Valli, U Makela and V Murawa, “2TiN coating adhesion studies using thescratch test method” Proc of the International Conference on Metallurgical Coatings, LosAngeles, USA, 1985 Published in Journal of Vacuum Science and Technology, A3, 2411,(1985)

30 V Korotchenko, A Matthews and C S Syan, “Ceramics and cermets in surface engineering”.Proc of the 1st International Conference on Surface Engineering, Brighton, UK Published bythe Welding Institute, Abingdon, (1985)

31 V Korotchenko and A Matthews, “Substrate temperature monitoring in ionisation assistedprocesses” Proc of the International Conference on Ion and Plasma Assisted Processes,IPAT 85, Munich, W Germany, 1985 Vacuum TAIP, 36, 61, (1986)

32 A Matthews and J Valli, “Alumina and titanium carbide coatings deposited by ionisationassisted reactive physical vapour deposition” Proc of the Surtec 85 Conference -Interfinish, Berlin, W Germany, 1985 Published by Verein Deutscher Ingeniere (VDI)Dusseldorf, (1985)

33 H A Sundquist, A Matthews and J Valli, “Tribological coatings deposited by ion plating”.Proc of the 4th International Tribology Symposium - Eurotrib 85, Lyon France, (1985).Published by the International Tribology Council

34 A Matthews, “Titanium nitride PVD coating technology” Surface Engineering, 1, 93,(1985)

35 A Matthews, “Plasma assisted coating technology” Proc of the PACT Seminar, Wattington.UKAEA/DTI, (1985)

36 A Matthews and J Valli, “Ion plating - processes and limitations” Proc of the 5th AnnualElectroplating Conference, Los Angeles, California, 1985 American Electroplaters Society,Los Angeles

37 J Valli and A Matthews, “Coating adhesion assessment using the scratch test method” Proc

of the 5th Annual Electroplating Conference, Los Angeles, California, 1985 AmericanElectroplaters Society, Los Angeles

38 K G Swift, A Matthews, P Firth and C S Syan, “Artificial intelligence in engineeringdesign” Proc of the International Computer Aided Manufacturing Conference, Cam-i,Florida, USA, 1984

39 A Matthews and V Murawa, “Titanium nitride coatings extend tooling life” The CharteredMechanical Engineer, 32, 31, (1985)

40 J Valli, U Makela and A Matthews, “The assessment of coating adhesion” SurfaceEngineering, 2, 49, (1986)

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41 A Matthews, “Ion plating basics and applications” In Nitride and Carbide Coatings Manufacturing Technology Science and Applications Published by the ContinuingEducation Institute, Europe, Finspang, Sweden, 1985.

-42 A Matthews, “Ionisation assisted PVD processes - the problems remaining” Proc of theTopical Symposium on the Physics and Chemistry of Protective Coatings, Los Angeles,USA, 1985 American Vacuum Society, New York, 1986, ISBN 0-88318-348-X

43 K G Swift, A Matthews and C S Syan, “A logic based approach to problem solving inmanufacturing engineering” Proc of the SERC/ACME Seminar on Computers in ProcessPlanning, UMIST, Manchester, 1985

44 K G Swift, A Matthews and C S Syan, “The application of IKBS in design for assembly andsurface treatment selection” Proc of the 1st International Conference on the Application ofArtificial Intelligence to Engineering Problems, Southampton 1986 Published inComputational Mechanics, USA, 1986

45 A Matthews, “Ionisation assisted PVD processes and industrial applications” Proc of the

2nd International Conference on Physical Vapour Deposition, PVD 86, Darmstadt, WGermany, 1986

46 K S Fancey and A Matthews, “Ionisation assisted PVD of zirconia thermal barrier coatings”.Proc of the International Conference on Metallurgical Coatings, ICMD 86, San Diego, USA.J.Vac.Sci.Technol, A4, (6) 2656, (1986)

47 K G Swift, C S Syan and A Matthews, “The potential of IKBS in manufacturingengineering” Proc of the conference on the Application of Computers in ProductionEngineering, Edinburgh, 1986 IMechE/IProdE, London (1986)

48 A Matthews and K G Swift, “Expert systems to advise on design for manufacture” Proc ofthe Fintech AMT Seminar, Helsinki, Finland Published by DTI/Fintech 1986

49 A Matthews, “Advanced coating processes for manufacturing industry” Proc of the FintechAMT Seminar, Helsinki, Finland Published by DTI/Fintech 1986

50 K S Fancey, A S James and A Matthews, “The potential of PVD thermal barrier coatings”.Proc of the International Conference: `Engineering the Surface', London Institute of Metals,London, 1986

51 C S Syan, A Matthews and K G Swift, “Coating and treatment selection” SurfaceEngineering, 2, 249, (1986)

52 A S James, K S Fancey and A Matthews, “RF reactive ion plating of stabilised zirconiathermal barrier coatings” Proc of the International Symposium on Trends and NewApplications in Thin Films, Strasbourg, March 1987, Societe Francaise du Vide, Paris

53 A Matthews, A S James, A Leyland, K S Fancey, J Valli and J A Stainsby, “Tribologicalcharacterisation of some second generation ceramic coatings deposited by ionisation assistedPVD” Proc of Tribology 87, London, July 1987 Institution of Mechanical Engineers,London

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54 C S Syan, A Matthews and K G Swift, “Knowledge-based expert systems in surface coatingand treatment selection for wear reduction” Proc of the International Conference onMetallurgical Coatings, ICMC 87, San Diego, USA, March 1987 Surf Coat Technol, 33,105-115, (1987).

