1. Trang chủ
  2. » Luận Văn - Báo Cáo

Crystal structure and magnetic properties were studied on a single crystal of hofe6al6h

5 11 0

Đang tải... (xem toàn văn)

THÔNG TIN TÀI LIỆU

Thông tin cơ bản

Định dạng
Số trang 5
Dung lượng 487,57 KB

Các công cụ chuyển đổi và chỉnh sửa cho tài liệu này

Nội dung

A shift in the binding energy peaks of Fe2p and Co2p has also been observed which could be due to the formation of silicide phases as a result of interfacial intermixing.. Furthermore, t

Trang 1

Original Article

New insights into CoFe/n-Si interfacial structure as probed by X-ray

photoelectron spectroscopy

Arvind Kumara,b,*, T Shripathic, P.C Srivastavaa

a Department of Physics, Banaras Hindu University, Varanasi 221005, UP, India

b Department of Physics, Atma Ram Sanatan Dharma College, University of Delhi, New Delhi 110021, India

c UGC-DAE Consortium for Scientific Research, University Campus, Indore 452017, MP, India

a r t i c l e i n f o

Article history:

Received 11 June 2016

Accepted 24 July 2016

Available online 28 July 2016

Keywords:

XPS

Interfacial intermixing

Surface states

Spintronics

Silicides

a b s t r a c t

X-ray photoelectron spectroscopy (XPS) is a well known tool in studying the physical and chemical properties of surface/interfaces which provides the element specific, non-destructive and quantitative information In the present study, information about the surface chemical states of interfacial structure of CoFe thinfilms on n-Si substrates has been studied from XPS technique The surface of the samples has also been cleaned from ion beam etching for 30 min with Arþions to record the XPS spectra The observation shows that the Si atoms are present within the probed surface layer due to interfacial intermixing across the interface which is due to strong chemical reactivity of n-Si substrate A shift in the binding energy peaks of Fe2p and Co2p has also been observed which could be due to the formation of silicide phases as a result of interfacial intermixing XPS results have indicated the formation of silicide phases across the interfaces which poses interfacial antiferromagnetic coupling across CoFe/n-Si interface to affect the magnetic behaviour It has been found that the present XPS results are in well support with our earlier study

© 2016 The Authors Publishing services by Elsevier B.V on behalf of Vietnam National University, Hanoi This is an open access article under the CC BY license (http://creativecommons.org/licenses/by/4.0/)

1 Introduction

Recently, a newfield of electronics, spintronics has attracted

much attention which is based on the fact that electrons have spins

as well as charge[1] At present, two different approaches have

been reported to realize the spintronic based devices, i.e., the use of

(i) a magnetic semiconductor[2e7], and (ii) a hybrid structure of

ferromagnetic (FM) metal and semiconductor (SC)[8e12] A basic

obstacle of spintronic devices for its application at room

temper-ature (RT), is the relatively low Curie tempertemper-ature of existing

ferromagnetic semiconductor (~100 K) [13] On the other hand,

ferromagnetic metals such as Fe, Co, Ni and their alloys have the

Curie temperature high enough for operation at RT, as required for

application The combination of FM with semiconducting materials

is promising from both perspectives, i.e., with respect to

applica-tion and basic research as it merges the physical properties of two

technologically important material classes FM/SC interfaces can

also be used as a spin injectors and spin analyzers for polarised

currents from ferromagnetic metal into semiconductors Except the transition metals such as Fe, Co and Ni etc., magnetic alloy of CoFe have also attracted much attention towards spintronic de-vices because of its various important properties such as soft magnetic properties, high Curie temperature (~1500 K), low magnetic anisotropy, high saturation magnetization (~15% greater than Fe), low coercivity and high permeability[14e16]

The electronic and magnetic properties of such heterostructures depend on the nature of the metal/semiconductor interface which

in turn, also affects the magneto-transport Due to interfacial chemistry such as interfacial intermixing across the interfaces at RT, there is a change in the chemical states of the constituent elements X-ray photoelectron spectroscopy (XPS) is a versatile surface sen-sitive technique and is widely being used to characterize the sur-face chemical compositions and sursur-face electronic states of such structures[17] XPS is a very useful technique to probe the interface

of FM/SC structure to study the interfacial reaction occurred

In our earlier study[18], we reported the magnetic, morpho-logical and structural investigations of CoFe/Si interfaces Structural investigations (from XRD) have shown the formation of more sili-cide phases for CoFe/n-Si interfacial structure as compared to CoFe/ p-Si sturucture Magnetic property of CoFe/n-Si interfacial structure has shown the presence of antiferromagnetic coupled phase which

* Corresponding author Department of Physics, Atma Ram Sanatan Dharma

College, University of Delhi, New Delhi 110021, India.

