Bai bao gidi thieu tdm tat ket qua nghien cdu tao Idp mang CrN bang phifOng phap lang dong vat ly ti^ pha hi^ trong moi tnfdng chan khong tren mau thep 5KD11 va khao sat hinh thai hpc be
Trang 1•MiMJi[»WCONG NGHE
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INVESTIGATION INTO MORPHOLOGY AND MICRO/NANO-ROUGHNESS OF CrN HARD COATING FABRICATED BY USING PHYSICALVAPOR DEPOSITION TECHNIQUE
Tran Van D u a , Pham Dvtc Cudng,
Oao Huy Hoang, Dao Duy Trung
Tom t^t
Mang culig goc Crom thucmg duoc su'dung bao ve be mat khoi sif cao xUdc va mai mon, giam ma sat chong
bam dinh, tang tuoi tho lam viec cua chi tiet va dung cu Hinh ^ a i hoc va do nham te vi ciJa 1 ^ mang CrN
dong mot vai tro quan trpng tdi dac tinh ma sat va mai mon ciia 1 ^ mang CrN Bai bao gidi thieu tdm tat
ket qua nghien cdu tao Idp mang CrN bang phifOng phap lang dong vat ly ti^ pha hi^ trong moi tnfdng chan
khong tren mau thep 5KD11 va khao sat hinh thai hpc be mat va dp nham te vi cua Idp mang CrN tao du'oc
Ket qui thu du'oc la cd sd de tiep tuc nghien cdu tao Idp mang CrN cd cac dac tinh phu hop dng dung trong
linhvilccflkhichetao
Ti^ khda: M^ng cdng, PVD, ON, Hlnh thai hoc, Do nham te vi
Abstract
Tlie Cr-based hard coating is often used to protea the surface from scratching and abrasion, reduce
friction and surface adhesion, and therefore increase the lifetime of parts and tools Morphology and
micro/nanoroughness of the CrN coating play an important role in determining the friction and wear
properties ofthe coating This paper briefly introduces the results of fabricating CrN coating on SKD11 steel
substrates using physical vapor deposition (PVD) technique and investigates rtie surface morphology and
micro/nanoroughness ofthe coating The results are ftindamental for further study in order to fabricate
CrN coaling for industrial applications
Keywords: Hard coating, PVD, CrN, Morphology, Micro/nano roughness
TtiS.Tran Vanflua.TS.Ptiamflu'c Cudng, KS Dao Huy Hoang
Tnrting fiai hoc C6ng nghiep Ha Noi
TS Dao Duy Trung - Viln Nghien cQu Co khi
Email; duatv79@yahoo.com
Ngaynhanbai: 10/03/2014 Ngay chap nhan dang: 16/05/2014
1.GldlTH|U
Mang eiJffig la mot hoac nhieu ldp
mong (ehieu day do bang nanomet
hoae mieromet) b^ng kim loai hoac
hap chat co goc kim loai (kim loai 6uge
nitrit hoa, cae bit hoa, ) dUdc phO len
be mat eua vat lieu nhSm mue dich bao
ve be mat khdi sJ cao xade, dong thdi
CO kha nang cSi thien cac dac tinh co-ly-hoa khac
Cae ldp mang ciJrng khong lam thay
doi cau true eixa vat lieu khoi cung nhii
hinh dang hinh hoe cua be mat dUOc phd, nhung lai eo nhOng dae tinh cO-ly-hoa tUdng tU nhU vat lieu khoi (bulk materials) dung detao ra ehung Vi the Idp phii rat thich hop d l bao ve be mat mem hon hoac cho cac be mat can cac yeu cau ky thuat cu the ma khong can phai che tao ca khoi vat lieu, cho hiSu qua kinh te cao, dac biet la vdi eSc va! lieu hiem va dat tien
Ldp mang CrN co cac dac diem sau:
CO do cang eao (khoang 1800-210C HV), he so ma sat nhd (khoang 0,5), kh3 nang chju nhiet tot (lam viee on dlnl' tdi nhiet do 700°C), kha nang chju ma mon va eao xUdc tot, CrN la vat lieu tre (khong phan ufng vdi hau het eac ho; chat) va on dmh, khS nang bam dinf rat manh - tao ra lien ket phan tCf vci vat lieu nen, co the diing de phu ler rat nhieu loai vat lieu nen khae nfiau Ben canh dd, CrN la vat lieu khong i36i nen ed the phu cho cac dung cy diini trong giai phau hoac cac thiet bj sai xuat thu'c pham
Hinh thai hpc va do nham be mSt I mpt thdng sd quan trpng cua chi tie Snh hu'dng tdi cac dac tinh lam viecVc cac chi tiet/ be mat co khi cd ehuy^ ddng taong doi doi vdi cae chi tiet/b
Trang 2mat khae, viec g i i m dp nham cua Idp
be mat co y nghia quan trpng doi vdi
kha nang lam viec, dac tinh ma sat va
mai mon eua ehi tiet Khi phij mang len,
chat laong eua mang (dp nham be mat
va eac dac tinh khac cCia mang) se true
tiep quyet djnh chat lupng eua chi tiet
Hien nay, mot trong nhCrng iJng dung
ehu yeu cua mang edng trong cO khi la
phu len cac dung cu gia cong e l t got,
len be mat khuon mau hay cac chi tiet
may nhSm giam mai mon tang tuoi
thp cua cac chi tiet
Trong nghien edu nay, chung tdi
tien h^nh ehe tao eae mau thep, tif
SKD11, tien hanh phCi Idp mang CrN va
khao sat danh gia hlnh thai hoc va dp
nham te vi cua be mat mau thep trudc
va sau khi phu sCf dung kinh hien vi
quang hpc va thiet bl hien vi luc nguyen
ttf (Atomic Force IWierosope-AFM)
2 M O T A V A C H U A N BjTHf N G H I E M
2.1 Phucrng phap PVD
PVD (Physical Vapour Deposition)
la t h u i t ngQ chung dung de chi cac
phuang phap tao mang mdng bang sU
lang dpng vat ly cua vat lieu d pha hoi
len be mat mau hoac ehi tiet trong mdi
trudng chan khdng
Qua trinh PVD bao gom ba giai
doan chinh: Bay hoi (Evaporation): tach
hole lay vat lieu tii bia hay dich (target,
source); Chuyen chd (Transportation):
di chuyen vat lieu tdi be mat can phu
(substrate); va Lang dpng (Deposition/
Condensation): tao Idp mang len be
Bang 1 Quy trinh cong nghe che tao mau
mat phu Trong eae phuong phap PVD thi phuong phap phun xa (sputtering) dupc sCf dung kha pho bien trong nghien cdu lain eac u'ng dung thiic te
Trong Phuong phap phun xa (cd nguyen ly nha hinh 1): eac ion nang luong cao Ar+ trong tradng plasma b i n pha be mat bia Crom (target) "lay" ra eac phan t d vat lieu eua bia Cac phan tCf nay sau dd se lang dpng tren be mat nen (substrate) tao thanh Idp mang
-Spurtrrlng
•••; 2 )
J
~-L ^
Hinh 1 Nguyen ly cua phuong phap PVD
Hlnh2.MauthepSKD11
2.2 Chuan bj m l u thi nghiem
Thep hpp kim SKD11 dUOc sd dung
de tao mang CrN Mau phai dat eac yeu
TI
1
2
3
4
5
6
Nguyen cong
Tien
Oanh so
Mai phang
Nhiet luyen
Mai phang
Danh bang mau
Thong s6 ciia phoi
Kich
thirdc
16x5,5
16x5,5
16x5,3
16x5,3
16x5,1
16x5,0
Do cijrng
(HRC)
28-30 28-^30 28+30 58+60 58+60
58+60
0°
nham
R,
3,2 3,2 1,6 0,8 0,1
Dung cu, trang thiet bj