55 A S James, K S Fancey and A Matthews, “Thermionically assisted RF PAPVD of stabilisedzirconia thermal barrier coatings” Proc of the International Conference on MetallurgicalCoatings, ICMC 87, San Diego, USA, March 1987 Surf Coat Technol, 32, 377-387, (1987)

56 K S Fancey and A Matthews, “Current density and cathode fall effects in ion plating” Proc

of the International Conference on Ion and Plasma Assisted Techniques, IPAT 87, Brighton,May 1987 CEP Ltd., Edinburgh

57 Y Sun, P A Dearnley, A Matthews and T Bell, “A preliminary investigation of the wear ofplasma nitrided 722M24 steel under applied rolling-contact traction” ibid

58 K S Fancey and A Matthews, “Some fundamental aspects of glow discharges in plasmaassisted processes” Proc of the International Conference on Metallurgical Coatings, ICMC

87, San Diego, USA, March 1987 Surf Coat Technol, 33, 17-29, (1987)

59 A Matthews and J Valli, “Adhesion testing of coatings” Proc of the IFHT InternationalSeminar on Plasma Heat Treatment, Senlis, France, September 1987 InternationalFederation for the Heat Treatment of Materials, Paris

60 A Matthews, “Hard ceramic coatings” Engineering, December 1987, Technical File

61 A Matthews and K S Fancey, “Process mechanisms and control in ionisation assisteddeposition systems” Proc of the SERC Research Conference, Cambridge University, 1987

62 K G Swift, A Matthews and C S Syan, “Coating selection using IKBS” Proc of the SERCResearch Conference, Cambridge University, 1987

63 K S Fancey and A Matthews, “Ion plating process design criteria and systems optimisation”.Proc of the International Conference on Metallurgical Coatings, ICMC 88, San Diego, USA,April 1988 Published in Surface and Coatings Technology, 36, 233, (1988)

64 A Matthews, “Coating selection for wear reduction” Proc of the International Conference

on Materials and Engineering Design, London, May 1988 The Institute of Metals, London

65 A G Fitzgerald, M Simpson, G A Dederski, P A Moir, D Tither and A Matthews, “Triodetechnology in the sputter deposition of carbon films” Carbon, 26, 229-234, (1988)

66 A Matthews, “The role of physical vapour deposition as a manufacturing process”.Advanced Materials and Manufacturing Processes, 3, 91-105, (1988)

67 A Matthews, “Industrial processes and applications of physical vapour deposition” Proc ofthe 1st International Conference on Surface Modification Technologies, Pheonix, Arizona,Jan 1988 The Metallurgical Society/AIME, Warrandale, USA

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68 S J Bull, D S Rickerby, A Matthews, A Leyland, A R Pace and J Valli, “The use of scratchadhesion testing for the determination of interfacial adhesion: the importance of frictionaldrag” Proc of the International Conference on Metallurgical Coatings, ICMC 88, SanDiego, USA, April 1988 Surf Coat Technol, 36, 503, (1988).

69 K S Fancey and A Matthews, “Coating thickness and composition uniformity in plasmaassisted PVD” Proceeding of the Plasma Surface Engineering Conference PSE 88,Garmisch Partenkirchen, W Germany, September 1988 Deutsche Gesellschaft furMetallkunde e.V Oberursel, FRG

70 A Leyland, K S Fancey, T Bell, S C Kwon, M J Park and A Matthews, “Plasma nitriding:processes and mechanisms” Proc of the Plasma Surface Engineering Conference, PSE 88,Garmisch Partenkirchen, W Germany, September 1988 Deutsche Gesellschaft furMetallkunde e.V Oberursel, FRG

71 A S James and A Matthews, “Improvement of zirconia thermal barrier coatings by use ofplasma assisted physical vapour deposition” Proc of the Plasma Surface EngineeringConference, PSE 88, Garmisch Partenkirchen, W Germany, September 1988 ibid

72 A Matthews, “Methods for assessing coating adhesion” Proceeding of the Surfaces,Materiaux, Technologie Conference, Lyon, October 1988 Le Vide, les Couches Minces, No.Special, Octobre 1988, SFV, Paris

73 D Tither, A Matthews, A G Fitzgerald, R E Storey, A E Henderson, P A Moire, T J Dynes, D IBower, E L V Lewis, G Doughty and W Foster, “The characterisation of carbon filmscontaining boron and nitrogen” Carbon, 27, 4, 655, (1989)

74 A Matthews, “Diamond and carbon-based coatings” Proc of the 1989 European TribologyConference, EUROTRIB 89, Helsinki, Finland, June 1989 International Tribology Council,London

75 D S Rickerby and A Matthews, “Ceramic coatings by physical vapour deposition” Reviews

on Powder Metallurgy and Physical Ceramics, 4, 3-4, 155, (1991)

76 K S Fancey and A Matthews, “Metal clusters in ion plating” Applied Physics Letters, 55,

834, (1989)

77 D Tither, A Matthews, P John and J Wilson, “A perspective on Japanese patents on hardcarbon/diamond films and related subjects from 1967-1987” Surf Coat Technol, 38, 251,(1989)

78 A Matthews, “The role of computer systems in coating selection” Proc Seminar onChoosing the Right Engineering Surface, London, June 1989 The Welding Institute,Abingdon

79 A Matthews, “Advances in surface processing technology” Keynote Chapter in “Advances

in Surface Engineering - Processes, Fundamentals and Applications in Corrosion and Wear”.Edited by K N Strafford, P K Datta and J S Gray, Ellis Horwood, 1989

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80 A Matthews, “Surface engineering in cutting technology” Proc of the Institute of MetalsAutumn Meeting "A Cutting Edge for the 1990's", Sheffield, 1989 Institute of Metals,London.

