Tài liệu Sensors in Manufacturing (P1) docx

Sensors ApplicationsUpcoming volumes: · Sensors in Intelligent Buildings · Sensors in Medicine and Health Care · Sensors in Automotive Technology · Sensors in Aerospace Technology · Sens

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Sensors Applications Volume 1

Sensors in Manufacturing

Sensors in Manufacturing Edited by H K Tönshoff, I Inasaki

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Sensors Applications

Upcoming volumes:

· Sensors in Intelligent Buildings

· Sensors in Medicine and Health Care

· Sensors in Automotive Technology

· Sensors in Aerospace Technology

· Sensors in Environmental Technology

· Sensors in Household Appliances

Related Wiley-VCH titles:

W Göpel, J Hesse, J N Zemel

Sensors Vol 1–9

ISBN 3-527-26538-4

H Baltes, W Göpel, J Hesse

Sensors Update

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Weinheim – New York – Chichester – Brisbane – Singapore – Toronto

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in other languages) No part of this book may bereproduced in any form – by photoprinting, mi-crofilm, or any other means – nor transmitted ortranslated into machine language without writtenpermission from the publishers Registered na-mes, trademarks, etc used in this book, evenwhen not specifically marked as such, are not to

be considered unprotected by law

printed in the Federal Republic of Germanyprinted on acid-free paper

Composition K+V Fotosatz GmbH,D-64743 Beerfelden

Printing Betz-Druck, D-64291 Darmstadt

Bookbinding Wilhelm Osswald & Co.,D-67433 Neustadt

ISBN 3-527-29558-5

n This book was carefully produced Nevertheless,

authors, editors and publisher do not warrant theinformation contained therein to be free of er-rors Readers are advised to keep in mind thatstatements, data, illustrations, procedural details

or other items may inadvertently be inaccurate

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As the use of microelectronics became increasingly indispensable in ment and control technology, so there was an increasing need for suitable sensors From the mid-Seventies onwards sensors technology developed by leaps and bounds and within ten years had reached the point where it seemed desirable to publish a survey of what had been achieved so far At the request of publishers WILEY-VCH, the task of editing was taken on by Wolfgang Göpel of the Univer- sity of Tübingen (Germany), Joachim Hesse of Carl Zeiss (Germany) and Jay Ze- mel of the University of Philadelphia (USA), and between 1989 and 1995 a series

measure-called Sensors was published in 8 volumes covering the field to date The material

was grouped and presented according to the underlying physical principles and reflected the degree of maturity of the respective methods and products It was written primarily with researchers and design engineers in mind, and new developments have been published each year in one or two supplementary volumes

called Sensors Update.

Both the publishers and the series editors, however, were agreed from the start that eventually sensor users would want to see publications only dealing with their own specific technical or scientific fields Sure enough, during the Nineties

we saw significant developments in applications for sensor technology, and it is now an indispensable part of many industrial processes and systems It is timely,

therefore, to launch a new series, Sensors Applications WILEY-VCH again

commis-sioned Wolfgang Göpel and Joachim Hesse to plan the series, but sadly Wolfgang Göpel suffered a fatal accident in June 1999 and did not live to see publication.

We are fortunate that Julian Gardner of the University of Warwick has been able

to take his place, but Wolfgang Göpel remains a co-editor posthumously and will not be forgotten.

The series of Sensors Applications will deal with the use of sensors in the key technical and economic sectors and systems: Sensors in Manufacturing, Intelligent Buildings, Medicine and Health Care, Automotive Technology, Aerospace Technology, Environmental Technology and Household Appliances Each volume will be edited by

specialists in the field Individual volumes may differ in certain respects as tated by the topic, but the emphasis in each case will be on the process or system

dic-in question: which sensor is used, where, how and why, and exactly what the efits are to the user The process or system itself will of course be outlined and

ben-V

Preface to the Series

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the volume will close with a look ahead to likely developments and applications in the future Actual sensor functions will only be described where it seems necessary for an understanding of how they relate to the process or system The basic

principles can always be found in the earlier series of Sensors and Sensors Update.

