Đây là một bài báo khoa học về dây nano silic trong lĩnh vực nghiên cứu công nghệ nano dành cho những người nghiên cứu sâu về vật lý và khoa học vật liệu.Tài liệu có thể dùng tham khảo cho sinh viên các nghành vật lý và công nghệ có đam mê về khoa học
Trang 1Ultrafast growth of single-crystalline Si nanowires J.B Chang, J.Z Liu, P.X Yan ⁎ , L.F Bai, Z.J Yan, X.M Yuan, Q Yang
Institute for Plasma and Metal Materials, Lanzhou University, Lanzhou 730000, China
Received 25 September 2005; accepted 22 December 2005
Available online 31 January 2006
Abstract
Silicon nanowires (SiNWs) have been catalytically synthesized by heat treatment of Si nanopowder at 980 °C The SiNWs comprise crystalline
Si nanoparticles interconnected with metal catalyst The formation mechanism of nanowires generally depends on the presence of Fe catalysts in the synthesis process of solid–liquid–solid (SLS) Although gas phase of vapor–liquid–solid (VLS) method can be used to produce various of different nanowire materials, growth model based on the SLS mechanism by heat treatment is more ascendant for providing ultrafast growth of single-crystalline Si nanowires and controlling the diameter of them easily The growth of single-crystalline SiNWs and morphology were discussed
© 2006 Elsevier B.V All rights reserved
Keywords: SiNWs
1 Introduction
Crystalline nanostructures offer unique access to
low-dimensional physics, and they can be used as nanotechnology
building blocks to reach higher device integration densities than
conventional fabrication methods and have more singularity
character One-dimensional (1D) structure with nanometer
diameters, such as carbon nanotubers and semiconductor
nanowires, has great potential for testing and understanding
fundamental concepts about the roles of dimensionality and
size, for example, optical, electrical, and mechanical properties
and for their potential applications in research and electronic
nanodevices[1] It's known that Si nanowires (SiNWs) have the
strong ability to confine photoenergy from visible light [2]
SiNWs are particularly attractive due to the central role of the
silicon semiconductor industry, which would allow SiNWs to
be implemented using existing technologies Because silicon
turns into a direct band-gap semiconductor at nanometer size
due to quantum confinement [3], it could be used in
optoelectronics SiNWs can be synthesized by laser ablation
[1], thermal evaporation of solid sources[4–6] and chemical
vapor deposition (CVD)[7] The various directional features of
these techniques were reported and the model proposed for
preferred SiNWs growth directions[8] These methods are often based on the vapor–liquid–solid (VLS idea [9]using various metals as catalysts, such as Au, Fe, Ti and Ga, to enhance the growth of SiNWs In this work, we demonstrate a simple method of growing SiNWs Si nanopowder was used in our work instead of the dangerous gas of silane as the Si source The synthesis of SiNWs was carried out using a mixture of Si nanoparticles and iron nitrate by thermal treatment at 980 °C in
an evacuated sealed quartz tube The key parameter necessary to induce nanowires formation is the temperature and catalyst
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⁎ Corresponding author Tel.: +86 931 8912661; fax: +86 931 8913554.
E-mail address: pxyan@lzu.edu.cn (P.X Yan) Fig 1 XRD spectrum of Si nanoparticles prepared by cathode arc plasma 0167-577X/$ - see front matter © 2006 Elsevier B.V All rights reserved.
doi: 10.1016/j.matlet.2005.12.085
Trang 22 Experiment
Before the preparation of producing SiNWs, Si nanoparticles were synthesized by cathode arc plasma which is one of the most powerful methods because of uniform particles and high efficiency, using a mixture of SiO2 and C with a molar proportion (1 : 1) in argon atmosphere The discharge voltage is
20 V and the current is 120 A The flux of hydrogen as protective gas was 15 standard cubic centimeters per minute Then the Si nanopowder was ultrasonically dispersed in the alcohol solution containing Fe(NO3)3, which was subsequently evaporated and the dried samples were calcined in an H2flow at
980 °C for 1 h X-ray diffraction (XRD) measurements and transmission electron microscope (TEM) were employed to
Fig 2 TEM image of Si nanoparticles by cathode arc plasma.
Fig 3 (a) TEM image of Si nanoparticles after heat treatment at 980 °C without Fe catalysts and (b) nanowires with Fe, (c) TEM image showing nanopartical catalysts
at the end of nanowires (d) TEM image of an individual smooth nanowire and corresponding SAED pattern.