81 A Matthews and W D Sproul, “Hard coatings by PVD techniques” Proc of the AVS ShortCourse, Boston, 24 October 1989 American Vacuum Society, New York

82 H Ronkainen, S Varjus, K Holmberg, K S Fancey, A R Pace, A Matthews, B Matthes and EBroszeit, “Coating evaluation methods: a round robin study” Proc of the 16th Leeds-LyonTribology Symposium, Lyon, France, September 1989 Elsevier Sequoia

83 A S James and A Matthews, “Thermal stability of PYSZ thermal barrier coatings deposited

by RF PAPVD” Presented at the International Conference on Metallurgical Coatings,ICMC 89, San Diego, USA, April 1989 Surf Coat Technol, 41, 305, (1990)

84 A Leyland, K S Fancey, A S James and A Matthews, “Enhanced plasma nitriding at lowpressures: a comparison between DC and RF techniques” Presented at the InternationalConference on Metallurgical Coatings, ICMC 89, San Diego, USA, April 1989 Surf CoatTechnol, 41, 295, (1990)

85 K S Fancey and A Matthews, “Process Effects in Ion Plating” Proc 11th InternationalVacuum Congress, Cologne, 1989 Published in Vacuum TAIP, 41, 7-9, 2196, (1990)

86 D Tither, A Dehbi, P Holiday, A Matthews, A G Fitzgerald, A E Henderson, B E Storey, T JDines, P John and J I B Wilson, “The characterisation of ultra-hard carbon films producedfrom pre-processed carbon powder in a hybrid physical vapour deposition system” Carbon,

28, 5, 641, (1990)

87 K S Fancey and A Matthews, “An Investigation into the Variation of Bombardment Intensityfrom Ion Plating Discharges by Sputter Weight Loss Experiments” Proc InternationalConference on Metallurgical Coatings, ICMC90, San Diego, USA, 1990 Thin Solid Films,193/194, 171, (1990)

88 H Ronkainen, K Holmberg, K S Fancey, A Matthews, B Matthew and E Broszeit,

“Comparative Tribological and Adhesion Studies of some Titanium-Based CeramicCoatings” Proc International Conference on Metallurgical Coatings ICMC90, San Diego,USA, 1990 Surf Coat Technol, 43/44, 888, (1990)

89 A S James and A Matthews, “Developments in RF Plasma Assisted PVD of PYSZ ThermalBarrier Coatings” Proc International Conference on Metallurgical Coatings ICMC90, SanDiego, USA, 1990 Surf Coat Technol, 43/44 436, (1990)

90 M J Park, A Leyland and A Matthews, “Corrosion Performance of Layered PVD Coatings”.Proc International Conference on Metallurgical Coatings ICMC90, San Diego, USA, 1990.Surf Coat Technol, 43/44, 481, (1990)

91 A Dehbi-Alaoui, A S James and A Matthews “A Comparison of the Properties of HardCarbon Films Produced by Direct Gas Deposition and by Plasma Assisted Evaporation”.Proc International Conference on Metallurgical Coatings ICMC 90, San Diego, USA, 1990.Surf Coat Technol, 43/44, 88, (1990)

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92 P A Robinson and A Matthews, “Characteristics of a Dual Purpose Cathodic Arc/MagnetronSputtering System” Proc International Conference on Metallurgical Coatings ICMC90, SanDiego, USA, 1990 Surf Coat Technol, 43/44, 288, (1990).

93 A Dehbi-Alaoui, A Matthews and J Franks, “The Optical and Mechanical Properties ofCarbon Films Grown Using a Fast Atom Beam Source” Proc Diamond Films 90, CransMontana, Switzerland, 1990 Surf Coat Technol, 47, 722, (1991)

94 A Dehbi-Alaoui, P Holiday and A Matthews, “Optical Properties of Carbon Films Depositedusing a Hybrid Physical Vapour Deposition Technique” ibid p327

95 P Holiday, A Dehbi-Alaoui and A Matthews, “Physical Properties of Carbon Films ProducedUsing a Hybrid Physical Vapour Deposition Technique” ibid p315

96 K S Fancey, P A Robinson, A Leyland, A S James and A Matthews, “A Coating ThicknessUniformity Model for PVD Systems - Further Validity Tests” Proc 2nd InternationalConference on Plasma Surface Engineering, PSE '90, Garmisch Partenkirchen, Germany,

1990 Materials Science and Engineering, A140, 576-582, (1991)

97 A S James, K S Fancey and A Matthews, “An Investigation into the Effects of PlasmaBombardment Anistropy in Low Frequency RF Glow Discharges” ibid 517-522

98 H Ronkainen, I Nieminen, K Holmberg, A Leyland, K S Fancey, A Matthews, B Matthes and

E Broszeit, “Evaluation of some New Titanium Based Ceramic Coatings in TribologicalModel Wear and Metal Cutting Tests” ibid 602-608

99 H Ronkainen, A Leyland and A Matthews, “A Comparative Study of the CorrosionPerformance of TiN and Ti(B,N) Coatings Produced by Plasma-Assisted EBPVD” ibid 722-726

100 A Matthews, K G Swift and P A Robinson, “Expert Systems in Surface Engineering”, ProcSurface Engineering and Heat Treatment Conference, London, 1990 The Institute of Metals,London

101 K S Fancey and A Matthews, “Evaporative Ion Plating: Process Mechanisms andOptimisation” IEEE Transactions on Plasma Science Vol 18, No 6, 869, (1990)

102 A Matthews, “New Research Centre in Surface Engineering at Hull University”, Editorial:Surface Engineering, 6, 73, (1990)

103 A Matthews, K S Fancey, A S James and A Leyland, “Developments in Plasma AssistedPhysical Vapour Deposition” Proc Surface Engineering Practice and Prospects, Adelaide,Australia, 1991 Surface Engineering: Processes and Applications, K N Strafford, R St CSmart, I Sare, C Subramanian (Eds), Technomic Publishing Co Lancaster, Pennsylvania,1995

