... Heat andmotion can be communicated So can strength and weakness and disease He cites other examples andcomments on the manifold manifestations and puzzling features of communication in man’s ... either x or y will change x’ to a new and appropriate number, and changing x’ will change x and y To each point x,y in the square corresponds just one point x’ on the line, and to each point x’ on ... our human nature and activities,which can be grouped together and understood Such understanding is an ability to see whatcomplicated or diverse events really do have in common (the planets in...
Ngày tải lên: 11/06/2014, 12:05
... guidance and personal navigation Distributed unattended sensors for asset tracking, and environmental and security surveillance Weapons safing, arming, and fusing Integrated microoptomechanical ... thanks to miniature read and write heads And finally, as the patient went to sleep, an array of micromirrors projected a pleasant high-definition television image onto a suspended screen Many ... support and encouragement of col-leagues, friends, and family members This book is no exception I am grateful to Al Pisano for his general support and for recognizing the value of an introductory...
Ngày tải lên: 10/08/2014, 01:22
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 3 pps
... sensors and actuators were... 1,000ºC, Basic Process Tools 39 both PSG and BPSG soften and flow to conform with the underlying surface topography and to improve step coverage LTO films ... silicon oxides and nitrides, glasses, organic polymers, and a host of metals Crystallographic planes play an important role in the design and fabrication of silicon-based MEMS and affect ... companion material to silicon; the two are bonded together figuratively and literally in many ways. Silicon originates from processed and purified silicates (a form of glass), and silicon can...
Ngày tải lên: 10/08/2014, 01:22
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 4 pptx
... 2.01 and ranges between 1.8 and 2.5 for PECVD films A high value in the range is indicative of excess silicon, and a low value generally represents an excess of nitrogen One of the key advantages ... electronically stored; (b) the alignment marks on the back side of the wafer are brought in focus; and (c) the position of the wafer is adjusted by translation and rotation to align the marks to the stored ... Wet etchants in aqueous solution offer the advantage of low-cost batch fabrication—25 to 50 100-mm-diameter wafers can be etched simultaneously—and can be either of the isotropic or anisotropic...
Ngày tải lên: 10/08/2014, 01:22
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 5 doc
... structural polysilicon is sufficient to make many useful devices, and up to five polysilicon and five oxide layers are a standard process at Sandia National Laboratories of Albuquerque, New Mexico ... process: (a) pattern photoresist and selectively electroplate first metal; (b) blanket electroplate second metal; and (c) planarize to same thickness. Trang 5yielding ever lower cost and finer dimensional ... are generic in their nature and used today in manufacturing at a number of companies and commercial foundries Figure 3.28 Photograph of ultrasonically drilled holes and cavities in glass (clear),...
Ngày tải lên: 10/08/2014, 01:22
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 6 pptx
... etching of grooves, wafer bonding, and dicing [8], and (b) nozzle formed by DRIE and wafer bonding. (After: [9].) Mandrel Photoresist 1. Make mandrel, pattern photoresist Metal 2. Electroplate metal ... sensitivity, and immunity to shock The range and bandwidth required vary significantly depending on the application Accelerometers for airbag crash sensing are rated for a full range of ±50G and ... familiar - ity with electrostatics and capacitance to the work of Charles Augustin de Coulomb of France and John Priestly of England in the late eighteenth century and observe that Lord Kelvin’s...
Ngày tải lên: 10/08/2014, 01:22
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 7 pot
... Silicon Sensing Systems.) [...]... and touch, then actuators must be the extension to our hands and fingers They give us the agility and dexterity to manipulate physical parameters well ... Plymouth, Devon, England, and Sumitomo Precision Products Company of Japan, is aimed at commercial and automotive applications. It also uses a vibratory ring shell similar to the sensor from Delphi ... )]°⋅sHz ; bandwidth (Hz); resolution (º/s); and dynamic range (dB), the lat- ter two being functions of noise and bandwidth. Short- and long-term drift of the output, known as bias drift, is another...
