* SEM: Scanning electron microscope « FE-SEM: Field mission Scanming Electron Microscopy ¢ EDX or EDS: Energy-dispersive X-ray spectroscopy « TIM: ‘[ransmission electron microscopy ©
Trang 1MTNISTRY OF EDUCATION AND TRAINING HANOI UNIVERSITY OF SCIENCE AND TECHNOLOGY
NGUYEN HOANG HUNG
IMPROVING THE GAS SENSING PROPERTY OF
WO; NANOMATERIALS
MAJOR: ENGINEERING PHYSICS
MASTER OF SCIENCE THESIS ENGINEERING PHYSICS
SUPERVISOR: Dr DANG DUC VUONG
HANOI - 2012
Trang 2ee BO GIAO DUC VA BAO TAO ina
TRUONG BAI TIOC BACH KIIOA HA NOL
NGUYEN HOANG HUNG
CUA VAT LIEU NANO WO;
Trang 3TABLE OF CONTENT
TABLE OF CONTENT
2.1, Characterized features of gas sensors based on metal oxides 4
2.2, Basic scientist approach ccsscssisuisveeseseeseeeetestasinnivanotaseivtnnseet 6
1 Tungsten oxide among metal oxides for gas detection 3
2, Structural propertios oŸ tungsien oxide à occcoseneeorererseooee TỔ
3 Gas sensors based on tungsten oxide eo ¬— 27
Nguyen Hoang Hung ; Master Thesis
Trang 4* SEM: Scanning electron microscope
« FE-SEM: Field mission Scanming Electron Microscopy
¢ EDX or EDS: Energy-dispersive X-ray spectroscopy
« TIM: ‘[ransmission electron microscopy
© CNTs: Carbon nanotubes
© VLS: Vapor-liquid-solid
© PVD: Physical vapor deposition
© CVD: Chemival vapor deposition
« LETS: Low energy ion scattering
* DA: Depletion approximation
Nguyen Hoang Hung it Master Thesis
Trang 5PREFACE
In this thesis, the WOs materials are synthesized and measured in NH gas sensor
application The morphological form of the material was deposited by wet chemical
methods combining hydrothermal technology Gas sessing properties of the materials
was improved by reducing in grain size and doping with FeyO, nanorods The thesis
title: “Improving the gus sensing properly of WO, material” was selected and the
Tesults are presented in three mam chapters:
Chapter I Introduction: A short introduction to chemical sensors based on
metal oxides, with a particular emphasis on WOs This chapter also includes the
inctivation, targcts and organization of this investigation
Chapter LL Experimental and methodology: Illustrating the experimental
details used in this work, method to amalyze the structural and morphological
properties of material, a gas effective sensing system was also built in this chapter
Chapter Tl Experimental and methodology: Anning af contributing lo the
understanding of the whole gas sensing process
inal Conclusions and future Outlook are also proposed in this thesis
Nguyen Hoang Hung vili Master Thesis
Trang 6* SEM: Scanning electron microscope
« FE-SEM: Field mission Scanming Electron Microscopy
¢ EDX or EDS: Energy-dispersive X-ray spectroscopy
« TIM: ‘[ransmission electron microscopy
© CNTs: Carbon nanotubes
© VLS: Vapor-liquid-solid
© PVD: Physical vapor deposition
© CVD: Chemival vapor deposition
« LETS: Low energy ion scattering
* DA: Depletion approximation
Nguyen Hoang Hung it Master Thesis
Trang 71 WO¿ microsheets sựnthesis
3 Gas sensing properties
CIIAPTER 3: RISULT AND DISCUSSION
1 Tungsten trioxides microsheets
2 Tungsten trioxides nanyparticles and doping
Trang 8PREFACE
In this thesis, the WOs materials are synthesized and measured in NH gas sensor
application The morphological form of the material was deposited by wet chemical
methods combining hydrothermal technology Gas sessing properties of the materials
was improved by reducing in grain size and doping with FeyO, nanorods The thesis
title: “Improving the gus sensing properly of WO, material” was selected and the
Tesults are presented in three mam chapters:
Chapter I Introduction: A short introduction to chemical sensors based on
metal oxides, with a particular emphasis on WOs This chapter also includes the
inctivation, targcts and organization of this investigation
Chapter LL Experimental and methodology: Illustrating the experimental