E-mail address: bhuarvind2512@gmail.com (A Kumar).

Peer review under responsibility of Vietnam National University, Hanoi.

Contents lists available atScienceDirect Journal of Science: Advanced Materials and Devices

j o u r n a l h o m e p a g e : w w w e l s e v i e r c o m / l o c a t e / j s a m d

http://dx.doi.org/10.1016/j.jsamd.2016.07.008

2468-2179/© 2016 The Authors Publishing services by Elsevier B.V on behalf of Vietnam National University, Hanoi This is an open access article under the CC BY license

Journal of Science: Advanced Materials and Devices 1 (2016) 290e294

Trang 2

was understood due to various magnetic silicide phases of Fe3Si,

FeSi2 and ε-FeSi to result in observed exchange bias for n-Si

structure, large magnetoresistance and distinct behaviour as

compared to CoFe/p-Si structures The results of structural,

morphological and transport studies across the interfaces were

interpreted in the realm of strong chemical reactivity of n-type

silicon wafer to result in more silicide phases Our earlier study[18]

has shown that the interfacial chemistry across CoFe/n-Si interface

plays a significant role in determining the structural, magnetic and

transport properties

Exchange bias is an interfacial phenomenon Fan, Y et al.[19]

studied the Fe/MgO system and found the significant shift in the

magnetization loop which is a classic signature of exchange bias In

our present study, we have also found such effect of exchange bias

which is an interfacial effect due to formation of silicide phases at

the interface Other studies[20,21], made on permalloyeCoO and

composites systems also found significant exchange bias

So, the motivation behind the present study is to investigate the

presence of surface chemical states/chemical phases across

CoFe/n-Si interfacial structure using core level X-ray photoelectron

spec-troscopy (XPS) technique In this report, XPS analysis of the

struc-ture has been detailed XPS analysis has shown the formation of

various phases of silicides of Fe Moreover, the XPS spectra have

also shown the presence of metallic phases of Fe and Co The

chemical interaction and surface chemical states of the CoFe/n-Si

interface has been described in detail and confirmed the presence

of metallic and silicide phases (of CoFe, Fe3Si, FeSi) which was

proposed in our earlier study[18]and found to affect the magnetic

and transport behaviour of such interfaces

2 Experimental details

n-Si (100) substrates of resistivity 8e10U-cm and a thickness of

~400 mm have been used for the sample preparation Prior to

metallization, Si substrates were ultrasonically cleaned in

trichlo-roethylene (TCE) solution to remove the organic contamination

Subsequently, Si substrates were chemically etched in a solution of

HF and HNO3~ (1:30 ratio) to remove the native oxide layer

fol-lowed by rinsing in distilled water and then dried in a clean vacuum

chamber To realize the CoFe/n-Si interfacial structure, a thinfilm of

CoFe (of thickness ~50 nm) has been deposited on etched and

cleaned n-Si substrates by electron beam evaporation technique

under the base pressure of ~106torr XPS measurement was

per-formed using VSW-ESCA photoelectron spectrometer at a base

pressure of 1 109torr at room temperature AlKa

unmono-chromatized X-rays (energy, hn~1486.6 eV) with the source

oper-ated at an emission current 10 mA and an anode voltage of 10 kV

was used for analysis Samples were properly grounded to avoid

any charging effect Hemispherical energy analyzer was used in the

fixed analyzer transmission mode with the pass energy (~40 eV) to

give an instrument resolution of ~0.9 eV Graphitic C1s ~284.6 eV

has been used as an internal reference to correct the shifts in

binding energy of core levels due to charging effect The depth

profiling of the samples was done by ion beam (attached to the

spectrometer at oblique incidence) etching of the surface using low

energy (~3.5 keV) Arþ ion gun Quantitative analysis of the

composition of thefilms have been performed by collecting the