-May tien, may do do c^g -Bg danh so -Maymaiph^ng
- Thiet hi nhiet luyen, may do do ciJng -May mai phang
- May danh bong, giay rap cacloai, dung dich AI2O) 0,5pm, dung dich hat kim cuong 0,1pm
cau ve dp nham be mat, do cdng be mat va kich thadc phCi hop vdi cac thiet
bi va thi nghiem phan tich danh gia (hinh2), bang 1 la quy trinh eong nghe
sd tao mau
• Yeu cdu cho mdu thi nghiem:
-Kich thudc it)15xL5mm -Vatmau:ThepSKD11 -DdeUng:55-^60HRC
- Da mai phang va danh bdng dat
dp nhan bdng cap 11-13 -Sai sddo phlng 0,005
• Ldm sach mdu trUdc khi tgo mdng:
Cac chi tiet sau khi ehe tao co khi duoc gia edng co hpc be mat trade khi
ma Cd nhieu phaong phap gia cdng
be mat: mai va danh bdng, quay, xdc, phun nham loai bd het gi, oxit, chat ban, ba via va dat dUOc do nhan bdng theo yeu eau Tuy nhien, trong qua trinh gia cdng cac phuang phap gia eong nay van de lai tren be mat eua chi tiet cac vet dau md va eac Idp oxit
Xd ly be mat la mot khau quan trpng, then chdt trong quy trinh ma, nd quyet djnh nhieu den chat lapng Idp ma va
dp bam dinh cua Idp ma vdi Idp nen Cae vet dau md va cae Idp oxit can phai dapc loai bd XCf iy be mat kim loai bang phaong phap hda hpc cd the thac hien duoc nhufng dieu dd,
Phaong phap hda hoc de tay rda be mated hai qua trinh:
-Tayrdadaumd
-Tay gi:Tay cac Idp oxit bam tren be mat
• Cdc budc Idm sach hda hgc:
Qua trinh lam sach de thdng thadng dapc chia lam 11 bade (hinh 3):
- eadc 1 (Be I): Day la bade lam sach
dau tien, d bade nay hau het cac chat ban dupc loai bd
- BUdc 2 (Be 2): Rda bang nadc Dl,
han che qua trinh mang ehat ban t d be
1 sang be 3
- BUde 3 (Be 3): BSy la qua trinh tay
rda bo sung eho budc 1, ngoai ra be 3
cd the sd dung chat tay rda cd tinh axit
de tay cac chat oxy hda be mat
Trang 3•!^!MJirtTdc6NGNGHE
- BUde 4 (Be 4): Rda bSng nUde Dl, lam sach be mat eac chi tiet can lam
han ehe qua trinh mang chat ban t d be sach Loai cd ngudn goc dpng thUe vat
3 sang be 5 ed the tac dung vdi xut thanh xa phdng
- Budc 5 (Be 5): Thadng la chat kiem, tan dUpc trong nUde
sd dung dung dich NaOH de tiep tuc - Budc 6 (Be 6): Rda lai ehi tiet bSng
Hlnh 3 Quy trinh thirc hien cac biro'c lam sach mlu bang phu'Ong phap hoa hoc
nadc Dl
- BUdc 7 (Be 7): Dung axit HCl de tiy Idp oxit, nong do axit 10%, tdc dp th
cua HCl chu yeu phu thupc vao nfing
dp, ft phu thupc vao nhiet do do v$y khong daoc tay trong HCl d nhi#t d6 cao hpn 40''C tranh bdc hoi HCl gSy dpc hai
- BUdc 8 (Be 8): RCfa lai b^ng nadc Dl
- Budc 9 (Be 9): Rda chi tiet bSng
nUde Dl dadi vdi nadc chay
- Budc 10: Xi khd va say khd chl tilt
- Budc 11: Bao quan hoac ga l^n bg
ga va dUa vao buong chan khdng
2.3 Mo ta thiet bj tao mang va thiet bj cto kiem do nham
Qua trinh lang dong mang m6ng CrN bang phaong phap phun xa xung dapc thae hien tren thiet bj chSn khdng cd kich thadc buong vdi dudng kinh 0300 x 600 mm, he bom chSn
khdng sd dung la bom cP hpc vi bom
khuech tan Oau phun xa magnetron