Ngày tải lên: 10/08/2014, 01:22
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 8 ppt
... Europe and Japan, where the bulk of the Trang 8development activities appears to be An application for micropumps is likely tobe in the automated handling of fluids for chemical analysis and drug ... The performance advantage of shape-memory alloys manifests itself in low power consumption and fast switching speeds The valve consumes less than 200 mW and switches on in about 10 ms and off in ... gra-dient between them Any changes in temperature that are uniform to the entire valve, such as fluctuations in the ambient temperature, cause both the ribs and the frame to expand and contract at the...
Ngày tải lên: 10/08/2014, 01:22
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 9 pps
... the C-Band) and 1,570 nm to 1,610 nm (known as the L-Band). The International Telecommunication Union (ITU) of Geneva, Switzerland, has specified the use to be on a grid of discrete channels ... unloaded actuator on the right-hand side is equal to the mass of the loaded actuator (left-hand side) and the mirror. Externally applied in-plane accelerations cause equal but opposite torques on ... order to “lock” the laser output to an assigned wavelength on the ITU grid and to offset drift due to aging and environmental conditions Wavelength lockers are available as stand-alone...
Ngày tải lên: 10/08/2014, 01:22
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 10 potx
... aforementioned products, it remains an enabling technology and a means to an end It is impera-tive to understand the final application in order to assess the importance and applicability of MEMS for ... [10] Jerman, H., and J D Grade, “A Mechanically-Balanced, DRIE Rotary Actuator for a High-Power Tunable Laser,” Tech Digest Solid-State Sensor and Actuator Workshop, Hil-ton Head Island, SC, ... 1999. MacDonald, L W., and A C Lowe (eds.), Display Systems: Design and Applications, West Sussex, England: Wiley, 1997. Micromechanics and MEMS: Classic and Seminal Papers to 1990, W Trimmer (ed.),...
Ngày tải lên: 10/08/2014, 01:22
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 11 pptx
... of Stanford University, Stanford, California.) Trang 7[1] Manz, A., N Graber, and H M Widmer, “Miniaturized Total Chemical Analysis Systems: A Novel Concept for Chemical Sensing,” Sensors and ... DeBusschere, and G T A Kovacs, “An Approach to the Classifi-cation of Unknown Biological Agents with Cell Based Sensors,” Tech Digest Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, ... standard products, custom arrays can be produced with a shorter turnaround time than with the masking production method Agilent also manufactures the Microarray Scanner for reading the arrays and...
Ngày tải lên: 10/08/2014, 01:22
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 12 pdf
... below bandpass range to ground They heavily filter frequencies in bandpass range Bandpass range Frequency Figure 7.14 Film bulk acoustic resonator (FBAR): (a) cross section of an FBAR and symbol; ... simple resonators consisting of a mass and a spring These resonators can freely oscillate at the natural frequency determined by the mass and the spring constant Adding a weak and compliant flexure ... Figure 7.14(c) The series induc-tance and capaciinduc-tance in the model represent the kinetic energy of the moving mass and the stored energy due to compression and expansion of the material, respec-tively,...
Ngày tải lên: 10/08/2014, 01:22
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 13 potx
... heat and electricity—voltage, current, and electrical resistance are dual to temperature, heat flux, and thermal resistance, respectively A network of resistors is an adequate first-order model to ... affect the performance of a sensor or actua-tor As such, thermal management is performed at two levels: the die level and the package level Thermal analysis is analogous to understanding electrical ... sensors, or actuators that require direct and immediate con-tact with their surrounding environments Thermal Management The demands on thermal management can be very diverse and occasionally...
Ngày tải lên: 10/08/2014, 01:22
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 14 docx
... standard is itself an evolution of another quality man-agement standard, ISO 9001, which was established by the International Organiza-tion for StandardizaOrganiza-tion of Geneva, Switzerland ... Technologies manages a set of quality and reliability standards specific to products and equipment for the telecommunications industry Table 8.7 lists a number of standards widely used in industries and ... in particular, shock and vibration, temperature, humidity, and occasionally salt spray and altitude Shock and vibration tests simulate situations observed during handling and shipping, or in high-vibration...