integrated intensities of C1s, O1s, Fe2p, Co2p and Si2p signals

present in XPS using Wagner's sensitivity factors The relative

concentration of Co and Fe has been calculated and found to be of

60% and 40%, respectively XPSPEAK4.1 software[22]has been used

for deconvolution (i.e., curvefitting) of the XPS spectra Prior to

curvefitting, Shirley background was subtracted and then peaks

were deconvoluted

3 Results and discussion 3.1 Core level (XPS) study of CoFe/n-Si interfacial structure Fig 1shows the recorded survey scan spectra of CoFefilms over n-Si substrates for as-deposited (i.e., e0) and 30 min sputter etched (i.e., e30), respectively It can be seen that the spectra contain only photoemission peaks due to Fe and Co at the binding energy (B.E.) positions of ~711.5 eV and ~794.0 eV, respectively The presence of Si signal has also been detected but it is not very prominent In addition to this, the presence of absorbed carbon (C) and oxygen (O) signals has also been detected on the sample's surface The observed contribution of carbon and oxygen in survey scan could originate due to atmospheric exposure of the samples during transfer to the chamber Moreover, after 30 min sputter etching of the surface (with low energy Arþions), the signals due

to carbon and oxygen are getting weaker in intensity whereas signals due to Fe, Co and Si are emerging out with a prominent intensity This suggests that the some of the atmospheric impu-rities (like C and O) which were present at top of the surface are getting removed after sputter etching To gain more insight about the observed elements (Co, Fe and Si) in survey scan spectra, separate detailed scans have been recorded for each element, i e, for Co2p, Fe2p and Si2p The detail scan spectrum for Si has been recorded only after sputter cleaning (e30) because for the as-deposited sample (e0), the signal due to Si was not significant Furthermore, to analyze the variation in content of Co and Fe either in form of silicide or oxide, the detail scan spectra of Co2p, Fe2p and Si2p were further deconvoluted

3.1.1 Detail scan spectra of Fe2p Fig 2 shows the core level XPS spectra of Fe2p peak for as-deposited (e0) and 30 min sputter etched sample, recorded in a narrow scan between ~685 eV and ~750 eV The Fe2p spectrum recorded for as-deposited sample (e0) contains photoemission peaks of Fe2p3/2 and Fe2p1/2 at binding energy positions of

~707.4 eV and 720.4 eV, respectively which corresponds to the metallic phase of iron The other observed B.E peaks ~712.7 eV and 723.4 eV seem to correspond to formation of iron oxide phase, i e,

Fe2O3phase Moreover, after 30 min sputter etching (e30), the B.E positions are observed at ~708.1 eV (for Fe02p3/2) and 721.4 eV (for

Fe02p1/2) along with a satellite peak at ~713.4 eV The B.E peaks at

~708.1 eV and 721.4 eV corresponds to metallic phase of Fe which is observed to be shifted towards higher B.E side as compared to as-deposited sample (e0) It is noteworthy to mention here that after sputter cleaning (e30) the contribution due to oxide phase get reduced and metallic nature has improved

0 5000 10000 15000 20000 25000 30000 35000

40000

e0 e30

Binding Energy (eV)

-5000 0 5000 10000 15000 20000 25000 30000 35000 40000

Fig 1 Survey scan XPS spectra of CoFe/n-Si interfacial structure for as prepared (e0)

Trang 3

Deconvoluted spectra of Fe2p Fig 3(a) and (b) shows the

decon-voluted spectra of Fe2p peak for as-deposited (e0) and sputter

etched (e30) sample, respectively For the as-deposited sample, the

spectrum has been deconvoluted intofive peaks at B.E positions of

~707.4 eV, 710.8 eV, 715.2 eV, 720.4 eV and 723.4 eV The peak

positions at ~707.4 eV (Fe2p3/2) and 720.4 eV (Fe2p1/2) correspond

to the metallic phase of iron The observed B.E difference between

Fe2p doublet spectra, i.e., between 2p3/2and 2p1/2is 13.0 eV which

is close to the reported value[23] The other observed B.E peak

positions at ~710.8 eV (Fe2p3/2) and 723.4 eV (Fe2p1/2) seems to

correspond to oxide phase of iron Such observation of iron oxide phase has earlier been reported [24e26] A satellite peak at