l i p bia Crom (99,99%) kich thKdc 0100x10 mm, khi cdng tac sd dung gom hai loai: Ar 99,99% va N, 99,99% Lupng khi dUa vao buong chan khong dapc dieu khien b^ng hai thiet bj Mass Flow Control 2179A eua hang MKS Nguon dien ap xung sddung la thiet bj Pinnacle™ plus co tan so t d O-BSOKHz, cdng suat 5kW cda hang Advance Energy, Inc - USA Cac thdng so cong
nghe tao mang CrN dupe tham khioHi
eac nghien cdu trudc da dupe edng b6 Khoang each de - bia: 100 mm, ddng phun xa 1 A, tan sd xung: 100 kH^ lau lupng khi Ar: 10 seem, luu lapng kW N^: 6 seem, nhiet dp de: 300"C
Oe thep SKD 11 (Cl ,5%, Si 0,6%, Mn 0,6%, Cr 12%, Mo 0,85%, V 1,1%, Co 1%,
P 0,3%) dadng kinh 020 x5 mm Thiet bj kh^o sat hinh thai hpc va iJ6 nham te vi be mat: kinh hien vi Olympus CX200, kinh hien vi lae nguyen tdAFM (Atomic Force Microscope)
2.4 Tao mang CrN tren de th^p SKD11
• BUdc 7 Ldm sach bemgtdeth^^'
Trang 4Hinh 4 Cac mau trudc khi tao mang CrN tren be mat
lUaii I Udii 2 Mau 3
Hinh 5 Cac mau sau khi tao mang CrN tren be mat
Mail I Mail 2
Hlnh 6 Anh be mat cua cac mau sau khi nhiet luyen va mai
Mail I Mail 2 Win 3
Hinh 7 Anh be mat ciia cac mau sau khi nhiet luyen, mai va danh bong
; Ma„ I Mail 2 Man 3 Mdu -I
'• Hinh 8 Anh be mat 1^ mang CrN tren mau thep SKD11
( Theo cac bade lam sach chi tiet buong chan khdng
b^ng phaong phap hda hpc (nhu trinh - Dieu chinh khoang each t d dau
j bay phia tren) phdn xa den d^: SO mm
• Budc 2 Hut chdn khong cabdn vd - Hut chan khdng den ap suat 10'Pa
11 gia nhiet di ' ^^^ nguon nung de, dat nhiet dp:
- Ga chi tiet len bp ga quay trong 300°C
- Hut chan khdng den 10'^Pa
• Su'd'c 3 Ldm sach debdng plasma
-Nhiet do trong buong ehan khdng: 300°C/ thdi gian duy tri 30 phut
- Ap suat eo ban: 8 x l 0 ^ Pa
- Luu lapng khi 0^: 40 seem/ ap suat buong 1 Pa
-Bien ap lam sach: 1 kV -Ddng lam sach: 2A -Thdi gian lam sach: 30 phut
• Budc 4 Mg Idp chuyen tiip Cr
- Dieu khien khi Ar vao buong chan
khong vdi lau laong 10 seem -Dieu ehinh ddng phun xa IA -Thdi gian ma 5 phut
• BUdc 5 Mg ldp phu CrN
- Dieu khien khf Ar vao budng chan
khdng vdi luu laong 10 seem
- Dieu khien khi N^ vao buong ehan khdng vdi lUu lUOng 6 seem -Dieu ehinh ddng phun xa IA -Thdi gian ma 150 phut
• Budc 6 Chd ngudi vd lay mdu
- Chd nhiet do buong ha xudng
lOO^C
- X I khi va lay ehi ti€t ra khdi buong chan khdng
- Kiem tra va danh gia Idp phu: quan sat dudi kinh hien vi, do do cdng
3 K I T QUA VA THAO LUAN Hlnh 4 va 5 la anh chup cac mau SKD11 trade va sau khi tao mang Ket qua khao sat ban dau eho thay, mang CrN tao ra dong deu va bam dinh tdt tren nen thep SKD11, khdng cd vet nijft,
rd, bong trdc tren be mat
3.1 Khao sat hinh thai hoc be
mat ciia m l u sd dung phUtfng phap
quang hoc
Cac mau khao sat:
-ThepSKDIl
- Mang CrN tren thep SKDl 1 Anh be mat cua mdt so mau thep SKDII sau khi dupc nhiet luyen + mai (hlnh 6) va nhiet luyen -i- mai -i- danh bdng (hinh 7), chup bdi kinh hien vi Olympus CX200
