fabrication of mems and nems

... 14 (c)) Fig 14 SEM images of trenches laser micromachined at different focus offset planes: (a) small offset of 300 μm; (b) optimal offset of 450 μm; (c) large offset of 600 μm The pulse energy, ... Institute of Physics) A number of factors affect the quality of trenches In our study, five laser parameters (focus offset, pulse energy, pulse repetition rate, scan speed and number of scan passes) and ... The expanded and collimated beam was guided by several laser mirrors and focused onto a piece of GaN-on-sapphire sample (emission wavelength = 470 nm, thickness of GaN = 3 μm and thickness of sapphire

Ngày tải lên: 21/06/2014, 02:20

... by Hitachi with lengths of 1, 2 and 3 mm and a diameter of 0.4 mm For the first two tools, 36.000 rpm and a feed rate of 1800 mm/min were applied The infeeds were 0.03 and 0.021 mm, respectively ... coefficient of expansion of 23*E-06/K of aluminum For this reason, we changed the original clamping of an older machine by one made of Invar (=1.7*E-06/K) Other suppliers use granite and a portal ... Ra-values are in the range of 0.2 µm Typically for micro milling, Rt is 7-10 times higher than Ra, namely in the range of 1-2 µm 4.2 CAM-software and machine controller issues Often, the CAM routines

Ngày tải lên: 21/06/2014, 02:20

... of this study, which comprises etching and mechanics simulations and the etching of the resulting designs It should be noted that the designs presented are of micro-hotplates with general applications, ... time With this motivation in mind, a study of alternatives for the geometry of the micro-hotplate follows, directed to the reduction of the etching time and the corresponding effects These Trang ... section and the multiple planes present at the vertices of the membrane and the supporting arms 4.2 Mechanical simulations Based in a finite element analysis made with COMSOL, the behaviour of the

Ngày tải lên: 21/06/2014, 02:20

... the precision and quality of cuts. The flexibility of PC programming incorporates the versatility of waterjet technology very well, and the integration of modern PC-based software and hardware ... (PNNL), and National Institute of Standards and Technology (NIST). [...]... and cut quality For example, the kerf width of a slot and/ or the 222 Micromachining Techniques for Fabrication ... used. The advent of personal computing has led to the development of PC-based “smart” software programs for controlling the operations of most modern AWJ systems and a host of accessories for

Ngày tải lên: 21/06/2014, 02:20

... micromachining of glass ECSMM is a strong candidate for microfabrication utilizing the best of electrochemical machining (ECM) and electro discharge machining (EDM) together Applications of ECS for microfabrication ... 08-02, 09-02, and 10-02 Any opinions, findings, and conclusions or recommendations expressed in this material are those of the authors and do not necessarily reflect the views of the NSF and PNNL ... thickness of the part in millimeters Details of small features on the order of 100 µm in size remain sharp and crisp There is no delamination or chipping on the edges The thickness of the wheel of the

Ngày tải lên: 21/06/2014, 02:20

... Dixit, P.M and Pandey, P.M (1999) On the analysis of electro chemical spark machining process’, Int J of Machine Tools and Manufacture, Vol 39, pp.165–186 Kulkarni, A V., Jain, V.K and Misra, ... (microchannels and microholes) of metals and non-metals, Int J Manufacturing Technology and Management, vol 22, no 2, 107-123 Kulkarni A V., Jain V K., and Misra K A., (2010c) Development of a Novel ... efficiency of the process and surface finish 7 Acknowledgements I am indebted to Prof V K Jain for his immense guidance and support throughout my academic life at IIT Kanpur I am thankful to Prof K

Ngày tải lên: 21/06/2014, 02:20

... field of MEMS is very promising and much work is needed in the following areas: 1. The interdisciplinary nature of MEMS and the difficulties that face researchers and designers in this ever expanding ... for Fabrication of Micro and Nano. ..Modeling and Simulation of MEMS Components: Challenges and Possible Solutions 299 Available from: http://academic.research.microsoft.com/publication/11448778 ... Microsensors,... and Simulation of RF MEMS Switches Proceedings of the 4th International Symposium on MEMS and 300 Micromachining Techniques for Fabrication of Micro and Nano Structures