~715.2 eV (~7.8 eV higher than the metallic phase of Fe ~707.4 eV) is likely due to oxide phase of iron The observation of such oxide and metallic phases of Fe2p doublet at the above mentioned binding energies along with the satellite peaks has also been observed by other groups[25e28] They observed Fe2p3/2peak at binding en-ergy position of 706.73 eV, 707.33 eV, and 710.26 eV Peak at binding energy position of 706.73 eV was explained due to metallic nature of Fe whereas peak at binding energy position of 710.26 eV was due to the formation of iron oxide[29] Moreover, for sputter etched (e30) sample (Fig 3b), the spectrum has been deconvoluted into three peaks at the B.E positions of ~708.1 eV, 713.4 eV and 721.4 eV The observed B.E peak shifting of Fe2p doublet spectra due to Fe2p3/2and Fe2p1/2signals towards higher binding energies

of ~708.1 eV, and ~721.4 eV (for e30) as compared to B.E positions

at ~707.4 eV and 720.4 eV (for e0) seems to be due to formation of iron silicide (Fe3Si/FeSi/FeSi2) phase[30] Such shifting of binding energy position of Fe 2p peaks towards higher energy which seems due to silicide formation were also reported by other researchers [31e34] Similar phases of silcides were also observed in our XRD data[18]which is now confirmed from present XPS study Such observed silicide phases are responsible for the observed distinct behaviour of magnetic, structural, morphological and transport properties for CoFe/n-Si interfacial structre as compared to

CoFe/p-Si interfacial structure As, it is also clear from the survey scan spectra (Fig 1) that we have also observed Si2p signal so the observed silicide phase could be likely due to the interfacial inter-mixing between CoFe alloy and Si substrate The formation of such iron silicide phases has been observed in our earlier study[18] which is now confirmed from our XPS data The formation of such silicide phases could also result due to the strong chemical reactivity of n-type Si substrate[35] The other observed peak at binding energy ~713.4 eV is due to Co auger signal bind with Fe atoms and thus confirms the formation of CoFe alloy phase[36]as also observed in our XRD result Thus, the confirmation of metallic phase of CoFe and iron silicide phases (of Fe3Si, FeSi) is in support to get an exchange bias due to interfacial antiferromagnetic coupled grains of FeeSi compounds or spacer layers[37]

3.1.2 Detail scan spectra of Co2p Fig 4shows the core level XPS spectra of Co2p peak for as-deposited (e0) and after 30 min sputter etched (e30) sample, recorded in a narrow scan between 820 eV and 760 eV The recorded Co2p spectrum for as-deposited (e0) sample contains

2000

3000

4000

5000

6000

7000

8000

9000

699.5

699.7 707.4

712.7 720.4 723.4

708.1 713.4

e0

Binding Energy (eV)

e30

721.4

Fig 2 Detail scan XPS spectra of Fe2p of CoFe/n-Si interfacial structure for as prepared

(e0) and after 30 min sputter etching (e30) of the surface.

2000

2500

3000

3500

4000

4500

Binding Energy (eV)

723.4720.4 715.2 710.8

707.4

699.7

1500

2000

2500

3000

3500

4000

4500

5000

5500

6000

699.5

Binding Energy (eV)

e30 (b)

Fig 3 Deconvoluted XPS spectra of Fe2p for (a) as prepared (e0) and (b) after 30 min

3000 4000 5000 6000 7000 8000 9000 10000 11000

773.4

779 793.8

772.6

779.5

784.5

Binding Energy (eV)

e30

e0

794.8

Fig 4 Detail scan XPS spectra of Co2p of CoFe/n-Si interfacial structure for as prepared

A Kumar et al / Journal of Science: Advanced Materials and Devices 1 (2016) 290e294 292