104 H Ronkainen, I Nieminen, K Holmberg, A Leyland, A Matthews, B Matthes and E Broszeit,

“Evaluation of Some Titanium-based Ceramic Coatings on High Speed Steel Cutting Tools”.Proc of the International Conference on Metallurgical Coatings and Thin Films, ICMCTF'91, San Diego, USA, April 1991 Surf Coat Technol, 49, 468, (1992)

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105 B Matthes, E Broszeit, J Aromaa, H Ronkainen, S-P Hannula, A Leyland and A Matthews,

“Corrosion Performance of Some Titanium-Based Coatings” ibid, 49, 489, (1992)

106 P Holiday, A Dehbi-Alaoui and A Matthews, “A Comparison of Techniques for ProducingDiamond-like Carbon Coatings” Proc of the 1st ASM Heat Treatment and SurfaceEngineering Conference, Amsterdam, 22-24 May 1991, ASM International (Europe),Brussels Materials Science Forum, Vols: 102-104, 643-654, (1991)

107 A Leyland, P R Stevenson and A Matthews, “Tribological Performance of Plasma Treatedand Coated Surfaces” Proc of the 1st ASM Heat Treatment and Surface EngineeringConference, Amsterdam, 22-24 May 1991, ASM International (Europe), Brussels MaterialsScience Forum, Vols: 102-104, 615-622, (1991)

108 A S James and A Matthews, “Deposition of Stabilised Zirconia onto Metallic SubstratesUsing A DC Thermionic Triode Ion Plating Technique” Proc of the 1st ASM Heat Treatmentand Surface Engineering Conference, Amsterdam, 22-24 May 1991, ASM International(Europe), Brussels Materials Science Forum, Vols: 102-104, 633-642, (1991)

109 P Robinson and A Matthews, “Further Developments of the Multi-Mode Ionised VapourSource System” Proc of the 1st ASM Heat Treatment and Surface Engineering Conference,Amsterdam, 22-24 May 1991, ASM International (Europe), Brussels, Materials ScienceForum, Vols: 102-104, 581-590, (1991)

110 A Matthews, A Leyland, H Ronkainen, I Nieminen, K Holmberg, B Matthes and E Broszeit,

“Standardisation of Test Procedures in Surface Engineering” Proc Eurotech Direct '91,Birmingham, 2-4 July 1991, IMechE, London

111 A Matthews, “The Key to Success for Surface Engineering” Metals and Materials, March

1991, 150

112 H L Du, J S Gray, P K Datta, B Lewis and A Matthews, “Oxidation Behaviour of Certain Based Alloys Containing Refractory Metals” Proc Irish Materials Forum Conference IMF-

Co-7, Limerick, Ireland, September 1991

113 J S Gray, H L Du, P K Datta, A Matthews and B Lewis, “High Temperature Degradation ofNbN and ZrN Coated Nimonic and Inconel Superalloys in an Atmosphere of Low Oxygenand High Sulphur Potentials” Proc of Surf-Tec 91, 7-11 October, 1991 Paris, IITTInternational, Gournay sur Marce, 1991

114 J S Gray, H L Du, P K Datta, A Matthews and B Lewis, “High Temperature DegradationStudies for Diffusion Barrier Coatings for use in Ti-Based Metal Matrix composites” ibid

115 T J Dines, D Tither, A Dehbi-Alaoui and A Matthews, “Raman Spectra of Hard Carbon Fimsand Hard Carbon Films Containing Secondary Elements” Carbon, 29, 2, 225, (1991)

116 A Leyland, K S Fancey and A Matthews, “Plasma Nitriding in a Low Pressure TriodeDischarge to Provide Improvements in Adhesion and Load Support for Wear ResistantCoatings” Surface Engineering, 7, 207, (1991)

117 K S Fancey and A Matthews, “Determination of Electron Temperature in Ion PlatingDischarges by Optical Emission Spectroscopy” Vacuum, 42, 1013, (1991)

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118 K S Fancey, M Williams, A Leyland and A Matthews, “The Influence of Process SystemCharacteristics on the Uniformity of Ion Plated Titanium Nitride Coatings” Vacuum, 42,235-240 (1992).

119 H Ronkainen, I Nieminen, K Holmberg, A Leyland, A Matthews, B Matthes and E Broszeit,

“Development and Evaluation of New Titanium-Based Ceramic Coatings for Use inManufacturing Industry” Proc of MatTech 91, The 2nd European East-West Symposium onMaterials and Processes, 26-30 May, Espoo, Finland, 1991, IMST, Finland, 1991

120 J Smith, P Holiday, A Dehbi-Alaoui and A Matthews, “Characterisation of Diamond-LikeCarbon Films by Fine Scale Indentation and Topography Measurements” Proc of the 2nd

European Conference on Diamond, Diamond-like and Related Coatings, Nice, France, 2-6September 1991 Diamond and Related Materials, 1, 355, (1992)

121 A Dehbi-Alaoui and A Matthews, “Process Parameters and Directional Effects on theOptical Properties of Carbon Films Grown by Plasma Assisted PVD” Diamond and RelatedMaterials, 1, 355, 445, (1992)

122 A Matthews, A Leyland, K S Fancey, A S James, P A Robinson P Holiday, A Dehbi-Alaouiand P R Stevenson, “Developments in Plasma Assisted PVD Processing” Proc of 3rd

International Conference on Advances in Coatings and Surface Engineering for Corrosionand Wear, 11-15 May 1992, Newcastle-upon-Tyne Published in Surface Engineering, VolIII: Process Technology and Surface Analysis, P K Datta and J S Gray (Eds), Royal Society

of Chemistry, Cambridge, 99-110, (1993)

123 S J Bull and A Matthews, “Diamond for Wear and Corrosion Applications” Proc of theEuropean Diamond Technology for the 90's Workshop, Brussels, December 1991 Published

in Diamond and Related Materials, 1, 1049-1064, (1992)