details used in this work, method to amalyze the structural and morphological
properties of material, a gas effective sensing system was also built in this chapter
Chapter Tl Experimental and methodology: Anning af contributing lo the
understanding of the whole gas sensing process
inal Conclusions and future Outlook are also proposed in this thesis
Nguyen Hoang Hung vili Master Thesis
Trang 91 WO¿ microsheets sựnthesis
3 Gas sensing properties
CIIAPTER 3: RISULT AND DISCUSSION
1 Tungsten trioxides microsheets
2 Tungsten trioxides nanyparticles and doping
Trang 10PREFACE
PREFACE
Nowadays, the pollution level is increasing due to the misuse of chemicals in
industry, agriculuure as well as in life The presence of inflammable gases, toxic gases
that have caused large damage to both people and their property Aims to minimize
the risks as well as industrialization and modemization of industrial processes, it is
necessary to fabricate a kind of environmentally benign devices capable of detecting
gases Since then the term “gas sensor” was bom
TRunng the last decades of the century, the kind of gas se which was best
known, was based on the metal oxide semiconductor In particular, materials such as
Tia, SnOz, WOs, are widely used in gus sensing applications to detect toxic gases
‘The principle for gas sensing applications using metal oxide semiconductor based on
the change in resistance of the sensitive layer in presence of gases One of the metal
oxide material promising for semiconductor gas sensor applications was lungster
oxide With many advantages such as high sensitivity, low response time low
operating temperature, tungsten oxide material was gradually bronght to second pk
in the world of gas sensor based on metal oxides semiconductor (after SnO2)
One of the gases that was widely used and caused great impact on human health is
ammonia Recently, ammonia (NH;) is used in many industries, the NH gas leak in
the pipeline has caused serious consequences to health So, in the gases to be detected,
XH; in one of the most concerned gus and sensitive material to detect this gas thal was
emphasized by scientists is WO
Developing in parallel with nanotechnology, WO; is a sensitive materials even at
large sizes, but when the material reach to the size limit, the sensitivity was strongly
improved and appear more interesting properties Currently, there are many roules 1o
synthe
deposition (CVD), physical deposition However, these methods require a rigorous
technological processes and conditions It is difficult to obey in Vietnam science
condition Recently, wet chemical method combined with hydrothermal technology
emerged with many advantages as simple lechnology, inexpensive, nol undemanding
WO) manomaterials such as ball milling, thermal oxidation, chemical vapour
on teclmological process as well as technical conditions Moreover this method allows
mass production and variable morphologies could be synthesized ‘he above
advantages make wet chemical method has been studying and using more and more in
all over the world
Nguyen Hoang Hung vit Master Thesis
Trang 11PREFACE
PREFACE
Nowadays, the pollution level is increasing due to the misuse of chemicals in
industry, agriculuure as well as in life The presence of inflammable gases, toxic gases
that have caused large damage to both people and their property Aims to minimize
the risks as well as industrialization and modemization of industrial processes, it is
necessary to fabricate a kind of environmentally benign devices capable of detecting
gases Since then the term “gas sensor” was bom
TRunng the last decades of the century, the kind of gas se which was best
known, was based on the metal oxide semiconductor In particular, materials such as
Tia, SnOz, WOs, are widely used in gus sensing applications to detect toxic gases