Trang 4

photoemission peaks due to Co2p3/2and Co2p1/2at binding energy

positions of ~779.0 eV and 793.8 eV, respectively which

corre-sponds to metallic phase of Co[38] Whereas, after 30 min sputter

etching (e30) the B.E peak positions are observed to be shifted

slightly towards higher B.E side of ~779.5 eV and 794.8 eV as

compared to prior to sputter etching (e0) The difference between

the observed doublet spectra of Co2p is found to be of ~14.8 eV (for

e0) and ~15.3 eV (for e30) which is very close to the reported value

~15 eV for metallic phase of Co[32] The other observed peak at B.E

position of ~784.5 eV seems to correspond Fe auger peak or may be

due to the satellite peak of Co2p3/2

Deconvoluted spectra of Co2p Fig 5(a) and (b) shows the

decon-voluted spectra of Co2p for as-deposited and 30 min sputter etched

sample, respectively The spectrum of as-deposited sample has

been deconvoluted into six peaks at B.E positions of ~773.4, 779.0,

782.3, 787.5, 794.0 and 797.3 eV Peaks at binding energy positions

of ~779.0 eV (for Co2p3/2) and 794.0 eV (for Co2p1/2) are due to

metallic phase of Co2p Binding energy difference between Co2p

doublet spectra i.e., Co2p3/2and 2p1/2is ~15.0 eV which is close to

the standard separation between the doublet spectra [38] The

other observed peaks at binding energy positions of ~782.3 eV and

797.3 eV shows Co2p3/2and 2p1/2spineorbit doublet due to

for-mation of Co-oxide phases (of CoO or Co3O4) Similar observation

has also been reported by Tan et al.[39]where they found the

separation between spineorbit doublet due to oxide phases of

Co2p is ~15.0 eV The presence of shake up satellite peak at B.E

~787.5 eV (~5.2 eV higher than the Co2þ2p3/2e782.3 eV) could also

be due to the oxide phase of cobalt (CoO/Co3O4) The observation of

such shake up satellite peak ~6.0 eV higher than Co2p3/2peak has

also been reported by other groups[40] So, it looks that some trace amount of oxide phases are present along with the metallic phase

of Co peak The observed peaks of oxide phases can originate due to atmospheric exposure of the sample

Moreover, the deconvoluted spectrum of 30 min sputter etched sample (Fig 5b) showsfive distinct peaks at B.E positions of ~772.6, 779.5, 783.0, 794.5 and 796.5 eV The doublet spectra of Co2p is observed to be at B.E positions of ~779.5 eV (for Co02p3/2) and

~794.5 eV (for Co02p1/2) which is 0.5 eV shifted to higher B.E side as compared to prior to sputter etching (e0) The observed shifting of B.E positions is likely due to the formation of oxide/silicide phases across the interface The B.E position at ~783.2 eV seems to correspond to Fe auger peak bind with Co atoms which again confirms the formation of the CoFe alloy phase [31,36] as also earlier observed by us in XRD data[18] Peak at binding energy position of ~796.5 eV (Co2p1/2) could be due to the presence of trace amount of CoO/Co3O4formed during the atmospheric exposure It

is also interesting to observe that after 30 min sputter cleaning (e30) the signal due to oxide phase get suppressed and metallic nature of Co is prominent

3.1.3 Detail scan spectra of Si2p

As discussed earlier, the Si signal was not significant for as-deposited (e0) sample so we have only recorded the detail scan spectra after sputter etching.Fig 6shows the core level XPS spectra

of Si2p peak recorded only after 30 min sputter etched (e30)

3000

3500

4000

4500

5000

5500

Binding Energy (eV)

797.3 794.0 787.5 782.3 779.0

773.4

e0 (a)

4000

5000

6000

7000

8000

9000

10000

11000

12000

Binding Energy (eV)

796.5794.5

783.0 779.5

772.6

e30 (b)

Fig 5 Deconvoluted XPS spectra of Co2p for (a) as prepared (e0) and (b) after 30 min

540 560 580 600 620 640 660 680 700 720 740

Binding Energy (eV)

100.5

Fig 6 Detail Scan XPS spectra of Si2p of CoFe/n-Si interfacial structure after 30 min sputter etching (e30) of the surface.

540 560 580 600 620 640 660 680 700 720 740

Binding Energy (eV)

104.1

Fig 7 Deconvoluted XPS spectra of Si2p after 30 min sputter etching (e30) of the

Trang 5

sample in a narrow scan between 110 eV and 90 eV The recorded

detail scan spectra of Si2p shows the B.E peak position at ~101.0 eV

which corresponds to the presence of Si Almand (~101.8 eV) or

oxide phase[25]

Deconvoluted spectra of Si2p Fig 7shows the deconvoluted spectra

of Si2p signal The spectrum has been deconvoluted into two peaks

at B.E positions of ~101.0 eV and 104.1 eV The peak at binding

energy ~101.0 eV corresponds to Si Almand (~101.8 eV)/and or Co3s

whereas the other peak at ~104.1 eV corresponds to oxide phase of

Si[25]