Ngày tải lên: 10/08/2014, 01:22
Đồ án lưới điện phạm mạnh hà
... 5.3 Sơ đồ nối điện Chương TÍNH TO N CHÍNH XÁC CÂN BẰNG CÔNG SUẤT Trong trình thiết kế mạng lưới điện để đảm bảo an to n cho hệ thống yêu cầu kỹ thuật.Cần phải tính to n xác phân bố dòng công suất,tổn ... vận hành nhỏ tổn thất cao, cấu trúc lưới điện phức tạp, vận hành linh hoạt, độ an to n thấp Vì việc đánh giá tính to n tiêu kinh tế, kỹ thuật lưới điện đảm bảo cho việc đạt tiêu kỹ thuật, hợp ... mỏ, - Đối với kinh tế phu tải là: nhà máy luyện thép, lò cao, -Đối với an ninh trật tự, trị phụ tải là: đại sứ quán, quan an ninh, trung tâm văn hóa công cộng, Do yêu cầu cấp điện phải liên tục...
Ngày tải lên: 24/11/2016, 14:07
Đánh giá tổng kết dự án giảm nghèo tỉnh Sơn La giai đoạn 2002 – 2007.Một số bài học kinh nghiệm rút ra từ dự án
... hoạt động phòng chống ma túy, an to n giao thông tệ nạn xã hội trường học d An to n giao thông Các quan chức năng: Thanh tra giao thông, Cảnh sát giao thông, Ban an to n giao thông phối kết hợp ... nghiệp nông thôn, mở mang thêm ngành sản xuất kinh doanh nông nghiệp phát triển nhanh chóng, số trang trại vừa sản xuất nông nghiệp vừa kinh doanh nông nghiệp chiếm 91% số trang trại sản xuất nông ... trạng to n Tổng số vốn to n theo hạng mục tiêu thể bảng (Xem phụ lục 1) Từ 2002 đến 31/12/2007 Sơn La to n cho hoạt động 383,427 tỷ VND, to n 215,958 tỷ VND đạt tỷ lệ 56%, dự kiến số lại to n...
Ngày tải lên: 14/11/2012, 11:07
Báo cáo Tổng kết Dự án Kế hoạch việc làm cho người khuyết tật và nhóm người dễ bị tổn thương khác tại Quảng Ninh , Hòa Bình và Lâm Đồng
... c a Phó Ch t ch H i Ch Th p Vi t Nam Trư ng Ban I U HÀNH i di n c a t t c ban chuyên môn liên quan n d án: Ban Tài k to n, Ban i ngo i phát tri n, Ban Công tác xã h i c p trung ương, d án thành ... vi c m i bư c, y u t quan tr ng mang n thành công vi c trung gian vi c làm Ngoài ra, h c viên c trang b phương pháp giao ti p t t v i nh ng bên liên quan xây d ng m i quan h t t v i i tác tương ... t phương pháp làm vi c quan tr ng khác h tr trang thi t b h t ng s c n thi t v n hành d án hi u qu D án h tr trang thi t b cho các c p H i Ch Th p Vi t Nam bao g m trang thi t b văn phòng i n...
Ngày tải lên: 15/03/2013, 14:24
Tài liệu BÁO CÁO TỔNG KẾT DỰ ÁN SỬ DỤNG QUỸ MỞ RỘNG pdf
... Thực trạng mối quan hệ xã hội hoạt động đo đạc đồ cần thiết phải điều chỉnh Luật a Quan hệ quan QLNN đo đạc đồ Trung ương với quan QLNN đo đạc đồ địa phương Mối quan hệ hai lọai quan dựa chế phân ... quản lý nhà nước đo đạc đồ ban hành cho luật nên không bắt buộc phải thi hành c Quan hệ quan QLNN đo đạc đồ với doanh nghiệp - Đối với lọai hình doanh nghiệp nhà nước, quan QLNN đo đạc đồ kiểm soát ... hình doanh nghiệp nhà nước, quan QLNN đo đạc đồ nắm bắt lực thông qua công tác cấp phép, vấn đề khác phân cấp cho Cơ quan QLNN địa phương d Quan hệ doanh nghiệp đo đạc đồ: - Đối với doanh nghiệp...
Ngày tải lên: 23/12/2013, 09:16