‘The principle for gas sensing applications using metal oxide semiconductor based on
the change in resistance of the sensitive layer in presence of gases One of the metal
oxide material promising for semiconductor gas sensor applications was lungster
oxide With many advantages such as high sensitivity, low response time low
operating temperature, tungsten oxide material was gradually bronght to second pk
in the world of gas sensor based on metal oxides semiconductor (after SnO2)
One of the gases that was widely used and caused great impact on human health is
ammonia Recently, ammonia (NH;) is used in many industries, the NH gas leak in
the pipeline has caused serious consequences to health So, in the gases to be detected,
XH; in one of the most concerned gus and sensitive material to detect this gas thal was
emphasized by scientists is WO
Developing in parallel with nanotechnology, WO; is a sensitive materials even at
large sizes, but when the material reach to the size limit, the sensitivity was strongly
improved and appear more interesting properties Currently, there are many roules 1o
synthe
deposition (CVD), physical deposition However, these methods require a rigorous
technological processes and conditions It is difficult to obey in Vietnam science
condition Recently, wet chemical method combined with hydrothermal technology
emerged with many advantages as simple lechnology, inexpensive, nol undemanding
WO) manomaterials such as ball milling, thermal oxidation, chemical vapour
on teclmological process as well as technical conditions Moreover this method allows
mass production and variable morphologies could be synthesized ‘he above
advantages make wet chemical method has been studying and using more and more in
all over the world
Nguyen Hoang Hung vit Master Thesis
Trang 12LIST OF FIGURE
LIST OF FIGURE
Figure 1 Chemical sensors
Figure 2 Cross-section of a chemical sensor
Figure 5 Schematic representation of banier foanadien
Figure 6 Three mechanisms of conductance
ure 7 Chemical (a) and electronic (b) sensitization schemes
Figure 8 Sol-gel processing options
Figure 9 Prossure/emperature map of inaterial processing techniques
igure 10, Particle processing by conventional and hydrothennal
Figure 11 General purpose pressure autoclave and white Teflon 1
Figure 12 VLS synthesis apparatus 18
Figure 13 Map of temperature variations in fimace 1
Figure 14 Schematic Mustration of nucleation and growth of ZnO nanorods 1
Figure 17 Spin coating be)
Figure 18 Dip coating - 1
Figure 19 Comparison of the papers published on gas sensors 2
Figure 20, Schematic model of crystalline W03 in the undistorted cubic phase 1
Figure 21 Structural model of the WO; grain surface - 26
Figure 22 NH3"s structure and symmetry axis
Figure 23 Sore types of armmotiia detector 1
Some of commercialized gas sursors head 1
Figure 25 Schematic diagram of WO; miorosheets synthesis 34
Figure 26 Steps of WO; nanoparticles svnthesis " 35
igure 27 Diagram of heat treatment 1
Figure 28 Electron scattermg and secondary signal generation,
Schematic diagram of an SEM
Pt interdigitated electrodes and heater used in system
Figure 31 Static gas sensing system and principal cireutt
Figure 32 Dynamic gas sensing system,
Nguyen Hoang Hung Master Thesis
Trang 13LIST OF TABLE
LIST OF TABLE
‘Table 1 Sign of resistance change to change in gas atmosphere [93] 4
Table 2 Typical deposition techniques 20
Table 3 Known polymorphs of tungsten trioxide senessneennesneiensnneneeneee 26
‘Table 4, Occupational Lixposure Standards 2000,
'Table 5 3ome properties of NH; kinh tien
Table 6 Requirements for NIh gas detection equipment - 29
Table 7 Selected publications on Ny gas sensors based on WO; 31
Nguyen Hoang Hung l Master Thesis
Trang 14* SEM: Scanning electron microscope
« FE-SEM: Field mission Scanming Electron Microscopy
¢ EDX or EDS: Energy-dispersive X-ray spectroscopy