Be mat cac mau chua danh bdng xuat hien nhieu vet xudc dpc theo
Trang 5IMiWJilltMeONG NGHE
Mail I (Mail cia phu) Mail 2 (Mail dd phu)
Mail 3 (Mail da phu) Mau 4 (Mdu da phu)
ifinh 9 ifinh thai hoc be mat cua cac mau cl cap do nano met khao sat bang AFM
phaong ehay dao doc eua da mai
ehdng td do nham cdn rat ldn, trong
khi dd eae mau 6uac danh bdng cd be
mat trpn mm, cae vet xUde xuat hien rat
It va cd chieu sau nhd hOn
Hinh 8 la anh cua be mat mang CrN
tren cac mau sau khi phu Cd the thay
rang hinh thai hpe be mat eua mau trudc va sau khi phu la giong nhau, hay ndi mdt each khac, Idp mang CrN khdng lam thay doi hinh dang hlnh hpc cua be mat dapc phu Ket qua thi nghiem cho thay, sd dung kinh hien vi Olympus CX200 cd the danh gia daoc
hinh thai hpc be mat d cap dp
micro-m e t Uu diemicro-m eua phuong phap quang hpc la cho ket quei nhanh va tuong doi ehinh xac, tuy nhien phUOng phap nay khdng the danh gia chfnh xae daoc cae nhap nhd te vi d cap dp nano-met tren be mat, khdng danh gia dapc cac khuyet tat te vi tren be mat mau hoac eae khuyet tat gay ra do qua trinh tao mang
3.2 KhSo sat hinh thai hoc be mat
va do nham t ^ vi cua mau trUdc va sau khi phu mang CrN sdr dung thiet bjAFM
Hinh 9 la anh AFM be mat eae mau trade va sau khi ddOC phu Dien tich quet (khSo sat) la 30x30 am^
Sd dung phaong phap AFM cho ta hlnh anh ehinh xae ve hlnh thai hpe b^ mat cua ldp mang d cap dp nano-met,
do be mat Idp mang g^n nhu sao chep lai be mat mau nen tren be mat mang
ta cung ed the thay eac dudng gach song song chinh la cac vet gia cong tren be mat nen
Ket qua do do nham te vi tren mau thep SKD11 (hinh 10) va tren be mat mang CrN (hinh 11) Cac mau daoc do
vdi - dien tich quet = 30x30 \XTnh
Ket qua cho thay, do nham te vi be mat ldp mang trong khoang (R^ =12,53 -^ 35,91 nm) So sanh do nham do dUtfC tren Idp mang CrN va mau thep DKDll (hinh 10 va hinh 11) cho thay dd nham cua Idp mang CrN sau khi phu Icffi hcJn
dp nham be mat mau thep SKDl l.Dleu nay c6 the giai thieh bdi cac hat/khol hat vat lieu CrN cd kich thUde khac nhau l^ng dpng cCia len be mat cda mau thep, tao nen sU thay doi nhd ve dp nham te vi
4 KET LUAN
Ket qua nghien cdu da che tao cac mau thep SKDl 1 va xay ddng qui trmh lam sach be mat mau bang phaong phap hda hoe trUdc khi phd Idp manaj CrN nham nang cao khii nang bam dinh CLia Idp phu vdi Idp nen Sau d6 thue hien tao mang CrN tren mau thep SKD11 va da tien hanh khao sat danh
Trang 6Hlnh 9 Ket qu^ do nham te vi be mat mau thep SKDII Hlnh 10 Ket qua So nham te vi be mat mang CrN
g i a h i n h t h a i h o c v a d o n h a m t e v i I d p
m a n g C r N
T d cae k e t q u a d a t d u p c , d U a ra
n h d n g k e t l u a n s a u :
- Ldp mang CrN bam dinh tdt tren
nen thep S K D I I , khdng cd eae vet ro,
nut tren be mat mang
- Thiet bi hi^n vi luc nguyen t d la
edng eu manh eho phep nghien cdu
hinh thai hoc va dp nham be mat d cap
dp nano-met
- Be mat Idp mang CrN gan nhu sao