The series editors would like to express their warm appreciation in the leagues who have contributed their expertise as volume editors or authors We are deeply indebted to the publisher and would like to thank in particular Dr Peter Gregory, Dr Jörn Ritterbusch and Dr Claudia Barzen for their constructive assistance both with the editorial detail and the publishing venture in general We trust that our endeavors will meet with the reader’s approval.

Julian W Gardner

Preface to the Series

VI

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Manufacturing technology has undergone significant developments over the last decades aiming at improving precision and productivity The development of nu- merical control (NC) technology in 1952 made a significant contribution to meet- ing these requirements The practical application of NC machine tools have stim- ulated technological developments that make the tools more intelligent, and al- lows the machining process to be carried out with higher reliability Today, thanks

to the significant developments in sensor and computer technologies, it can be said that the necessary tools are available for achieving the adaptive control of manufacturing processes, assisted by monitoring systems, which was a dream in the 1950’s.

For the following reasons, monitoring technology with reliable sensors is coming more and more important in modern manufacturing systems:

be-· Machine tools operate with speeds that do not allow manual intervention ever, collisions or process failures may cause significant damage.

How-· Manufacturing systems have become larger in scale, and monitoring of such large-scale systems is already beyond the capability of human beings.

· Increase of labor costs and the shortage of skilled operators calls for operation

of the manufacturing system with minimum human intervention; this requires the introduction of advanced monitoring systems.

· Ultra-precision manufacturing can only be achieved with the aid of advanced metrology and process monitoring technology.

· The use of sophisticated machine tools requires the integration of monitoring systems to prevent machine failure.

· Heavy-duty manufacturing processes with higher energy consumption should

be conducted with minimum human intervention, from the safety point of view.

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the necessary principles behind these developments We are convinced that the readers of this book, both in research institutes and in industry, can obtain infor- mation necessary for their research and developmental work.

The editors wish to thank the specialists who contributed their expertise and forbearance during the various stages of preparation In addition to the assistance

of the authors, we would like to thank the staff of Wiley-VCH for their support.

Ichiro Inasaki

VIII Preface to Volume 1 of “Sensors Applications”

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List of Contributors XVII

1.2.2 Basic Sensor Classification 10

1.2.3 Basic Sensor Types 13

1.3 Sensors in Mechanical Manufacturing – Requirements, Demands,

Boundary Conditions, Signal Processing, Communication 24

T Moriwaki

1.3.1 Introduction 24

1.3.2 Role of Sensors and Objectives of Sensing 24

1.3.3 Requirements for Sensors and Sensing Systems 27

IX

Contents

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1.3.4 Boundary Conditions 31

1.3.5 Signal Processing and Conversion 32

1.3.5.1 Analog Signal Processing 32

1.3.5.2 AD Conversion 34

1.3.5.3 Digital Signal Processing 36

1.3.6 Identification and Decision Making 39

1.3.6.1 Strategy of Identification and Decision Making 39

2.2 Sensors for Orientation 58

2.3 Calibration of Machine Tools and Robots 60

3.1.1.6 Lever-type Test Indicators 76

3.1.2 Electrical Measuring Methods 76

3.1.2.1 Resistive Displacement Sensors 77

3.1.2.2 Capacitive Displacement Sensors 77

3.1.2.3 Inductive Displacement Sensors 78

3.1.2.4 Magnetic Incremental Sensors 81

3.1.2.5 Capacitive Incremental Sensors 81

3.1.2.6 Inductive Incremental Sensors 82

3.1.3 Electromechanical Measuring Methods 83

3.1.3.1 Touch Trigger Probe 84

3.1.3.2 Continuous Measuring Probe System 84

3.1.4 Optoelectronic Measurement Methods 86

3.1.4.1 Incremental Methods 86

Contents

X

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3.1.4.2 Absolute Measurement Methods 89