« TIM: ‘[ransmission electron microscopy
© CNTs: Carbon nanotubes
© VLS: Vapor-liquid-solid
© PVD: Physical vapor deposition
© CVD: Chemival vapor deposition
« LETS: Low energy ion scattering
* DA: Depletion approximation
Nguyen Hoang Hung it Master Thesis
Trang 15LIST OF TABLE
LIST OF TABLE
‘Table 1 Sign of resistance change to change in gas atmosphere [93] 4
Table 2 Typical deposition techniques 20
Table 3 Known polymorphs of tungsten trioxide senessneennesneiensnneneeneee 26
‘Table 4, Occupational Lixposure Standards 2000,
'Table 5 3ome properties of NH; kinh tien
Table 6 Requirements for NIh gas detection equipment - 29
Table 7 Selected publications on Ny gas sensors based on WO; 31
Nguyen Hoang Hung l Master Thesis
Trang 16PREFACE
In this thesis, the WOs materials are synthesized and measured in NH gas sensor
application The morphological form of the material was deposited by wet chemical
methods combining hydrothermal technology Gas sessing properties of the materials
was improved by reducing in grain size and doping with FeyO, nanorods The thesis
title: “Improving the gus sensing properly of WO, material” was selected and the
Tesults are presented in three mam chapters:
Chapter I Introduction: A short introduction to chemical sensors based on
metal oxides, with a particular emphasis on WOs This chapter also includes the
inctivation, targcts and organization of this investigation
Chapter LL Experimental and methodology: Illustrating the experimental
details used in this work, method to amalyze the structural and morphological
properties of material, a gas effective sensing system was also built in this chapter
Chapter Tl Experimental and methodology: Anning af contributing lo the
understanding of the whole gas sensing process
inal Conclusions and future Outlook are also proposed in this thesis
Nguyen Hoang Hung vili Master Thesis
Trang 17LIST OF FIGURE
Figure 34 The XRD pattem and EDX pattem of W0s thin film 4
Figure 36 FESEM images of WO; nanoparticles
Figure 37 SEM images of WO; nanomaterials
Figure 38 EDX partner of #203 nanorods doped WO, 1% wt
Figure 41 Response to NH3 of WOs microsheets at L60°C wae ssssssesssteseneeeee 4
Figure 43 The sensor response as a function of gas concentration 49
Figure 44 Response to NH3 of WOs nanoparticles at 55 °C
Figure 45 Rosponse to NHy of WO, nanoparticles al 95 °C
Figure 47 Response to NII; of WO nanoparticles at 294 °C 1
Figure 48 The dependence of the sensor response on operating temperature 1
Nguyen Hoang Hung Master Thesis
vi
Trang 18* SEM: Scanning electron microscope
« FE-SEM: Field mission Scanming Electron Microscopy
¢ EDX or EDS: Energy-dispersive X-ray spectroscopy
« TIM: ‘[ransmission electron microscopy
© CNTs: Carbon nanotubes
© VLS: Vapor-liquid-solid
© PVD: Physical vapor deposition
© CVD: Chemival vapor deposition
« LETS: Low energy ion scattering
* DA: Depletion approximation
Nguyen Hoang Hung it Master Thesis
Trang 19LIST OF FIGURE
Figure 34 The XRD pattem and EDX pattem of W0s thin film 4
Figure 36 FESEM images of WO; nanoparticles
Figure 37 SEM images of WO; nanomaterials
Figure 38 EDX partner of #203 nanorods doped WO, 1% wt
Figure 41 Response to NH3 of WOs microsheets at L60°C wae ssssssesssteseneeeee 4
Figure 43 The sensor response as a function of gas concentration 49
Figure 44 Response to NH3 of WOs nanoparticles at 55 °C
Figure 45 Rosponse to NHy of WO, nanoparticles al 95 °C
Figure 47 Response to NII; of WO nanoparticles at 294 °C 1
Figure 48 The dependence of the sensor response on operating temperature 1
Nguyen Hoang Hung Master Thesis
vi
Trang 201 WO¿ microsheets sựnthesis
3 Gas sensing properties
CIIAPTER 3: RISULT AND DISCUSSION
1 Tungsten trioxides microsheets
2 Tungsten trioxides nanyparticles and doping
Trang 211 WO¿ microsheets sựnthesis
3 Gas sensing properties
CIIAPTER 3: RISULT AND DISCUSSION