124 P Stevenson, A Leyland, M Parkin and A Matthews, “The Effects of process parameters onplasma carbon diffusion of stainless steel at low pressures” Proc of the InternationalConference on Metallurgical Coatings and Thin Films, San Diego, USA, April 1992 Surf.Coat Technol 63, 135-143, (1994)

124 C V Cooper, P Holiday and A Matthews, “The effect of TiN interlayers on the indentationbehaviour of diamond-like -carbon films” Surf Coat Technol, 63, 129-134, (1994)

126 S Bennett, A Matthews, A J Perry, J Valli, S J Bull and W D Sproul, “Multipass scratchtesting at sub critical loads” Paper presented at ICMCTF '92 Tribologia, 13, 16-28, (1994)

127 A Dehbi-Alaoui, B Ollivier and A Matthews, “Evaluation of diamond-like carbon films onPET” Proc of the 11th International Conference on Vacuum Metallurgy, Antibes-Juan LesPins, May 1992, Societe Francaise du Vide, Paris, 221-226, (1992)

128 Y Bounouh, M L Theye, A Dehbi-Alaoui, A Matthews, J Cernogora, J L Fave, C Colliex, AGheorghia and C Senesmaud, “Influence of pi-bonded clusters on the electronic properties ofdiamond-like carbon films” Proc of the 3rd European Conference on Diamond, Diamond-like and Related Coatings, Heidelberg, Germany, September 1992 Diamond and RelatedMaterials, 2, 259-265, (1993)

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129 K S Fancey, S J Young, A S James and A Matthews, “The microstructural and thicknessuniformity of zirconia coatings produced by rf ion plating” Proceeding of the TwelfthInternational Vacuum Congress IVC-12, The Hague, The Netherlands, October 1992.Materials Science and Engineering, A163, 171-175, (1993).

130 B Ollivier and A Matthews, “Adhesion of diamond-like films on polymers: an assessment ofthe validity of the scratch test applied to flexible substrates” Proc of the InternationalSymposium on Adhesion Measurement of Films and Coatings, Boston, USA, December

1992 Published in J Adhesion Sci and Technol, 8 651-662, (1994)

131 A S James and A Matthews, “A practical model to enable the prediction of coating thicknessvariation across a flat surface” Proc of the 3rd Int Conf on Plasma Surface Engineering,Garmisch Partenkirchen, Germany, October 1992 Surf Coat Technol, 59, 48-53, (1993)

132 A S James and A Matthews, “Calculation of ion energy distributions in low frequency rfglow discharges” Surf Coat Technol, 59, 86-90, (1993)

133 D B Lewis A Leyland, P R Stevenson, J S Cawley and A Matthews, “Metallurgical study oflow temperature plasma carbon diffusion treatments for stainless steels” Surf Coat Technol,

136 J Robson, A S James, B Lewis and A Matthews, “The deposition of Yttria partially stabilisedzirconia (PYSZ) onto aluminium alloy substrates using PVD techniques” Surf CoatTechnol, 60, 536-540, (1993)

137 A Matthews, (with K Holmberg and S Franklin), “A methodology for coating selection”.Proc of the 19th Leeds-Lyon Symposium on Tribology, Leeds, September 1992, Thin Films inTribology, D Dowson et al (Eds), Elsevier, Amsterdam, 429-439, (1993)

138 A Matthews (with K Holmberg and H Ronkainen), “Wear mechanisms of coated slidingsurfaces” Proc of the 19th Leeds-Lyon Symposium on Tribology, Leeds, September 1992,Thin Films in Tribology, D Dowson et al (Eds), Elsevier, Amsterdam, 399-407, (1993)

139 A Matthews (with K Holmberg), “Measurement of mechanical properties of thin films II:friction and wear” Advanced Techniques for Surface Engineering, W Gissler and H Jehn,Kluwer Academic Publishers, 1992

140 A Wilson, A Matthews (with J Housden, R Turner, B Garside), “A comparison of the wearand fatigue properties of plasma assisted PVD TiN, CrN and duplex coatings on Ti-6Al-4V”.Proc of the Int Conf on Metallurgical Coatings and Thin Films, San Diego, USA, April

1993 Published in Surf Coat Technol., 61, 600-607, (1993)

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141 A Leyland, D B Lewis, P R Stevenson and A Matthews, “Low temperature plasma diffusiontreatment of stainless steels for improved wear resistance” Surf Coat Technol, 61, 608-617,(1993).

142 A Matthews, K S Fancey, A S James and A Leyland, “Ionisation in plasma assisted PVDsystems” .Surf Coat Technol, 61, 121-126, (1993)

143 P A Robinson, A Matthews and K G Swift “A knowledge based computer system forsurface coating and material selection”, ibid Published in Surf Coat Technol., 61, 662-668,(1993)

144 A S James and A Matthews, “A simple model for the prediction of coating thicknessuniformity from limited measured data” .Surf Coat Technol, 61, 282-286, (1993)

145 A Matthews, K G Swift and P A Robinson, “Selecting engineering coatings: a based approach” Finishing, Vol 17, No 10, 26-29, (1993)

computer-146 A Matthews, D Palicki (with W Durholt, A J Perry and J Vetter), “The economics of runningPVD equipment in-house” Finishing, Vol 17, No 10, 34-36, (1993)

147 D Palicki and A Matthews, “Developments in magnetron sputtering” Finishing, Vol 17, No

10, 36-38, (1993)

148 A Matthews and A Leyland, “Plasma processing for enhanced wear and corrosionperformance” Proc of the 2nd ASM Heat Treatment and Surface Engineering Conference inEurope, Dortmund, Germany, June 1993 Materials Science Forum Vol 163-166, 497-508,(1994)