3.1.5 Optical Measuring Methods 90

3.1.5.8 Interferometric Distance Measurement 94

3.1.5.9 Interferometric Form Testing 95

3.2.1 Tactile Measuring Method 99

3.2.1.1 Reference Surface Tactile Probing System 100

3.2.1.2 Skidded System 100

3.2.1.3 Double Skidded System 101

3.2.2 Optical Measuring Methods 101

3.2.2.1 White Light Interferometry 102

3.2.2.2 Scattered Light Method 103

3.2.2.3 Speckle Correlation 104

3.2.2.4 Grazing Incidence X-ray Reflectrometry 105

3.2.3 Probe Measuring Methods 106

3.2.3.1 Scanning Electron Microscopy (SEM) 107

3.2.3.2 Scanning Tunneling Microscopy (STM) 108

3.2.3.3 Scanning Near-field Optical Microscopy (SNOM) 110

3.2.3.4 Scanning Capacitance Microscopy (SCM) 111

3.2.3.5 Scanning Thermal Microscopy (SThM) 111

3.2.3.6 Atomic Force Microscopy (AFM) 113

3.2.3.7 Magnetic Force Microscopy (MFM) 117

3.2.3.8 Lateral Force Microscopy (LFM) 118

3.2.3.9 Phase Detection Microscopy (PDM) 119

3.2.3.10 Force Modulation Microscopy (FMM) 120

3.2.3.11 Electric Force Microscopy (EFM) 121

3.2.3.12 Scanning Near-field Acoustic Microscopy (SNAM) 122

3.2.4 Further Reading 123

3.3 Sensors for Physical Properties 123

B Karpuschewski

3.3.1 Introduction 123

3.3.2 Laboratory Reference Techniques 125

3.3.3 Sensors for Process Quantities 125

3.3.3.1 Force Sensors 126

Contents XI

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3.3.3.2 Power Sensors 128

3.3.3.3 Temperature Sensors 129

3.3.3.4 Acoustic Emission Sensors 131

3.3.4 Sensors for Tools 134

3.3.5 Sensors for Workpieces 136

3.3.5.1 Eddy-current Sensors 136

3.3.5.2 Micro-magnetic Sensors 137

3.3.6 References 141

4 Sensors for Process Monitoring 143

4.1.1 Casting 143

H D Haferkamp, M Niemeyer, J Weber

4.1.1.1 Introduction 143

4.1.1.2 Sensors with Melt Contact 145

4.1.1.3 Sensors without Melt Contact 149

4.1.2.2 Mixing and Blending of Metal Powders 159

4.1.2.3 Compacting of Metal Powders 162

4.1.2.4 The Sintering Process 166

4.1.2.5 References 171

E Doege, F Meiners, T Mende, W Strache, J W Yun

4.2.1 Sensors for the Punching Process 172

4.2.1.1 Sensors and Process Signals 173

4.2.1.2 Sensor Locations 174

4.2.1.3 Sensor Applications 176

4.2.2 Sensors for the Sheet Metal Forming Process 181

4.2.2.1 Deep Drawing Process and Signals 182

4.2.2.2 Material Properties 182

4.2.2.3 Lubrication 184

4.2.2.4 In-process Control for the Deep Drawing Process 186

4.2.3 Sensors for the Forging Process 191

4.2.3.1 Sensors Used in Forging Processes 191

4.2.3.2 Sensor Application and Boundaries 195

4.2.3.3 Typical Signals for Forces and Path 198

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4.3.2 Problems in Cutting and Need for Monitoring 203