1 Tungsten trioxides microsheets
2 Tungsten trioxides nanyparticles and doping
Trang 22PREFACE
PREFACE
Nowadays, the pollution level is increasing due to the misuse of chemicals in
industry, agriculuure as well as in life The presence of inflammable gases, toxic gases
that have caused large damage to both people and their property Aims to minimize
the risks as well as industrialization and modemization of industrial processes, it is
necessary to fabricate a kind of environmentally benign devices capable of detecting
gases Since then the term “gas sensor” was bom
TRunng the last decades of the century, the kind of gas se which was best
known, was based on the metal oxide semiconductor In particular, materials such as
Tia, SnOz, WOs, are widely used in gus sensing applications to detect toxic gases
‘The principle for gas sensing applications using metal oxide semiconductor based on
the change in resistance of the sensitive layer in presence of gases One of the metal
oxide material promising for semiconductor gas sensor applications was lungster
oxide With many advantages such as high sensitivity, low response time low
operating temperature, tungsten oxide material was gradually bronght to second pk
in the world of gas sensor based on metal oxides semiconductor (after SnO2)
One of the gases that was widely used and caused great impact on human health is
ammonia Recently, ammonia (NH;) is used in many industries, the NH gas leak in
the pipeline has caused serious consequences to health So, in the gases to be detected,
XH; in one of the most concerned gus and sensitive material to detect this gas thal was
emphasized by scientists is WO
Developing in parallel with nanotechnology, WO; is a sensitive materials even at
large sizes, but when the material reach to the size limit, the sensitivity was strongly
improved and appear more interesting properties Currently, there are many roules 1o
synthe
deposition (CVD), physical deposition However, these methods require a rigorous
technological processes and conditions It is difficult to obey in Vietnam science
condition Recently, wet chemical method combined with hydrothermal technology
emerged with many advantages as simple lechnology, inexpensive, nol undemanding
WO) manomaterials such as ball milling, thermal oxidation, chemical vapour
on teclmological process as well as technical conditions Moreover this method allows
mass production and variable morphologies could be synthesized ‘he above
advantages make wet chemical method has been studying and using more and more in
all over the world
Nguyen Hoang Hung vit Master Thesis
Trang 23LIST OF FIGURE
Figure 34 The XRD pattem and EDX pattem of W0s thin film 4
Figure 36 FESEM images of WO; nanoparticles
Figure 37 SEM images of WO; nanomaterials
Figure 38 EDX partner of #203 nanorods doped WO, 1% wt
Figure 41 Response to NH3 of WOs microsheets at L60°C wae ssssssesssteseneeeee 4
Figure 43 The sensor response as a function of gas concentration 49
Figure 44 Response to NH3 of WOs nanoparticles at 55 °C
Figure 45 Rosponse to NHy of WO, nanoparticles al 95 °C
Figure 47 Response to NII; of WO nanoparticles at 294 °C 1
Figure 48 The dependence of the sensor response on operating temperature 1
Nguyen Hoang Hung Master Thesis
vi
Trang 241 WO¿ microsheets sựnthesis
3 Gas sensing properties
CIIAPTER 3: RISULT AND DISCUSSION
1 Tungsten trioxides microsheets
2 Tungsten trioxides nanyparticles and doping
Trang 25PREFACE
In this thesis, the WOs materials are synthesized and measured in NH gas sensor
application The morphological form of the material was deposited by wet chemical
methods combining hydrothermal technology Gas sessing properties of the materials
was improved by reducing in grain size and doping with FeyO, nanorods The thesis
title: “Improving the gus sensing properly of WO, material” was selected and the