4 Conclusions

In conclusion, we investigated about the chemical interactions

and surface chemical states of CoFe/n-Si interfacial structures

which are responsible for affecting the electronic and magnetic

behaviour of layered structures It has been observed that after

sputter etching (or cleaning) there is a shifting in the B.E positions

of Fe2p and Co2p peaks which is related to formation of silicide

phases as a result of interfacial intermixing The observation of Si

signal has confirmed the role of interfacial intermixing across the

interface The presence of metallic alloy phase of CoFe has also been

confirmed Our present XPS investigations are in well support to

the earlier study[18]on CoFe/Si interfacial structure made by us

Acknowledgements

We would like to thank the Dr U.P Deshpande for his help and

co-operation in the XPS measurements Arvind Kumar also

ac-knowledges the financial support received from the University

Grants Commission, New Delhi, India in the form of senior research

fellowship (UGC-SRF)

References

C.A.F Vaz, J.A.C Bland, S.N Holmes, N.K Patel, D.A Ritchie, Ferromagnetic

metal/semiconductor hybrid structures for magnetoelectronics, J Appl Phys.

Robust electrical spin injection into a semiconductor heterostructure, Phys.

A Petrou, X Wei, Quantifying electrical spin injection: component-resolved

electroluminescence from spin-polarized light-emitting diodes, Appl Phys.

G Itskov, A Petrou, Reduction of spin injection efficiency by interface defect

spin scattering in ZnMnSe/AlGaAseGaAs spin-polarized light-emitting diodes,

Electrical spin injection in a ferromagnetic semiconductor heterostructure,

L.W Molenkamp, Injection and detection of a spin-polarized current in a

D.E Ashenford, B Lunn, Spin injection into semiconductors, Appl Phys Lett.

K.H Ploog, Room-temperature spin injection from Fe into GaAs, Phys Rev.

spin injection from a magnetic metal/tunnel barrier contact into a

G.J Salamo, P.M Thibado, M Mortazavi, Spatially resolved spin-injection

Electrical spin injection in a ferromagnet/tunnel barrier/semiconductor

at the ferromagnet/semiconductor interface, Curr Appl Phys 3 (2003)

structure, exchange interactions, and Curie temperature of FeCo, J Appl Phys.

orbital moment contributions of each element to macroscopic magnetization

ferromagnet/Al2O3Al2O3 interfaces using copper-doped aluminum

in-vestigations of CoFe/Si interfacial structures, J Exp Nanosci 10 (2015)

B.T Jonker, Exchange bias of the interface spin system at the Fe/MgO

Refining the exchange anisotropy paradigm: magnetic and microstructural heterogeneity at the Permalloy-CoO interface, Phys Rev B 81 (2010)

H Srikanth, M.H Phan, M€ossbauer spectroscopy studies of phase evolution in SrFe12O19/La0.5Ca0.5MnO3 composites, J Alloys Compd 636 (2015)

surface structure by LEED crystallography and energetics, Surf Sci 302 (1994)

study of exchange coupled Fe/NiO bilayer interfaced with Si substrate (Fe/

oxides by means of X-ray photoelectron spectroscopy, J Phys D Appl Phys 16

inelastic energy losses in the core level XPS spectra of iron oxides, Interface

dehydrogenation of ethylbenzene to styrene 2 Surface chemistry of the active

spectroscopy study of interdiffusion at the Si/Fe interface, J Appl Phys 100

temperature and formation of iron silicide, Thin Solid Films 280 (1996)

on iron silicide surfaces studied by electron spectroscopy, Phys Rev B 29

Wenhong Wang, Koichiro Inomata, Gerrit van der Laan, Interfacial structure and magnetic properties of Co2FeAl0.5Si0.5/MgOCo2FeAl0.5Si0.5/MgO

interface structure of Fe/SixFe1x multilayers with antiferromagnetic

sol-vated metal atom dispersed (SMAD) catalysts, evidence for layered cobalt-manganese particles on alumina and silica, J Am Chem Soc 113 (1991)

B Paci, A Mezzi, S Kaciulis, Effect of oxygen partial pressure on PLD cobalt

A Kumar et al / Journal of Science: Advanced Materials and Devices 1 (2016) 290e294 294

Ngày đăng: 17/03/2021, 20:12

TÀI LIỆU CÙNG NGƯỜI DÙNG

TÀI LIỆU LIÊN QUAN

🧩 Sản phẩm bạn có thể quan tâm