chep lai b^ mat cCia de thep SKDl 1
- Op nham te vi cua mau sau khi phu
Idp mang CrN Idn hon so vdi dp nham
cua Idp mau thep SKDl 1, cd the do sU
lang dpng eda cac hat vat lieu vdi kich
thude khae nhau
Hudng nghidn cdu tiep theo se tap trung vao dieu chinh eac thdng so cdng nghe de tao dupe Idp mang ed eac dac tinh phii hop Thd nghiem cac dac tfnh cua mang trong dieu kien phdng thi nghiem eung nhd dieu kien lam viec cua Idp phu de danh gia khS nang dng dung trong thuc te
PliAn bien khoa hoc: PGS.TS Hoang Van Gfft
TAILIEUTHAMKHAO
[1) M Polok-Rubiniec, L A Dobrzanski, Comparision of tde CrN anclTiN/(TiAI)N PVD coatings deposited onto plasma nitrited steel JAMME,
P172-179,9-10,2010
[2] B Warcholinski, A Gilewicz, Tnbologycal properties of CrN_ coatings JAMME, P498-504, 12/2009
[3] A,6.Cnst6bal, J.J Damborenea, TJ Tate, Recent advances in the chmmium nitride PVD process for forming and machining surface protection JMPT, P415-421,12/2005
[4] Jianliang Lin, John J Moore, Zhili Wu, Brajendra Mistira, Process, structure and properties of CrN coatings deposited using Modulated Pulse Power (MPP) Sputtering
[5] GFE Schmalkalden e.V, Principles of coating technology
[6] M Polok-Rubiniec, LA Dobrzanski, M Admiak, The properties and wear resistance os the CrN PVD coatings JAMME, P165-171,10/2008
Hdi T H A O KHOA HOC QUOC GIA
Sang ngay 16/5/2014, tai co sd 2, trifcmg Bai hgc Cong nghiep Ha Noi to chisc
buoi Hpi thao khoa hoc quoc gia "Dao tao ly thuyet gan lien v ^ thiic tien
' ngdnh Qu^n tri kinh doanh va Tai chmh ngSn hang" vd\ i\S tham dii ci^a
c k nha khoa hoc d^n tir cac trifdng Dai hoc Quoc gia Ha Moi, Sai hgc Kinh te
quoc dan, 6ai hgcThifcmg mai, Bai hgc Lao dgng - Xa hgi; cac doanh nhan - dai
dien cho doanh nghiep, nha sis dung lao dpng Ve phia Nha tririmg, dai dien
cho Ban lanh dao Nha tnidng cdTS Ha Xuan Quang, TS Nguyen Anh Tuan -Pho Hieu trudng ciing tru'dng, phd cac khoa va cac giao vien, glSng vien cfia Khoa Quan ly kinh doanh
Hien nay, tyle smh vien (SV) ra tnfdng tim du'oc viec lam phii hpp, dap dng du'oc cac yeu cau cua cdng viec cdn kha han che Nganh QuSn tri kinh doanh va Tai chinh ngan hang [QTKD va TCNH) cung khong phSi ngoai le C6 nhieu nguyen nhan de gi^i thich van de nay, trong do nguydn nhSn quan trgng la SV mdi ra
tftiisnq chi cd nhiilig kien thdc ly thuyet co ban ma chira diu^ cd nhQng kinh
nghiem, ky nang in} ly cac cong viec phat sinh trang thi/c te
Sau khi nghe cac bai tham luan la cac cong trinh nghien cdu cua ck nha khoa
hoc, cac dai bleu da thSo luan ba ngi dung:
-Tam quan Uong cua gSn ket ly thuyet vdi thifc tien trong giang day SV nganh QTKD va TCNH tai tru'dng Bai hpc Cdng nghiep Ha Npi
- PhUtfng phip giang day cd the ap dung doi vdi cac hgc phan, dac biet la hpc phan chuyen nganh cua sinh vien QTKD va TCNH
- Hlnh thanh he thdng cac nguyen t3c va tif do xay difng bd quy tac chuan dio giang vien khi giang day tren Idp