149 K Holmberg and A Matthews, “On the tribology of coatings” Proc of the 6th InternationalCongress on Tribology - EUROTRIB '93, Budapest, Hungary, Aug/Sept 1993

150 A Matthews (with S S Eskildsen), “Engineering applications for diamond-like carbon” Proc

of the 4th European Conference on Diamond, Diamond-like and Related Materials, Sept

20-24 1993, Albufeira, Portugal Published in Diamond and Related Materials., 3, 902-911,(1994)

151 A Matthews, A Leyland and A S James, “Plasma assisted PVD and Duplex treatments”.Paper presented at the International Workshop on Surface Engineering, July 28-30, 1993,Rio de Janeiro, Brazil

152 A Matthews, A Leyland and P Stevenson, “Widening the market for advanced PVDcoatings” Proc of the International Conference on Advances in Materials and ProcessingTechnologies (AMPT 93), Dublin, 24-27 August 1993 Dublin City University, 1993, 2123-

2129 Published in J Mat Processing Tech., 56, 760-766, (1996)

153 A Matthews (with W Durholt, J Vetter and A J Perry), “Industrial Hard Coatings” Proc ofthe 9th International Colloquium on Plasma Processes, June 6-10 1993, Juan Les Pins,France, Société Francaise du Vide, Paris, 417-419, (1993)

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154 A S James and A Matthews, “Ceramic Surface Engineering” Ceramic TechnologyInternational 1995, Ed I Birkby, Sterling Publications, London, ISSN 0964-9735, 68-70,(1994)

155 A Leyland and A Matthews, “Thick Ti/TiN Multilayered Coatings for Abrasive and ErosiveWear Resistance” Surf Coat Technol, 70, 19-25, (1994)

156 A A Voevodin, C Rebholz and A Matthews, “Comparative Tribology Studies of HardCeramic and Composite Metal-DLC Coatings in Sliding Friction Conditions” Proc of the

50th Annual Meeting of the Society of Tribologists and Lubrication Engineers, Chicago,USA, May 14-19 1995 Tribology Transactions, The Society of Tribologists and LubricationEngineers, Vol 38, 829-836, (1995)

157 A A Voevodin, P Stevenson, C Rebholz, J M Schneider and A Matthews, “Active Process

Control of Reactive Sputter Deposition” Vacuum, 46, 723-729, (1995)

158 A A Voevodin, J M Schneider, C Rebholz and A Matthews, “Multilayer Composite Metal-DLC Coatings for Sliding Wear Applications” Tribology International, 26, 559-570,(1996)

Ceramic-159 A Dehbi-Alaoui and A Matthews, “Diamond-Like Carbon Films Grown in a NewConfiguration for Filament Enhanced Plasma Assisted CVD” Vacuum, Vol 46, 1305-1309,(1995)

160 A A Voevodin, R Bantle and A Matthews, “Dynamic Impact Wear of Ti Cx Ny and Ti-DLCComposite Coatings” Wear; 185, 151-157, (1995)

161 A A Voevodin, J M Schneider, C Caperaa, P Stevenson and A Matthews, “Studies of AtomBeams Produced by a Saddle Field Source Used for Depositing Diamond-Like Carbon Films

on Glass” Vacuum, 46, 299-303, (1995)

162 B Ollivier, S J Dowey, S J Young and A Matthews, “Adhesion Assessment of DLC films onPET using a simple tensile tester: comparison of different theories” J Adhesion Sci andTechnol, 9, 769-784, (1995)

163 B Ollivier and A Matthews, “Relationship between Interlayer hardness and adhesion and Pin

on Disc behaviour for FAB source DLC films” J Adhesion Science and Technology, 9,

725-736, (1995)

164 A Matthews (with K Holmberg), “Coatings Tribology: A Concept, Critical Aspects andFuture Directions” International Conference on Metallurgical Coatings and Thin Films, SanDiego, USA, April 25-29, 1994 Thin Solid Films, 253, 173-178, (1994)

165 A Matthews and A Leyland, “Hybrid Techniques in Surface Engineering” Proc of the 2nd

International Conference on Surface Engineering, Adelaide, 7-10 March 1994, University ofSouth Australia Surf Coat Technol, 71, 88-92, (1995)

166 A Matthews and A Leyland, “Variability in Coatings and Test Results” Proc of the 2nd

International Conference on Surface Engineering, Adelaide, 7-10 March 1994, University ofSouth Australia

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167 A A Voevodin, C Rebholz, J M Schneider, P S Stevenson and A Matthews, “Wear ResistanceComposite Coatings Deposited by Unbalanced Closed Field Magnetron Sputtering”.International Conference on Metallurgical Coatings and Thin Films, San Diego, USA, April25-29, 1994 Surf Coat Technol, 73, 185-197, (1995).

168 J M Schneider, A A Voevodin, C Rebholz, A Matthews, J H C Hogg, M Ives and D B Lewis,

“X-ray Diffraction Studies of Magnetron Sputtered Titanium Carbo-nitride Coatings”.Presented at the 4th International Conference on Plasma Surface Engineering, GarmischPartenkirchen, Germany, September 1994 Surf Coat Technol, 74-75, 312-319, (1995)

169 S J Young, A S James and A Matthews, “An Investigation into the Thickness and CoatingStructure Uniformity of Zirconia Films on Flat Substrates” Presented at the 4th

International Conference on Plasma Surface Engineering, Garmisch Partenkirchen, Germany,September 1994 Surf Coat Technol, 74-75, 147-154, (1995)

170 S J Young, A S James and A Matthews, “Investigation on the Sputtering Effects on rf PlasmaProcessing” Presented at the 4th International Conference on Plasma Surface Engineering,Garmisch Partenkirchen, Germany, September 1994 Surf Coat Technol, 74-75, 206-211,(1995)