Trang 3investigate the structure and morphology of the Si nanoparticles
and nanowires
3 Results and discussion
The phase composition and phase structure of the as-synthesized
products were examined by X-ray diffraction (XRD, Siemens D-500
with Cu Ka radiation and a normal 2θ scan ).Fig 1shows a typical
XRD spectrum of the Si nanoparticles on different crystal planes
synthesized by cathode plasma discharge It can be seen from the
dominant diffraction peaks, as indexed in the spectrum, and originated
from cubic-structure Si, which can be readily indexed to face-centered
cell of Si (Joint Committee on Powder Diffraction Standard (JCPDS)
Card, No 05-0565) Their average diameter of 21.6 nm was calculated
using Scherrer equation, which is in good accordance with the TEM
observation (Fig 2)
During the heat treatment at 980 °C, Si nanoparticles couldn't be
transformed into nanowires if there was no iron catalysts as shown in
Fig 3(a) When introduced iron catalysts, Si nanowires came out.Fig
3(b) shows the TEM images of SiNWs with tens of nanometer in
diameter and several hundreds of micrometers in length Fe
nanoparticles as catalysts are embedded in SiNWs as shown inFig 3
(c) Selected area electron diffraction (SAED) indicates that the
nanowires are made of crystalline silicon inFig 3(d)
After heat treatment, when H2 flow was closed and air was
introduced into the quartz tube during the cooling procedure, SiOx
nanotubes would be produced deriving from SiNWs oxidated (Fig 4)
The ring in the SAED image inserted inFig 4(b) is from the reflection
of SiO2(400)
The mechanism of SiNWs growth is explained now At high
temperature, Fe(NO3)3 deposited into iron oxide and momentarily
deoxidized into iron nanodroplets in H2 atmosphere In the
metal-catalyzed SLS technique, a liquid metal cluster or catalyst acts as the energetically favored site for the adsorption fusing Si nanoparticles of solid-phase reactants, to function as Si reservoir by eutectic liquid formation, and to become supersaturated with Si The present of a nanopartical catalyst at one end of the nanowires is the essential feature
of SLS growth As shown by the arrow inFig 3(c), SiNWs terminated
at one end in a nanoparticle with a diameter 1∼1.2 times that of the connected nanowire.Fig 3(d) shows the TEM image of an individual smooth nanowire and the corresponding selected area diffraction (SAED) pattern The d-spacings of the nanocrystals calculated from the two diffraction dots of the SAED pattern are consistent with those of Si (200) and (400) It is well established that Si nanowires grown by the metal-catalyzed SLS technique usually have a growth direction along (200) and are single-crystalline [10] Therefore, the (200) growth direction may be regarded as a typical feature of the metal-catalyzed SLS process We surprisedly find that nanotubes appear in this experiment inFig 4(a) It is obvious that nanopartical catalysts are at the end of nanotubes as shown by the arrow Fig 4(b) shows TEM image of an individual nanotube and the corresponding SAED pattern (diffraction ring), in which the ring is from reflection of SiO2(400) When inpouring air into the evacuated sealed quartz tube at high temperature, the surface of SiNWs was immediately oxided[11]and meanwhile the Si inside was melted and subsequently evaporated leaving a SiO2tube[2]
4 Propose mechanism
The formation mechanism of nanowires generally depends
on the presence or absence of metal catalysts in the synthesis process, i.e., SLS and VLS except for oxide-assisted growth
[12] Unlike the well-developed VLS, the detail of SLS process for silicon nanowires is not expatiated In this paper, we
Fig 4 (a) TEM image showing catalysts at the end of nanotubes, (b) TEM image of an individual nanotube and SAED pattern.
Fig 5 Schematic figure of nanowires growth process.
Trang 4expound SiNWs formation mechanism The solid–liquid–solid
(SLS) nanowires growth mechanism is illustrated in the case of
nanowires growth process in Fig 5 The SiNWs have been
synthesized by heat treatment of Si nanoparticles In the
metal-catalyzed SLS technique, a liquid metal cluster or catalyst acts
as the energetically favored site for the adsorption of
liquid-phase reactants The heat treatment can be acted as a kind of
sinter In this experiment, the primary growth mode is that
agglomeration incorporates particles into nanowires In heat
treatment process, particles begin to melt and the adsorbability
gradually augments with the temperature increasing Because of
the driving force of thermodynamics, the Si atoms dissolve in
the Fe nanocrystal to form a liquid FeSi seed droplet
Thereupon, a tiny cervix between Fe particle and Si particle
comes into being The cervix is filled and leveled up through
diffusion of the surface The seed droplet reaches the eutectic
composition Si diffuses from the liquid molten alloy phase ball
and grows epitaxially at the liquid/solid interface Simultaneity,
Fe catalysts remove ahead and continue to absorb other Si
nanoparticles resulting in the production of long SiNWs
The nanowires are able to grow when the FeSi alloy eutectic
temperature and the concentration of crystallizing material can
be exceeded The current interest in the physics and possible
applications of Si nanostructures and the need to develop
techniques to fabricate such structures made it appropriate to
take another look at the SLS technique as a means of Si
nanowires ultrafast growth of fabrication
5 Conclusion
In summary, Si nanowires were catalytically synthesized by
calcining Si nanopowder containing Fe(NO3)3 in an H2 A
pathway of the growth of SiNWs was presented based on SLS mechanism Under the conditions used to grow the nanowires, diffusion of Si through or around a solid FeSi nanoparticle appears to be rapid enough to transport Si away from the surface
to the growing wires In addition, rapid oxidation of SiNWs could lead to SiOxnanotubes We further discussed the growth mechanism
Acknowledgements
We thank for Engineer Shuang Wang and Youxiang Li, Testing and analytic center, Gansu Academy of Science, who give a lot of help
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