Tesults are presented in three mam chapters:
Chapter I Introduction: A short introduction to chemical sensors based on
metal oxides, with a particular emphasis on WOs This chapter also includes the
inctivation, targcts and organization of this investigation
Chapter LL Experimental and methodology: Illustrating the experimental
details used in this work, method to amalyze the structural and morphological
properties of material, a gas effective sensing system was also built in this chapter
Chapter Tl Experimental and methodology: Anning af contributing lo the
understanding of the whole gas sensing process
inal Conclusions and future Outlook are also proposed in this thesis
Nguyen Hoang Hung vili Master Thesis
Trang 26* SEM: Scanning electron microscope
« FE-SEM: Field mission Scanming Electron Microscopy
¢ EDX or EDS: Energy-dispersive X-ray spectroscopy
« TIM: ‘[ransmission electron microscopy
© CNTs: Carbon nanotubes
© VLS: Vapor-liquid-solid
© PVD: Physical vapor deposition
© CVD: Chemival vapor deposition
« LETS: Low energy ion scattering
* DA: Depletion approximation
Nguyen Hoang Hung it Master Thesis
Trang 27LIST OF FIGURE
Figure 34 The XRD pattem and EDX pattem of W0s thin film 4
Figure 36 FESEM images of WO; nanoparticles
Figure 37 SEM images of WO; nanomaterials
Figure 38 EDX partner of #203 nanorods doped WO, 1% wt
Figure 41 Response to NH3 of WOs microsheets at L60°C wae ssssssesssteseneeeee 4
Figure 43 The sensor response as a function of gas concentration 49
Figure 44 Response to NH3 of WOs nanoparticles at 55 °C
Figure 45 Rosponse to NHy of WO, nanoparticles al 95 °C
Figure 47 Response to NII; of WO nanoparticles at 294 °C 1
Figure 48 The dependence of the sensor response on operating temperature 1
Nguyen Hoang Hung Master Thesis
vi
Trang 28LIST OF TABLE
LIST OF TABLE
‘Table 1 Sign of resistance change to change in gas atmosphere [93] 4
Table 2 Typical deposition techniques 20
Table 3 Known polymorphs of tungsten trioxide senessneennesneiensnneneeneee 26
‘Table 4, Occupational Lixposure Standards 2000,
'Table 5 3ome properties of NH; kinh tien
Table 6 Requirements for NIh gas detection equipment - 29
Table 7 Selected publications on Ny gas sensors based on WO; 31
Nguyen Hoang Hung l Master Thesis
Trang 29LIST OF FIGURE
LIST OF FIGURE
Figure 1 Chemical sensors
Figure 2 Cross-section of a chemical sensor
Figure 5 Schematic representation of banier foanadien
Figure 6 Three mechanisms of conductance
ure 7 Chemical (a) and electronic (b) sensitization schemes
Figure 8 Sol-gel processing options
Figure 9 Prossure/emperature map of inaterial processing techniques
igure 10, Particle processing by conventional and hydrothennal
Figure 11 General purpose pressure autoclave and white Teflon 1
Figure 12 VLS synthesis apparatus 18
Figure 13 Map of temperature variations in fimace 1
Figure 14 Schematic Mustration of nucleation and growth of ZnO nanorods 1
Figure 17 Spin coating be)
Figure 18 Dip coating - 1
Figure 19 Comparison of the papers published on gas sensors 2
Figure 20, Schematic model of crystalline W03 in the undistorted cubic phase 1
Figure 21 Structural model of the WO; grain surface - 26
Figure 22 NH3"s structure and symmetry axis
Figure 23 Sore types of armmotiia detector 1
Some of commercialized gas sursors head 1
Figure 25 Schematic diagram of WO; miorosheets synthesis 34
Figure 26 Steps of WO; nanoparticles svnthesis " 35
igure 27 Diagram of heat treatment 1
Figure 28 Electron scattermg and secondary signal generation,
Schematic diagram of an SEM
Pt interdigitated electrodes and heater used in system
Figure 31 Static gas sensing system and principal cireutt
Figure 32 Dynamic gas sensing system,
Nguyen Hoang Hung Master Thesis
Trang 30LIST OF FIGURE
Figure 34 The XRD pattem and EDX pattem of W0s thin film 4
Figure 36 FESEM images of WO; nanoparticles