Ngày tải lên: 21/06/2014, 02:20

... Trang 1FABRICATION OF COST-EFFECTIVE AND FLEXIBLEPOLYMER NANOSTRUCTURED SUBSTRATE FOR BIO-AND MAGNETIC APPLICATIONS LI BIHAN NATIONAL UNIVERSITY OF SINGAPORE 2014 Trang 2Fabrication of Cost-effective ... techniques ofpolymer materials and reports the results of the fabrication of PET nanostructures bythe laser interference lithography and plasma etching techniques The fabrication ofPET nanogrooves by O2plasma ... substrate The effects ofsurface roughness and grain size of the PET substrate and the reflective gold (Au)layer on top of the PET substrate on the magnetic properties of the films and nanodiscarrays

Ngày tải lên: 09/09/2015, 11:21

... depth The penetration depth and the end of range of proton beams in different materials are determined by the proton beam energy The end of range of protons and the profile of the penetration path ... Schematic diagram of the fabrication process 116 Figure 7.2 Surface plots of the simulated reflectance of the Bragg reflectors as a function of wavelength and angles, in the TE and TM polarizations ... of the waveguides irradiated with fluences of (a) 7×1013, (b) Trang 15Figure 5.9 SEM image of the (a) top and (b) cross-sectional view of the waveguides A close up of a waveguide (c) before and

Ngày tải lên: 09/09/2015, 11:21

... and right columns LCP and RCP are depicted in red and blue, respectively (A) slightly less than one pitch of left-handed helices, (B) two pitches of left-handed helices, and (C) two pitches of ... basic properties of metamaterials, and reviews some of the recent developments in metamaterial research and fabrication techniques Chapter 3 and Chapter 4 form the second part of the thesis, the ... and form a right-handed triplet of vectors in the case of ε > 0 and µ >0 In contrast, when ε < 0 and µ <0, they are connected left-handedly, hence the term left-handed materials (LHMs)

Ngày tải lên: 09/09/2015, 18:50

... 1DEVELOPMENT AND FABRICATION OF THIN FILM COMPOSITE (TFC) MEMBRANES FOR ENGINEERED OSMOSIS PROCESSES HAN GANG NATIONAL UNIVERSITY OF SINGAPORE Trang 2DEVELOPMENT AND FABRICATION OF THIN FILM ... research scholarship offered by the National University of Singapore (NUS), Singapore NUS and the Department of Chemical and Biomolecular Engineering provided me good facilities and professional atmosphere ... techniques and professional suggestions Special appreciation is also extended to the postgraduate committee, department head Prof Lee Jimyang and the lab officers, Mrs Lin Hueyyi, Mr Sim Yihui, and

Ngày tải lên: 10/09/2015, 09:02

... dimension of sample grating used for this calculation has a period of 150nm, grating height of 120nm and duty cycle of 0.5.………65 Figure 4-3 The effects of the oxide layer on the properties of an ... wish to express my sincere appreciations to Prof C.A Ross, Prof C.C Wong, Prof C.V Thompson and Prof W.K Choi for sharing their insightful opinions and suggestions with me throughout my PhD life ... by SMA and to all administrative staffs Trang 3Table of Contents SUMMARY I LIST OF FIGURES III CHAPTER 1: INTRODUCTION 1 1.1 Background of the project 1 1.1.1 Historical and state-of-the

Ngày tải lên: 10/09/2015, 15:53

... one of the ways to beat the diffraction limit of light and is capable of much higher patterning resolution On the other hand, the key limitation of EBL is... Science of Microfabrication, ... staff at Department of Chemistry and research scholarship provided by NUS. Lastly and most importantly I want to thank my father and mother. The support and love they provided and faith they instilled ... nanoimprinting skills and Mr Wulf Hofbauer for his assistance in the liquid atomic force microscopy. i The National University of Singapore (NUS) and Institute of Materials Research and Engineering