171 A S James, S J Young and A Matthews, “An Investigation into the Use of a Simple Model forThickness Uniformity on Horizontal Surfaces to Describe Thickness Variations on VerticalSubstrates” Presented at the 4th International Conference on Plasma Surface Engineering,Garmisch Partenkirchen, Germany, September 1994 Surf Coat Technol, 74-75, 306-311,(1995)

172 C Nørgård and A Matthews (with S S Eskildsen), “The Influence of Nucleation Density andOriented Growth on the Surface Roughness of Diamond Films” Presented at the 4th

International Conference on Plasma Surface Engineering, Garmisch Partenkirchen, Germany,September 1994 Surf Coat Technol, 74-75, 358-361, (1995)

173 S J Dowey, K M Read, K S Fancey and A Matthews, “The Penetration into Blind Holes ofDiamond-Like Carbon Films Produced by rf Plasma Assisted CVD” Presented at the 4th

International Conference on Plasma Surface Engineering, Garmisch Partenkirchen, Germany,September 1994 Surf Coat Technol, 74-75, 710-716, (1995)

174 P Stevenson and A Matthews, “PVD Equipment Design- Concepts for Increased ThroughputProduction” Presented at the 4th International Conference on Plasma Surface Engineering,Garmisch Partenkirchen, Germany, September 1994 Surf Coat Technol, 74-75, 770-780,(1995)

175 R Bantle and A Matthews, “Development and Evaluation of an Impact Tester for CoatingAssessment” Presented at the 4th International Conference on Plasma Surface Engineering,Garmisch Partenkirchen, Germany, September 1994 Surf Coat Technol, 74-75, 857-868,(1995)

176 S Bennett and A Matthews, “A Multi-Function Scratch Tester” Presented at the 4th

International Conference on Plasma Surface Engineering, Garmisch Partenkirchen, Germany,September 1994 Surf Coat Technol, 74-75, 869-876, (1995)

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177 J M Schneider, A A Voevodin, C Rebholz and A Matthews, “Microstructural Effects onTribological Properties of Electron Enhanced Magnetron Sputtered Coatings” Presented atthe 41st National Symposium of the American Vacuum Society, Denver, USA, October, 1994.

J Vac Sci Technol, A13, 2189-2193, (1995)

178 A Matthews, A Leyland, B Dorn, P Stevenson, M Bin-Sudin, C Rebholz, A A Voevodin and AMatthews,“Plasma-based Surface Engineering Processes for Wear and CorrosionProtection” ibid J Vac Sci Technol, A13, 1202-1207, (1995)

179 C Bowden and A Matthews, “A Study of the Corrosion Properties of PVD Zn-Ni Coatings”.Presented at the Int Conf on Metallurgical Coatings and Thin Films, San Diego, USA, April

1995 Published in Surf Coat Technol., 76-77, 508-515, (1995)

180 C Liu, A Leyland and A Matthews, “Electrochemical Impedance Spectroscopy on Mild Steeland AISI 316 Substrates” Presented at the Int Conf on Metallurgical Coatings and ThinFilms, San Diego, USA, April 1995 Surf Coat Technol, 76-77, 615-622, (1995)

181 C Liu, A Leyland, S Lyon and A Matthews, “An AC Impedance Study on PVD CrN-CoatedMild Steel With Different Surface Roughnesses” Presented at the Int Conf onMetallurgical Coatings and Thin Films, San Diego, USA, April 1995 Surf Coat Technol, 76-

77, 623-631, (1995)

182 K S Fancey, A Leyland, D Egerton, D Torres and A Matthews, “The Influence of Process-gasCharacteristics on the Properties of Plasma-nitrided Steel” Presented at the Int Conf onMetallurgical Coatings and Thin Films, San Diego, USA, April 1995 Surf Coat Technol, 76-

186 J M Schneider, C Rebholz, A A Voevodin, A Leyland and A Matthews, “Deposition andCharacterization of Nitrogen Containing Stainless Steel Coatings Prepared by ReactiveMagnetron Sputtering” Vacuum, 47, 1077-1080, (1996)

187 J M Schneider, W D Sproul A R T Lefkow, A Matthews, M E Graham and J Rechner,

“Scaleable Process for Pulsed DC Magnetron Sputtering of Non-conducting Oxides” Proc

of the SVC Conference, 5-10 May 1996, Philadelphia, SVC, Albuquerque, 1996

188 J M Schneider, A A Voevodin, M S Wong, W D Sproul and A Matthews, “Deposition andCharacterisation of Alumina Hard Coatings by dc Pulsed Magnetron Sputtering” Presented

at ICMC’96, San Diego, USA Surf Coat Technol, 96, 262-266, (1997)

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189 A A Voevodin, J M Schneider, C Caperaa, P Stevenson and A Matthews, “Characteristics of aSaddle Field Source for Deposition of Diamond-like Carbon Films” Ceramics International,

22, 1-5, (1996)

190 H L Du, P K Datta, J S Burnell-Gray, A S James and A Matthews, “Use of PVD DepositedTiN Coating in Retarding High Temperature Sulphidation” Surf Coat Technol, 81, 151-158,(1996)

191 M Bin-Sudin, A Leyland, A S James, A Matthews, J Housden and B Garside, “SubstrateSurface Finish Effects in Duplex Coatings of PAPVD TiN and CrN with Electroless Nickel-Phosphorus Interlayers” Surf Coat Technol, 81, 215-224, (1996)

192 A Matthews, “Plasma Based Vacuum Deposition Processes to Enhance Wear and CorrosionPerformance” Paper presented at the NATO Advanced Research Workshop on ProtectiveCoatings and Thin Films, Alvor, Portugal, 30 May-5 June 1996 Protective Coatings andThin Films, Y Pauleau and P B Barna (Eds), Kluwer Academic Publishers, Dordecht, 1997