Figure 37 SEM images of WO; nanomaterials
Figure 38 EDX partner of #203 nanorods doped WO, 1% wt
Figure 41 Response to NH3 of WOs microsheets at L60°C wae ssssssesssteseneeeee 4
Figure 43 The sensor response as a function of gas concentration 49
Figure 44 Response to NH3 of WOs nanoparticles at 55 °C
Figure 45 Rosponse to NHy of WO, nanoparticles al 95 °C
Figure 47 Response to NII; of WO nanoparticles at 294 °C 1
Figure 48 The dependence of the sensor response on operating temperature 1
Nguyen Hoang Hung Master Thesis
vi
Trang 31LIST OF FIGURE
LIST OF FIGURE
Figure 1 Chemical sensors
Figure 2 Cross-section of a chemical sensor
Figure 5 Schematic representation of banier foanadien
Figure 6 Three mechanisms of conductance
ure 7 Chemical (a) and electronic (b) sensitization schemes
Figure 8 Sol-gel processing options
Figure 9 Prossure/emperature map of inaterial processing techniques
igure 10, Particle processing by conventional and hydrothennal
Figure 11 General purpose pressure autoclave and white Teflon 1
Figure 12 VLS synthesis apparatus 18
Figure 13 Map of temperature variations in fimace 1
Figure 14 Schematic Mustration of nucleation and growth of ZnO nanorods 1
Figure 17 Spin coating be)
Figure 18 Dip coating - 1
Figure 19 Comparison of the papers published on gas sensors 2
Figure 20, Schematic model of crystalline W03 in the undistorted cubic phase 1
Figure 21 Structural model of the WO; grain surface - 26
Figure 22 NH3"s structure and symmetry axis
Figure 23 Sore types of armmotiia detector 1
Some of commercialized gas sursors head 1
Figure 25 Schematic diagram of WO; miorosheets synthesis 34
Figure 26 Steps of WO; nanoparticles svnthesis " 35
igure 27 Diagram of heat treatment 1
Figure 28 Electron scattermg and secondary signal generation,
Schematic diagram of an SEM
Pt interdigitated electrodes and heater used in system
Figure 31 Static gas sensing system and principal cireutt
Figure 32 Dynamic gas sensing system,
Nguyen Hoang Hung Master Thesis
Trang 32* SEM: Scanning electron microscope
« FE-SEM: Field mission Scanming Electron Microscopy
¢ EDX or EDS: Energy-dispersive X-ray spectroscopy
« TIM: ‘[ransmission electron microscopy
© CNTs: Carbon nanotubes
© VLS: Vapor-liquid-solid
© PVD: Physical vapor deposition
© CVD: Chemival vapor deposition
« LETS: Low energy ion scattering
* DA: Depletion approximation
Nguyen Hoang Hung it Master Thesis
Trang 33PREFACE
PREFACE
Nowadays, the pollution level is increasing due to the misuse of chemicals in
industry, agriculuure as well as in life The presence of inflammable gases, toxic gases
that have caused large damage to both people and their property Aims to minimize
the risks as well as industrialization and modemization of industrial processes, it is
necessary to fabricate a kind of environmentally benign devices capable of detecting
gases Since then the term “gas sensor” was bom
TRunng the last decades of the century, the kind of gas se which was best
known, was based on the metal oxide semiconductor In particular, materials such as
Tia, SnOz, WOs, are widely used in gus sensing applications to detect toxic gases
‘The principle for gas sensing applications using metal oxide semiconductor based on
the change in resistance of the sensitive layer in presence of gases One of the metal
oxide material promising for semiconductor gas sensor applications was lungster
oxide With many advantages such as high sensitivity, low response time low
operating temperature, tungsten oxide material was gradually bronght to second pk
in the world of gas sensor based on metal oxides semiconductor (after SnO2)
One of the gases that was widely used and caused great impact on human health is
ammonia Recently, ammonia (NH;) is used in many industries, the NH gas leak in
the pipeline has caused serious consequences to health So, in the gases to be detected,