4.3.6 Chip Control Sensors 228

4.3.7 Adaptive Control Systems 231

4.3.8 Intelligent Systems for Cutting Processes 233

I Inasaki, B Karpuschewski

4.4.1 Introduction 236

4.4.2 Problems in Abrasive Processes and Needs for Monitoring 236

4.4.4 Sensors for the Grinding Wheel 244

4.4.4.1 Sensors for Macro-geometric Quantities 246

4.4.4.2 Sensors for Micro-geometric Quantities 247

4.4.5 Workpiece Sensors 249

4.4.5.1 Contact-based Workpiece Sensors for Macro-geometry 249

4.4.5.2 Contact-based Workpiece Sensors for Micro-geometry 251

4.4.5.3 Contact-based Workpiece Sensors for Surface Integrity 252

4.4.5.4 Non-contact-based Workpiece Sensors 252

4.4.6 Sensors for Peripheral Systems 256

4.4.6.1 Sensors for Monitoring of the Conditioning Process 256

4.4.6.2 Sensors for Coolant Supply Monitoring 259

4.4.7 Sensors for Loose Abrasive Processes 262

4.4.7.1 Lapping Processes 262

4.4.7.2 Sensors for Non-conventional Loose Abrasive Processes 264

4.4.8 Adaptive Control Systems 265

4.4.9 Intelligent Systems for Abrasive Processes 268

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4.5.2.1 Sensors for Identifying Workpiece Geometry 273

4.5.2.2 Sensors for Identifying Workpiece Quality 273

4.5.2.3 Sensors for Beam Characterization 274

4.5.2.4 Focal Position and Gas Pressure 274

4.5.3 Quality Monitoring Sensors 275

4.7.2.1 Contact Geometry-oriented Sensors 287

4.7.2.2 Non-contact Geometry-oriented Sensors 291

4.7.3 Welding Process-oriented Sensors 295

4.7.3.1 Primary Process Phenomena-oriented Sensors 295

4.7.3.2 Secondary Process Phenomena-oriented Sensors 300

4.7.4 Summary 305

K.-D Bouzakis, N Vidakis, G Erkens

4.8.1 Coating Process Monitoring 307

4.8.1.1 Introduction 307

4.8.1.2 Vacuum Coating Process Classification 308

4.8.1.3 Vacuum Coating Process Parameter Monitoring Requirements 309

4.8.2 Sensors in Vapor Deposition Processes 311

4.8.2.1 Vapor Process Parameter Map 311

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4.8.2.5 Thin-film Thickness (TFT) Controllers for Deposition Rate Monitoring

and Control 322

4.8.2.6 Gas Dosing Systems and Valves 324

4.8.2.7 Other Parameters Usually Monitored During the PVD Process 325

4.9.8.1 Fluid Quench Sensor 338

4.9.8.2 Hollow Wire Sensor 338

4.9.8.3 Flux Sensor 339

4.9.9 Control of Induction Heating 339

4.9.10 Sensors for Plasma Processes 341

4.9.11 Conclusions 341

5 Developments in Manufacturing and Their Influence on Sensors 343

5.1 Ultra-precision Machining: Nanometric Displacement Sensors 343

5.4.1 Measurement of Emissions in the Work Environment 364

5.4.1.1 Requirements Relating to Emission Measuring Techniques in Dry

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5.4.2.1 Measuring Temperatures in Dry Machining Operations 367

5.4.2.2 Measuring Droplets in Minimal Lubrication Mode 368

5.4.3 Turning of Hardened Materials 369

5.4.3.1 Criteria for Process and Part Quality 369

5.4.3.2 Sensing and Monitoring Approaches 371

5.4.4 Using Acoustic Emission to Detect Grinding Burn 372

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Laboratory for Machine Tool

and Machine Dynamics

Aristoteles University Thessaloniki

52146 Würselen Germany

H D Haferkamp

Institut für Werkstoffkunde Universität Hannover Appelstr 11

30167 Hannover Germany

O Hillers

Laser Zentrum Hannover e.V.

Hollerithallee 8

30419 Hannover Germany

I Inasaki

Faculty of Sciency & Technology Keio University

3-14-1 Hiyoshi, Kohoku-ku Yokohama-shi

Japan

XVII

List of Contributors

Tiêu đề	Sensors in Manufacturing
Tác giả	H. K. Tửnshoff, I. Inasaki
Người hướng dẫn	Prof. Dr. J. Hesse, Prof. J. W. Gardner, Prof. Dr. W. Gửpel
Trường học	Keio University
Chuyên ngành	Sensors in Manufacturing
Thể loại	Edition
Năm xuất bản	2001
Thành phố	Weinheim

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Số trang	30
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