193 K-T Rie, E Menthe, A Matthews, K O Legg, and J Chin, “Plasma Surface Engineering ofMetals” MRS Bulletin, 21, 46-51, (1996)

194 P S Stevenson and A Matthews, “Economic and Design Aspects for Continuous PVDCoating Systems which Provide High Throughput” Surf Coat Technol, 93, 142-149, (1997)

195 J M Schneider, W D Sproul and A Matthews “Reactive Ionised Magnetron Sputtering ofCrystalline Alumina Coatings” Surf Coat Technol, 98, 1473-1476, (1998)

196 A Matthews, “Overview of Surface Engineering Technologies” Surface EngineeringCasebook, J S Burnell-Gray and P K Datta (Eds), Woodhead Publishing, Cambridge, 1996

197 A Matthews and P Holiday, “The UK Surface Engineering Scene” Proc of the Workshop onInternational Perspectives in Surface Engineering”, Garmisch Partenkirchen, Germany, 10September 1996 VDI, Dusseldorf, 1997

198 J M Schneider, W D Sproul, A A Voevodin and A Matthews, “Crystalline Alumina Deposited

at Low Temperatures by Ionised Magnetron Sputtering” Presented at the 43rd AmericanVacuum Society National Symposium, Philadelphia, USA, October 1996 J Vac Sci Technol,A15(3), 1084-1088, (1997)

199 H Ziegele, C Rebholz, A A Voevodin, A Leyland, S L Rohde and A Matthews, “Studies of theTribological and Mechanical Properties of Laminated CrC-SiC Coatings Produced by rf and

dc Sputtering” Tribology International, 30, 845-856, (1997)

200 C Rebholz, H Ziegele, A A Voevodin, J M Schneider and A Matthews, “Composite Metal/Metal-Carbide Coatings Produced by Electron Enhanced Unbalanced MagnetronSputtering” Surface Engineering, 13, 375-383, (1997)

DLC-201 A Matthews, S J Young, M Joseph, C Rebholz, J M Schneider and S J Dowey, “PartiallyYttria-Stabilized Zirconia Coatings Produced Under Plasma-Assisted EBPVD With BipolarPulsed Bias and Under Electron Bombardment-Assisted Positive Bias Conditions” Proc ofthe Int Conf on Metallurgical Coatings and Thin Films, San Diego, USA, April 1997 SurfCoat Technol, 94-95, 123-130, (1997)

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202 I Grimberg, V N Zhitomirsky, N Parkansky, A Matthews, A Wilson, R L Boxman, B Z Weissand S Goldsmith, “Structure and Tribological Properties of Thin Vacuum Arc Coatings onPolysulfone” Surf Coat Technol, 94-95, 179-183, (1997).

203 J M Schneider, W D Sproul, J Sellers and A Matthews, “Alumina-Chromia CoatingsDeposited by Reactive Magnetron Sputtering” Proc of the Society of Vacuum CoatersConference, New Orleans, USA, April, 1997 Pages 301-303, SVC, Albuquerque, 1997

204 A Matthews and A Leyland, “Variability in Coatings and Test Results” Quality Control andAssurance in Advanced Surface Engineering, Inst of Materials, Publication B678, London1997

205 S Neuville and A Matthews, “Hard Carbon Coatings: The Way Forward” MRS Bulletin, 22,22-26, (1997)

206 J M Schneider, W D Sproul and A Matthews, “Phase Formation and Mechanical Properties

of Alumina Coatings Prepared at Substrate Temperatures Less Than 500°C by Ionised andConventional Sputtering” Surf Coat Technol, 94-95, 179-183, (1997)

207 K Holmberg, A Matthews and H Ronkainen, “Coatings Tribology - Contact Mechanisms andSurface Design” Proc of the World Tribology Conference, London, 8-12 September 1997,MEP, 1997 Tribology International, 31, 11-3, 107-120, (1998)

208 A Matthews and P Holiday, “The Surface Engineering Market”, Executive Engineer, 5,

14-16, (1997)

209 A Matthews, S J Young, S J Dowey, M Joseph, A Leyland, G Fisher, P K Datta and JBurnell-Gray, “Properties of Electron Bombardment Assisted EBPVD PYSZ TBC’s” Proc

of the High Temperature Surface Engineering Conference, Edinburgh, 23-25 September

1997, The Institute of Materials, 261-264, (1997)

210 A S James and A Matthews, “A Mass Spectroscopy Study of the Electron Beam Evaporation

of Yttria Partially Stabilised Zirconia (PYSZ)” Proc of the High Temperature SurfaceEngineering Conference, Edinburgh, 23-25 September 1997, The Institute of Materials, 283-

292, (1997)

211 I Grimberg, V N Zhitomirsky, N Parkansky, A Matthews, A Wilson, R L Boxman, B Z Weissand S Goldsmith, “Vacuum Arc Deposition of Thin Metallic and Nitride Coatings onPolysulfone” Proc of the Eight Israel Materials Conference IMEC VIII, Beer Sheva, Israel,16-17 April 1997

212 K Holmberg, A Matthews and H Ronkainen, “The Tribological Mechanisms of CoatedSurfaces” International Conference on Industrial Tribology, ICIT 1997, Plenary Paper,Calcutta, India, 2-5 December 1997, Balmer Lawrie, India, 1997

213 C Rebholz, H Ziegele, A Leyland and A Matthews, “Structure, mechanical and tribologicalproperties of Ti-B-N and Ti-Al-B-N thin films produced by electron beam evaporation”.Proc 44th AVS National Symposium, San Jose, California, USA, October 1997 Journal ofVacuum Science and Technology A 6/5, 2851, (1998)

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