XH; in one of the most concerned gus and sensitive material to detect this gas thal was
emphasized by scientists is WO
Developing in parallel with nanotechnology, WO; is a sensitive materials even at
large sizes, but when the material reach to the size limit, the sensitivity was strongly
improved and appear more interesting properties Currently, there are many roules 1o
synthe
deposition (CVD), physical deposition However, these methods require a rigorous
technological processes and conditions It is difficult to obey in Vietnam science
condition Recently, wet chemical method combined with hydrothermal technology
emerged with many advantages as simple lechnology, inexpensive, nol undemanding
WO) manomaterials such as ball milling, thermal oxidation, chemical vapour
on teclmological process as well as technical conditions Moreover this method allows
mass production and variable morphologies could be synthesized ‘he above
advantages make wet chemical method has been studying and using more and more in
all over the world
Nguyen Hoang Hung vit Master Thesis
Trang 34LIST OF FIGURE
Figure 34 The XRD pattem and EDX pattem of W0s thin film 4
Figure 36 FESEM images of WO; nanoparticles
Figure 37 SEM images of WO; nanomaterials
Figure 38 EDX partner of #203 nanorods doped WO, 1% wt
Figure 41 Response to NH3 of WOs microsheets at L60°C wae ssssssesssteseneeeee 4
Figure 43 The sensor response as a function of gas concentration 49
Figure 44 Response to NH3 of WOs nanoparticles at 55 °C
Figure 45 Rosponse to NHy of WO, nanoparticles al 95 °C
Figure 47 Response to NII; of WO nanoparticles at 294 °C 1
Figure 48 The dependence of the sensor response on operating temperature 1
Nguyen Hoang Hung Master Thesis
vi
Trang 35LIST OF TABLE
LIST OF TABLE
‘Table 1 Sign of resistance change to change in gas atmosphere [93] 4
Table 2 Typical deposition techniques 20
Table 3 Known polymorphs of tungsten trioxide senessneennesneiensnneneeneee 26
‘Table 4, Occupational Lixposure Standards 2000,
'Table 5 3ome properties of NH; kinh tien
Table 6 Requirements for NIh gas detection equipment - 29
Table 7 Selected publications on Ny gas sensors based on WO; 31
Nguyen Hoang Hung l Master Thesis
Trang 361 WO¿ microsheets sựnthesis
3 Gas sensing properties
CIIAPTER 3: RISULT AND DISCUSSION
1 Tungsten trioxides microsheets
2 Tungsten trioxides nanyparticles and doping
Trang 37LIST OF FIGURE
LIST OF FIGURE
Figure 1 Chemical sensors
Figure 2 Cross-section of a chemical sensor
Figure 5 Schematic representation of banier foanadien
Figure 6 Three mechanisms of conductance
ure 7 Chemical (a) and electronic (b) sensitization schemes
Figure 8 Sol-gel processing options
Figure 9 Prossure/emperature map of inaterial processing techniques
igure 10, Particle processing by conventional and hydrothennal
Figure 11 General purpose pressure autoclave and white Teflon 1
Figure 12 VLS synthesis apparatus 18
Figure 13 Map of temperature variations in fimace 1
Figure 14 Schematic Mustration of nucleation and growth of ZnO nanorods 1
Figure 17 Spin coating be)
Figure 18 Dip coating - 1
Figure 19 Comparison of the papers published on gas sensors 2
Figure 20, Schematic model of crystalline W03 in the undistorted cubic phase 1
Figure 21 Structural model of the WO; grain surface - 26
Figure 22 NH3"s structure and symmetry axis
Figure 23 Sore types of armmotiia detector 1
Some of commercialized gas sursors head 1
Figure 25 Schematic diagram of WO; miorosheets synthesis 34
Figure 26 Steps of WO; nanoparticles svnthesis " 35
igure 27 Diagram of heat treatment 1
Figure 28 Electron scattermg and secondary signal generation,
Schematic diagram of an SEM
Pt interdigitated electrodes and heater used in system
Figure 31 Static gas sensing system and principal cireutt
Figure 32 Dynamic gas sensing system,
Nguyen Hoang Hung Master Thesis