Ngày tải lên: 11/09/2015, 10:01

... The concept of the fabrication of a h-µSIL The hemispherical centre of the h-µSIL is offset to the back of the glass substrate Fig 4.12 SEM image of the fabricated h-µSIL Fig 4.13 Plot of the measured ... shows the presence of Cu, C, O, and Si Fig 2.9(b) Narrow scan of the Cu2p peak The position of the Cu2p1/2 and Cu2p3/2 shows the presence of metallic Cu Fig 2.10 Microscopic view of the glass surface ... 1LASER MICROPROCESSING AND FABRICATION OF STRUCTURES ON GLASS SUBSTRATES HUANG ZHIQIANG NATIONAL UNIVERSITY OF SINGAPORE 2010 Trang 2LASER MICROPROCESSING AND FABRICATION OF STRUCTURES ON GLASS

Ngày tải lên: 11/09/2015, 10:06

... strand B Lane P1 and Q1 correspond to the conjugates bearing 5 strands of digested Strand A and Stand B respectively; Lane P2 and Q2 correspond to conjugates bearing 5 strands of intact Strand ... specific number of short DNA Figure A1 Complete sequences of Strand A’ and Strand revA’ 155 Figure A2 Complete sequences of Strand C’, Strand revC1’ and Strand revC2’ 156 Trang 18Metallic and semiconductive ... Hybridization efficiency of pure DNA (strand A and strand revA with different ratios of target DNA) Lanes 9-13 and 6 correspond to strand A & strand revA with target DNA at a ratio of 1:1:0.2, 1:1:0.4,

Ngày tải lên: 12/09/2015, 11:29

... exploration and development of new nanofabrication techniques A number of new and unconventional methods have been explored to circumvent the technical and financial limitations of conventional ... (c) Plot of total dose distribution as a result of the superposition of the two exposures of equal amplitude (d) A three dimensional view of plot c, showing the peak, saddle, and minimum of the ... 1FABRICATION OF LARGE AREA AND PRECISELY LOCATED NANOSTRUCTURES ON SILICON BY INTERFERENCE LITHOGRAPHY LIEW TZE HAW NATIONAL UNIVERSITY OF SINGAPORE 2009 Trang 2FABRICATION OF LARGE AREA AND

Ngày tải lên: 12/09/2015, 11:29

... Plot of the simulated interstitial dose in the NEOR region (for the 10 keV Si+ PAI sample) as a function of melt depth 87 6.13 SIMS profile of boron and simulated profiles of boron ions and excess ... encouragement and invaluable guidance throughout the course of this work 2 A/Prof Andrew Wee Thye Shen of the Department of Physics, National University of Singapore (NUS), project co-supervisor He is especially ... generations of semiconductor devices Trang 11LIST OF TABLES2.1 Optical (at λ = 248 nm) and thermophysical properties of c-Si 202.2 Optical (at λ = 248 nm) and thermophysical properties of a-Si 215.1

Ngày tải lên: 12/09/2015, 11:29

... Design of Flow 99 5.1.2 Design of Actuation Mechanism 107 5.2 Experimental Methods 115 5.2.1 Microfabrication Process of Hollow Microneedle Array 115 5.2.2 Microfabrication Process of Glass ... Model of Fracture Forces 79 4.2.1 Analysis of Bending Force 81 4.2.2 Analysis of Buckling Force 85 4.3 Testing of Fabricated Microneedles 88 4.4 Discussion 94 CHAPTER 5 DESIGN AND FABRICATION OF ... Motivation of Research on Microneedle 2 1.1.2 Specific Applications of Microneedle in Drug and Gene Delivery 4 1.2 Overview of Microfabrication Technology 7 1.3 Thesis Objectives 8 CHAPTER 2 REVIEW OF

Ngày tải lên: 14/09/2015, 11:17

... (MEMS) . MEMS usually consist of three major parts: sensors, actuators, and an associate electronic circuitry that acts as the brain and controller of the whole system. There are two types of ... and methods of micro/nano fabrications from esteemed researchers and scientists. The book consists of 13 chapters. The first two chapters demonstrate fabrication of several micro and nano devices ... few reports of the fabrication of nano-structured materials, nano devices, and hierarchical nano-sized patterns with a 100 nm distance using a focused ion beam (FIB). Fabrication of graphene...

Ngày tải lên: 21/06/2014, 02:20